Detailed Surface Research Articles

Vox-Surf: Voxel-Based Implicit Surface Representation.

Virtual content creation and interaction play an important role in modern 3D applications. Recovering detailed 3D models from real scenes can significantly expand the scope of its applications and has been studied for decades in the computer vision and computer graphics community. In this work, we propose Vox-Surf, a voxel-based implicit surface representation. Our Vox-Surf divides the space into finite sparse voxels, where each voxel is a basic geometry unit that stores geometry and appearance information on its corner vertices. Due to the sparsity inherited from the voxel representation, Vox-Surf is suitable for almost any scene and can be easily trained end-to-end from multiple view images. We utilize a progressive training process to gradually cull out empty voxels and keep only valid voxels for further optimization, which greatly reduces the number of sample points and improves inference speed. Experiments show that our Vox-Surf representation can learn fine surface details and accurate colors with less memory and faster rendering than previous methods. The resulting fine voxels can also be considered as the bounding volumes for collision detection, which is useful in 3D interactions. We also show the potential application of Vox-Surf in scene editing and augmented reality. The source code is publicly available at https://github.com/zju3dv/Vox-Surf.

A Raman topography imaging method toward assisting surgical tumor resection

AbstractAchieving complete tumor resection upon initial surgical intervention can lead to better patient outcomes by making adjuvant treatments more efficacious and reducing the strain of repeat surgeries. Complete tumor resection can be difficult to confirm intraoperatively. Methods like touch preparation (TP) have been inconsistent for detecting residual malignant cell populations, and fatty specimens like breast cancer lumpectomies are too fatty to process for rapid histology. We propose a novel workflow of immunostaining and topographic surface imaging of freshly excised tissue to ensure complete resection using highly sensitive and spectrally separable surface-enhanced Raman scattering nanoparticles (SERS NPs) as the targeted contrast agent. Biomarker-targeting SERS NPs are ideal contrast agents for this application because their sensitivity enables rapid detection, and their narrow bands enable extensive intra-pixel multiplexing. The adaptive focus capabilities of an advanced Raman instrument, combined with our rotational accessory device for exposing each surface of the stained specimen to the objective lens, enable topographic mapping of complete excised specimen surfaces. A USB-controlled accessory for a Raman microscope was designed and fabricated to enable programmatic and precise angular manipulation of specimens in concert with instrument stage motions during whole-surface imaging. Specimens are affixed to the accessory on an anti-slip, sterilizable rod, and the tissue surface exposed to the instrument is adjusted on demand using a programmed rotating stepper motor. We demonstrate this topographic imaging strategy on a variety of phantoms and preclinical tissue specimens. The results show detail and texture in specimen surface topography, orientation of findings and navigability across surfaces, and extensive SERS NP multiplexing and linear quantitation capabilities under this new Raman topography imaging method. We demonstrate successful surface mapping and recognition of all 26 of our distinct SERS NP types along with effective deconvolution and localization of randomly assigned NP mixtures. Increasing NP concentrations were also quantitatively assessed and showed a linear correlation with Raman signal with an R2 coefficient of determination of 0.97. Detailed surface renderings color-encoded by unmixed SERS NP abundances show a path forward for content-rich, interactive surgical margin assessment.

Effects of urban drainage inlet layout on surface flood dynamics and discharge

Drainage inlets, the primary conduits for surface floodwater into underground facilities, significantly influence the performance of a drainage system. This study employs a two-dimensional hydrodynamic model to investigate how drainage inlet distribution affects urban flood dynamics and drainage flow discharge. We first validate the model with dataset obtained in a dedicated experiment observing urban surface and drainage flows. We identified two common layouts of drainage inlets, namely straight-line distribution (SLD) and surround type distribution (STD), and based on the two layouts, we simulated detailed surface flood dynamics and drainage discharge under various urban flood conditions and inlet spacing scenarios. The results indicate that SLD exhibits higher drainage capacity in shorter time and greater total drainage volume under urban peripheral flood condition, while STD consistently outperforms in draining urban surface flooding induced by intense rainfall. It is also found that inlet spacing plays a crucial role in affecting drainage efficiency. To be specific, both layouts with medium spacing (l0 = 0.53 for SLD and 0.93 for STD) near flood-prone areas perform better when a sudden-onset peripheral flooding occurred; however, in the case of rainfall-induced flooding, maximizing inlet spacing and strategically distributing them across urban streets proves to be a more effective strategy for draining floodwater. Individual inlets near the ends of SLD and inlets at far-corners of STD shoulder higher drainage loads. This study provides valuable insights for optimizing inlet layout strategies under various urban flood conditions and improving floodwater collection.

