The processes of heat and mass transfer in systems with liquid-gas interface are of interest to a wide range of problems. Destruction dynamics of thin horizontal layers of silicone oils were investigated using confocal sensor on a 3D-positioning system. The numerical solution of the problem was obtained in the lubrication approximation theory for two-dimensional axisymmetric thermocapillary flow. The model takes into account the surface tension, viscosity, gravity and heat transfer in the substrate. The numerical algorithm for the joint solution of the energy equation and the evolution equation for the liquid layer thickness has been developed. The establishment method was used to obtain the stationary solutions. Experimental measurements and numerical calculations were made for silicone oils of different viscosities, heating power and initial thickness. The significant effect of the surface tension coefficient and its temperature coefficient on thermocapillary deformation was detected. It was experimentally established that the deformation value depends on a heat flux value. A liquid bump is formed at the boundary of the heating region that is also observed in numerically calculated profiles.
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