Abstract
A thermooptic (TO) phase shifter, which consists of a thin-film heater loaded on a silica-based single-mode waveguide on a Si substrate, was found to exhibit a sli1h,t polarization dependence of about 3.1% between the TE and TM modes. This dependence, which is caused by anisotropic stress concentration due to local heating, was successfully reduced by forming stress-releasing grooves on either side of the heater.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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