Synergistic integration of Ni-metal organic framework/SnS2 nanocomposite and nickel foam electrode for ultrasensitive and selective electrochemical detection of albumin in simulated human blood serum

Albumin is a vital blood protein responsible for transporting metabolites and drugs throughout the body and serves as a potential biomarker for various medical conditions, including inflammatory, cardiovascular, and renal issues. This report details the fabrication of Ni-metal organic framework/SnS2 nanocomposite modified nickel foam electrochemical sensor for highly sensitive and selective non enzymatic detection of albumin in simulated human blood serum samples. Ni-metal organic framework/SnS2 nanocomposite was synthesized using solvothermal technique by combining Ni-metal–organic framework (MOF) with conductive SnS2 leading to the formation of a highly porous material with reduced toxicity and excellent electrical conductivity. Detailed surface morphology and chemical bonding of the Ni-MOF/SnS2 nanocomposite was studied using scanning electron microscopy, transmission electron microscopy, Fourier transform infra-red, and Raman analysis. The Ni-MOF/SnS2 nanocomposite coated on Ni foam electrode demonstrated outstanding electrochemical performance, with a low limit of detection (0.44 μM) and high sensitivity (1.3 μA/pM/cm2) throughout a broad linear range (100 pM–10 mM). The remarkable sensor performance is achieved through the synthesis of a Ni-MOF/SnS2 nanocomposite, enhancing electrocatalytic activity for efficient albumin redox reactions. The enhanced performance can be attributed due to the structural porosity of nickel foam and Ni-metal organic framework, which favours increased surface area for albumin interaction. The presence of SnS2 shows stability in acidic and neutral solutions due to high surface to volume ratio which in turn improves sensitivity of the sensing material. The sensor exhibited commendable selectivity, maintaining its performance even when exposed to potential interfering substances like glucose, ascorbic acid, K+, Na+, uric acid, and urea. The sensor effectively demonstrates its accuracy in detecting albumin in real samples, showcasing substantial recovery percentages of 105.1%, 110.28%, and 91.16%.

Unveiling the Potential of Ambient Air Annealing for Highly Efficient Inorganic CsPbI3 Perovskite Solar Cells.

Here, we report a detailed surface analysis of dry- and ambient air-annealed CsPbI3 films and their subsequent modified interfaces in perovskite solar cells. We revealed that annealing in ambient air does not adversely affect the optoelectronic properties of the semiconducting film; instead, ambient air-annealed samples undergo a surface modification, causing an enhancement of band bending, as determined by hard X-ray photoelectron spectroscopy measurements. We observe interface charge carrier dynamics changes, improving the charge carrier extraction in CsPbI3 perovskite solar cells. Optical spectroscopic measurements show that trap state density is decreased due to ambient air annealing. As a result, air-annealed CsPbI3-based n-i-p structure devices achieved a 19.8% power conversion efficiency with a 1.23 V open circuit voltage.

Detailed modeling of odd–even staggering in fission-fragment charge distributions

During the last 10 years or so the Brownian shape-motion (BSM) model has been used in numerous calculations of fission-fragment mass and charge distributions with encouraging agreement with experimental measurements. In this model the structure obtained in the fission-fragment distributions is entirely a consequence of the structures in the calculated five-dimensional (5D) potential-energy surfaces. The potential-energy model until recently did not accommodate the influence of the emerging fragment properties on the calculated potential energy. Therefore there were no odd-even effects in the calculated fission-fragment distributions. Recent extensions of the potential-energy model allow properties of the nascent fragments to be included in the potential-energy model. Application of the BSM model to execute random walks on these more detailed potential-energy surfaces led to calculated fission-fragment yields that exhibited odd-even effects, which “by eye” indicated reasonable agreement with experimental data. The present work goes a step further with a quantitative comparison between experimental and theoretical results based on the global and local odd-even staggering observables. Theoretical calculations and experimental observations both show that pairing effects and enhancement of two-nucleon relative to one-nucleon transfer in heavy-ion collisions decrease with excitation energy and implementing a damping of these quantities with excitation energy leads to improved agreement with experiment. Characteristic variations of the local staggering with charge split seen in the experimental data are also present in the calculated results.

Completing the picture of field-grown cereal crops: a new method for detailed leaf surface models in wheat.

