We report a dispersion slope equalizer on a planar lightwave circuit for wavelength division multiplexing (WDM) transmission. This device consists of an array of lattice-formed equalizers with different compensation values fabricated on one wafer and arrayed-waveguide gratings for wavelength multi/demultiplexing. We describe its configuration, operational principle, parameter design, fabrication, and measured characteristics in detail. N×20 and N×40 Gb/s slope equalizers were fabricated and their characteristics agreed well with designed values. We also report a reduction in the bias electrical power needed for thermooptic phase shifters in the equalizer array that we realized by employing a phase trimming technique normally used for optical switches.