We have constructed an atomic force microscope (AFM) operating under an ultrahigh vacuum (UHV). We have imaged the cleaved (100) surface of LiF ionic crystal to clarify the AFM's performance. As a result, for the first time, we have obtained atomically resolved AFM images of atomic defects penetrating the surface. This result seems to suggest that the cleaved LiF (100) surface was imaged under the condition of monoatomic or small cluster tip-sample interaction.
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