The leaf angle distribution (LAD) is an important structural parameter of agricultural crops that influences light interception, radiation fluxes and consequently plant performance. Therefore, LAD and its parametrized form, the Beta distribution, is used in many photosynthesis models. However, in field cultivations, these parameters are difficult to assess and cereal crops in particular pose challenges since their leaves are thin, flexible, and often bent and twisted around their own axis. To our knowledge, there is only a very limited set of methods currently available to calculate LADs of field-grown cereal crops that explicitly takes these special morphological properties into account. In this study, a new processing pipeline is introduced that allows for the generation of realistic leaf surface models and the analysis of LADs of field-grown cereal crops from 3D point clouds. The data acquisition is based on a convenient stereo imaging setup. The approach was validated with different artificial targets and results on the accuracy of the 3D reconstruction, leaf surface modeling and calculated LAD are given. The mean error of the 3D reconstruction was below 1mm for an inclination angle range between 0° and 75° and the leaf surface could be quantified with an average accuracy of 90%. The concordance correlation coefficient (CCC) of 99.6% (p-value = [Formula: see text]) indicated a high correlation between the reconstructed inclination angle and the identity line. The LADs for bent leaves were reconstructed with a mean error of 0.21° and a standard deviation of 1.55°. As an additional parameter, the insertion angle was reconstructed for the artificial leaf model with an average error < 5°. Finally, the method was tested with images of field-grown cereal crops and Beta functions were approximated from the calculated LADs. The mean CCC between reconstructed LAD and calculated Beta function was 0.66. According to Cohen, this indicates a high correlation. This study shows that our image processing pipeline can reconstruct the complex leaf shape of cereal crops from stereo images. The high accuracy of the approach was demonstrated with several validation experiments including artificial leaf targets. The derived leaf models were used to calculate LADs for artificial leaves and naturally grown cereal crops. This helps to better understand the influence of the canopy structure on light absorption and plant performance and allows for a more precise parametrization of photosynthesis models via the derived Beta distributions.

Res-NeuS: Deep Residuals and Neural Implicit Surface Learning for Multi-View Reconstruction

Surface reconstruction using neural networks has proven effective in reconstructing dense 3D surfaces through image-based neural rendering. Nevertheless, current methods are challenging when dealing with the intricate details of large-scale scenes. The high-fidelity reconstruction performance of neural rendering is constrained by the view sparsity and structural complexity of such scenes. In this paper, we present Res-NeuS, a method combining ResNet-50 and neural surface rendering for dense 3D reconstruction. Specifically, we present appearance embeddings: ResNet-50 is used to extract the appearance depth features of an image to further capture more scene details. We interpolate points near the surface and optimize their weights for the accurate localization of 3D surfaces. We introduce photometric consistency and geometric constraints to optimize 3D surfaces and eliminate geometric ambiguity existing in current methods. Finally, we design a 3D geometry automatic sampling to filter out uninteresting areas and reconstruct complex surface details in a coarse-to-fine manner. Comprehensive experiments demonstrate Res-NeuS’s superior capability in the reconstruction of 3D surfaces in complex, large-scale scenes, and the harmful distance of the reconstructed 3D model is 0.4 times that of general neural rendering 3D reconstruction methods and 0.6 times that of traditional 3D reconstruction methods.

Surface adsorption of L-phenylalanine on silver colloidal nanoparticles investigated by surface-enhanced Raman spectroscopy

L-phenylalanine (L-Phe) is one of three aromatic amino acids frequently used in numerous vibrational applications, including surface-enhanced Raman spectroscopy (SERS). Despite the wide applications, the spectral analyses and vibrational assignments of the Raman spectra of L-Phe based on surface adsorption on metallic nanosurfaces are limited. In this work, we report pH-dependent SERS of L-Phe adsorbed on borohydride-reduced silver colloidal nanoparticles, where the spectral changes upon protonation of amine group are understood as the modification in the surface adsorption via the carboxylate and amino group. In-plane and out-of-plane ring stretching and aromatic ν(CH) modes appear sensitive to the surface orientation of the phenyl ring, and the peripheral vibrational modes, including the stretching and bending of carboxylate and amine groups, are crucial to understanding the detailed surface adsorption mechanisms of L-Phe in anionic and zwitterionic forms depending on the solution pH. The pH-dependent intensity changes of the major ring stretching modes show that the surface pKa of L-Phe decreases to ∼6 from the bulk value of 9.13.

The possibility of clinical bonding between metal/ceramic brackets to zirconia: in vitro study.

