This study investigates the impact of oxygen-plasma (O2-plasma) treatment on the microscale electrical properties of indium tin oxide (ITO) surfaces for enhancement of the luminous efficiency of polymer light-emitting diodes (PLEDs). Significant effects on conductivity distribution were observed when treatment was performed at pressures exceeding 0.4 Torr. ITO-6, the ITO treated with O2-plasma at 0.6 Torr, emerged as the preferred anode substrate for PLEDs, displaying a 72.5 % coverage of stable-conductive regions. When utilized as the anode in PLED, it exhibited a remarkable 209 % increase in average current efficiency and a 184 % enhancement in electroluminescent intensity compared to the reference PLED. These findings provide valuable insights for optimizing PLEDs through surface modification of ITO.