To improve the strength properties, adhesion, and the thermal cycling resistance of ceramic coatings, the titanium alloy surface was modified with copper ions under different processing times. It is found that at the maximum processing time, the thickness of the alloyed layer reaches 12 μm. It is shown that the modified layer has a multiphase structure in addition to the main α and β–titanium phases with the intermetallic compounds of the Ti-Cu system. The parameters of the fine structure of the material are investigated by the X-ray diffraction analysis. It has been found that when the surface of the titanium alloy is modified, depletion occurs in the main alloying elements, such as aluminum and vanadium, the crystal lattice parameter increases, the root-mean-square (rms) displacements of the atoms decrease, and the macrostresses of compression arise. A multilevel micro- and nanoporous nanocrystalline structure occurs, which leads to an increase in the adhesion and the thermal cyclic resistance of the ceramic coating based on Si-Al-N.