Objective: The present study aimed to assess the bond strength and durability of six bonding agents concerning their application to metal or ceramic brackets and zirconia. Materials and Methods: Six resin cement bonding agents (XT, XTS, RSBU, RGBU, SBPM, and GMP) were chosen for this investigation. Specimens were either stored in distilled water at 37°C for 24h or subjected to 5,000 thermocycles before conducting a Shear Bond Strength (SBS) test. Statistical analysis of the SBS data was performed using three-way ANOVA and Games-Howell tests (α = 0.05). The Adhesive Remnant Index was examined, and the debonding surface details on brackets and zirconia were observed. Results: For metal brackets, all groups demonstrated clinically acceptable bond strength, irrespective of storage conditions, except for the XT group. Regarding ceramic brackets, all groups displayed acceptable bond strength after 24h of water storage. However, following thermocycling, a significant decrease in SBS was noted across all groups (p < 0.05), with SBPM exhibiting a higher bond strength. Three-way ANOVA analysis indicated that SBS values were notably influenced by each factor, and an interaction among the three independent variables was observed (p = 0.000). Conclusion: The reliable bond strength between ceramic brackets and zirconia was significantly lower after thermocycling compared to that of metal brackets and zirconia. SBPM exhibited consistent and robust bond strength between ceramic/metal brackets and zirconia across various storage conditions. Furthermore, the HEMA-free adhesive demonstrated a potentially more consistent bonding performance compared to the HEMA-containing adhesive employed in this study.

Detailed kinetic modeling of catalytic oxidative coupling of methane

The oxidative coupling of methane (OCM) at high temperature over monolithic Pt-based catalysts operated at short contact times is investigated as an attractive method for methane upgrading to higher value products like ethylene and acetylene. An experimental measurement campaign aiming at elucidating the effect of operation parameters on the catalyst performance revealed that lower N2 dilution, lower CH4/O2 ratio, and higher space velocities promote high C2 yields. A maximum C2 yield of 10 % with 94 % CH4 conversion was obtained at a CH4/O2 ratio of 1.1, 50 % N2 dilution, and a space velocity of 4.5 × 105 h−1. Since both heterogenous and homogenous gas-phase chemistry together are required for determining C2 formation pathways, a detailed OCM surface reaction mechanism over Pt is presented consisting of 26 species and 86 reactions that are consistent from the view of thermodynamics and micro-kinetic reversibility. The combination of this OCM surface mechanism with a detailed gas-phase mechanism allows a numerical micro-kinetic description of the experimental measurements. The simulations presented in this study suggest that C2 formation takes place in the gas-phase at temperature above 1200 K with both oxidative and pyrolytic pathways for methane dehydrogenation to form CH3 radicals, whose coupling results in C2H6, C2H4 and C2H2 formation. Furthermore, the simultaneous presence of sufficient oxygen content and heat are vital for high C2 species yields.

PPSurf: Combining Patches and Point Convolutions for Detailed Surface Reconstruction

Abstract3D surface reconstruction from point clouds is a key step in areas such as content creation, archaeology, digital cultural heritage and engineering. Current approaches either try to optimize a non‐data‐driven surface representation to fit the points, or learn a data‐driven prior over the distribution of commonly occurring surfaces and how they correlate with potentially noisy point clouds. Data‐driven methods enable robust handling of noise and typically either focus on a global or a local prior, which trade‐off between robustness to noise on the global end and surface detail preservation on the local end. We propose PPSurf as a method that combines a global prior based on point convolutions and a local prior based on processing local point cloud patches. We show that this approach is robust to noise while recovering surface details more accurately than the current state‐of‐the‐art. Our source code, pre‐trained model and dataset are available at https://github.com/cg‐tuwien/ppsurf.

Magnetocapacitance at the Ni/BiInO3 Schottky Interface.

We report the observation of a magnetocapacitance effect at the interface between Ni and epitaxial nonpolar BiInO3 thin films at room temperature. A detailed surface study using X-ray photoelectron spectroscopy (XPS) reveals the formation of an intermetallic Ni-Bi alloy at the Ni/BiInO3 interface and a shift in the Bi 4f and In 3d core levels to higher binding energies with increasing Ni thickness. The latter infers band bending in BiInO3, corresponding to the formation of a p-type Schottky barrier. The current-voltage characteristics of the Ni/BiInO3/(Ba,Sr)RuO3/NdScO3(110) heterostructure show a significant dependence on the applied magnetic field and voltage cycling, which can be attributed to voltage-controlled band bending and spin-polarized charge accumulation in the vicinity of the Ni/BiInO3 interface. The magnetocapacitance effect can be realized at room temperature without involving multiferroic materials.

