We investigated the effects of magnetic anisotropy and anisotropy alignment to the coil geometry on the performance of a thin film inductor. For this, Ti/FeTaN bilayer films with large Hk(∼10 Oe) were used as a magnetic layer. We also fabricated a double rectangular spiral inductor which gives a uniaxial coil magnetic flux. When the hard axis of magnetic film is aligned to the magnetic field direction, highest inductance values as well as best frequency response can be obtained. As misalignment angle from the hard axis alignment increases, high-frequency characteristics are substantially degraded, especially at the misalignment angle higher than 45°. Current capability of inductor is found to depend on both Hk and hard axis alignment. The hard axis alignment, in conjunction with large Hk, increases the current capability of inductor significantly.