Photoluminescence, Raman spectroscopy and X-ray photoelectron spectroscopy are used to study electronic and atomic structure of n-InP(100) surfaces treated with different sulfide solutions. It is shown that the sulfide treatment causes removal of the native oxide layer from the semiconductor surface and formation of the passivating layer consisting of In−S chemical bonds with the structure dependent on the solution composition and atomic arrangement at the initial surface of the semiconductor. This is accompanied by an increase in photoluminescence intensity and narrowing of the surface depletion layer. Atomic structure of the passivating layer determines the total dipole that modifies the depth distribution of the bands potentials and thus the surface electronic structure.
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