Use of Pressure in Rotational Molding to Reduce Cycle Times: Comparison of the Thermomechanical Behavior of Rotomolded Reed/Polyethylene Composites

Rotational molding advantages include the production of a hollow part with no welding lines, either of small or big sizes, with no internal stresses and good surface details. However, the process is limited by the long cycle times, and its related high energy consumption. Different strategies can be followed to reduce such energy use. This work assesses the use of pressure inside the molds during the densification and cooling stages, finding reductions in overall cycle time of approximately 20%, because of the reduction in the heating time required but also to the increased cooling rate. The influence of such an approach on the production of composites with reed fibers has also been assessed, finding a similar trend towards cycle time reductions. The rotomolded samples’ thermomechanical and rheological behavior were determined, finding that viscosity was not affected due to the incorporation of air during the moldings; besides, the homogeneity of the composites increased due to the mold pressurization. The parts obtained show good aesthetics and good thermomechanical behavior along the entire temperature range studied, and particularly for 10% composites; higher fiber ratios should be prepared via melt compounding. Therefore, the mold pressurization allows us to reduce both oven and cooling times, which can be translated into an increase in productivity and a decrease in energy consumption, which are undeniably related to the increase in the products’ sustainability and cost.

Flatbed scanners as versatile tools for studying surface details of compression fossils

Flatbed scanners as versatile tools for studying surface details of compression fossils

Unravelling the kinetics, isotherms, thermodynamics, and mass transfer behaviours of Zeolite Socony Mobil - 5 in removing hydrogen sulphide resulting from a dark fermentative biohydrogen production process.

Research into the speciation of sulfur and hydrogen molecules produced through the complex process of thermophilic dark fermentation has been conducted. Detailed surface studies of solid-gas systems using real biogas (biohydrogen) streams have unveiled the mechanisms and specific interactions between these gases and the physicochemical properties of a zeolite as an adsorbent. These findings highlight the potential of zeolites to effectively capture and interact with these molecules. In this study, the hydrogen sulphide removal analysis was conducted using 0.8 g of the adsorbent and at various reaction temperatures (25-125 °C), a flow rate of 100 mL min-1, and an initial concentration of approximately 5000 ppm hydrogen sulphide. The reaction temperature has been observed to be an essential parameter of Zeolite Socony Mobil - 5 adsorption capacity. The optimum adsorption capacity attains a maximum value of 0.00890 mg g-1 at an optimal temperature of 25 °C. The formation of sulphur species resulting from the hydrogen sulphide adsorption on the zeolite determines the kinetics, thermodynamics, and mass transfer behaviours of Zeolite Socony Mobil - 5 in hydrogen sulphide removal and Zeolite Socony Mobil - 5 is found to improve the quality of biohydrogen produced in thermophilic environments. Biohydrogen (raw gas) yield was enhanced from 2.48 mol H2 mol-1 hexose consumed before adsorption to 2.59 mol H2 mol-1 hexose consumed after adsorption at a temperature of 25 °C. The Avrami kinetic model was fitted for hydrogen sulphide removal on Zeolite Socony Mobil - 5. The process is explained well and fitted using the Temkin isotherm model and the investigation into thermodynamics reveals that the adsorption behaviour is exothermic and non-spontaneous. Furthermore, the gas molecule's freedom of movement becomes random. The adsorption phase is restricted by intra-particle diffusion followed by film diffusion during the transfer of hydrogen sulphide into the pores of Zeolite Socony Mobil - 5 prior to adsorption on its active sites. The utilisation of Zeolite Socony Mobil - 5 for hydrogen sulphide removal offers the benefit of reducing environmental contamination and exhibiting significant applications in industrial operations.

Development of a High-Precision, Portable and Automated Mobile Laser Scanner for the Recording and Digitation of Texture and Micro-marks in Archaeological and Heritage Stone

The use of laser tools to digitise cultural heritage items is becoming more widespread but is generally limited to manual systems that rely on the user’s movement or expensive automated equipment that is designed to scan large items but is not always able to accurately measure or reproduce specific details of small size. In this paper we present the novel high-precision system PALLAS, which allows the automatic digitisation of three-dimensional detailed surfaces. The equipment has been built using a set of motors and linear axes, control electronics and a line laser scanner that can be moved along the XY working plane. It is battery-powered for ease of use in the field and uses a standard laptop to communicate via Wi-Fi network. Custom software has been developed to automatically calculate paths, control the movement and store the profiles generated by the scanner. The software can also be used to reconstruct the surface from the set of scanner profiles, allowing the XYZ coordinates of any point on the surface to be measured and to obtain areal roughness parameters to characterise the finish and texture of the stone surface. Preliminary results obtained from masons’ marks, rock engravings and petroglyphs are presented.

