The subthreshold circuit is a practical design style for the ultralow-power applications, but its timing estimation is a challenge due to the increasing local variation effects. The delay variation of adjacent gates is not independent because of input slew variation caused by the precedent gate, so their correlation effects are difficult to model and estimate. This article proposes a semi-analytical statistical delay model considering local variation for the subthreshold region, that is, the combination of analytical and simulation-based method. First, it decorrelates the slew influence between adjacent stages by dividing delay and output slew model into fast/slow input cases and dividing delay variation model into process variation and input slew variation. Then, it can be applied into multi-PVT conditions with a one-time SPICE nominal simulation by analyzing the independence of variability and relative variability of step input gate delay variance with output load capacitance and process, voltage, and temperature (PVT). Finally, experiments are carried out for different benchmarks, processes, voltages, and temperatures (BPVTs). The average errors of variance on different BPVTs are 4.8%, 3.1%, 4.0%, and 4.7%. Compared with other analytical works, the accuracies’ improvements of three metrics (variance, variability, and max delay) are $8.3\times $ , $9.6\times $ , and $2.7\times $ by the mean error at all test benchmarks. Compared with industrial method LVF, it has a comparable error in max path delay and runtime, and less three orders of magnitudes than LVF in characterization time and stored data (from TB to GB) at all test benchmarks.
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