Harmonic generation based on frequency multipliers has proven to be the most successful and widely used solid-state technology for generating power at submillimeter wavelengths. Over the last several years, the development of new device technologies, implementation of innovative circuits, and application of advanced integrated-circuit processing techniques to frequency multiplier design have resulted in unprecedented levels of performance throughout the submillimeter-wave frequency band. This paper reviews the technological innovations, device options, circuit architectures, and fabrication technologies that have made harmonic generation such a successful approach to source development in the submillimeter spectrum.