Chipped lithic artefacts from Paradimi and Krovili (Thrace, Northern Greece). Remarks from the 2020 surface investigations

The paper presents flaked lithic materials from two tell-type Neolithic sites Paradimi and Krovili located in Eastern Thrace. They were obtained during systematic and detailed surface surveys. All the collected lithic materials were examined and described. Some conclusions about processing and sources of raw materials were presented along with comparisons to other Neolithic sites in northern Greece.

Self-Terminated Surface Reconstruction of Lanthanum Nickelates Promotes Alkaline Oxygen Evolution

Oxygen evolution reaction (OER) itself is expected to have a strong impact on the state of the surface of the electrocatalyst, yet the actual structure of the surface under operating conditions is rarely considered while formulating structure-activity correlations in electrocatalysis. In this study, changes in the surface structure of Ruddlesden-Popper-type lanthanum nickelate, La2NiO4+δ, and the perovskite LaNiO3 are probed and contrasted using a series of complementary surface sensitive techniques, including XPS, HRTEM and O K-edge XAS. We found noticeable surface changes to occur on La2NiO4+δ after exposure its exposure to the alkaline electrolyte that is accompanied by the emergence of a strong Nin+/n+1 redox feature and the coincides with a 45-fold enhancement of the OER activity (at η = 370 mV) in 0.1 M KOH, as compared to the pristine La2NiO4+δ phase. We observe that the in situ formation of an amorphous nickel (oxy)hydroxide layer on the surface increases the electrochemically-active surface area of La2NiO4+δ and imparts a high stability of the catalyst under OER conditions (the formation of the amorphous layer self-terminates at ca. 3 nm). In addition, the transition from octahedral Ni sites (O h ) to square-planar Ni sites (D 4h ) in the reconstructed surface was observed using O K-edge X-ray absorption spectroscopy. Further, we found no evidence for any surface transformations in the perovskite-based catalyst LaNiO3 that also did not demonstrate any improvement in its activity over cycling. This work highlights the importance of a detailed surface analysis of the catalysts under operation to build robust structure-activity correlations for the metal oxides under electrochemical reaction conditions. Figure 1

(Invited) Novel Surface Reactions in Low-Temperature Regime for High-Aspect-Ratio Dielectric Etching

The most critical issue to achieve High-Aspect-Ratio (HAR) dielectric etching is the transport of both radicals and ions to the bottom of a feature [1]. Current HAR dielectric etching uses fluorocarbon and hydrofluorocarbon gases combined with high applied bias power. However, the etch rate drastically decreases at high depth due to the decline of radicals being supplied to the etch front. Alternative methods have long been required to solve this problem. To address the radical transport issue, we propose adopting a novel precursor with low molecular weight to enhance Knudsen transport. In addition, cryogenic temperature regimes are also known to enhance etch rates [2][3] but have not yet been implemented for HAR dielectric etching. In this work we evaluated a novel precursor in cryogenic temperature regime for HAR dielectric etching. For the first time, we demonstrate a synergy effect between cryogenic temperature and this novel precursor by successfully developing an innovative HAR dielectric etch process. We confirmed that this process is capable of etching beyond a ten-micron depth for a 3D-NAND channel hole with a hundred nanometer critical dimension in diameter, thus an aspect ratio of over one hundred to one. The key to enabling high etch rate is strongly correlated with the adsorption of the precursor on the surface, which is enhanced at cryogenic temperature. Detailed surface adsorption reaction mechanisms will be described in the conference. This new process not only enables higher etch rate, higher selectivity and higher aspect ratio etching capability, but also significantly shortens the process time with 84% carbon footprint reduction of greenhouse gas emissions.[1] K. Ishikawa, et al., Jpn. J. Appl. Phys. Vol. 57, No. 6S2, 06JA01, (2018).[2] T. Ohiwa, et al., Jpn. J. Appl. Phys. Vol.31, p.405, (1992).[3] R Dussart, et al., J. Phys. D: 47, 123001, (2014).