Subwavelength Grating Research Articles

Silicon nitride TM-pass polarizer using inverse design.

Integrated silicon nitride polarizers play a critical role in the design of complex integrated devices such as filters, switches, and large Mach-Zehnder interferometer networks. These devices require precise control of both polarizations on a single circuit. In addition, polarizers are essential to accurately characterize these devices, primarily due to the low efficiency and polarization extinction ratio (PER) of the surface coupling gratings used in CMOS-compatible silicon nitride platforms for test-specific optical I/O. In this article, we present the design and experimental performance of six prototypes of TE-reflector/TM-pass polarizers specifically optimized for the C-band. These prototypes resemble subwavelength gratings with several additional intricate aspects. In particular, the longer prototypes feature two distinct regions, one representing non-intuitive tapers and the other showcasing a more distinct subwavelength grating. We achieve a high TM transmission efficiency of -0.28 dB along with a PER of 18.2 dB. These results are obtained with a device occupying an area as low as 11 µm × 2 µm, setting a new performance benchmark for compact polarizers compatible with standard silicon nitride platforms.

Broadband mode-division (de)multiplexer using nanorod-assisted multimode subwavelength gratings

—Subwavelength grating (SWG) allows flexible tuning of the dispersion of waveguides, enabling wider bandwidths for directional coupler-based devices. However, its light field constraint capability for high-order modes is so weak that the mode scattering loss from sidewalls is high, which impedes low-loss transmission and efficient energy coupling from adjacent waveguides. In this paper, we propose nanorod-assisted multimode subwavelength grating (NSWG) waveguides that support stable high-order modes transmission like strip waveguides, and maintain refractive index tunability similar to SWGs. We fully analyze the mode transmission and coupling characteristics of NSWG waveguides for modes TE1, TE2, and TE3. Results show that such waveguides can hold high transmission fidelity and low losses for high-order modes (<0.33 dB/cm, 0.58 dB/cm, and 1.0 dB/cm for TE1, TE2, and TE3). Arbitrary high-order modes among NSWGs can also be excited efficiently by evanescent field coupling. As proofs of concept, we also demonstrate a three-channel mode-division multiplexer with broad bandwidth (136 nm/135 nm/100 nm), low insertion loss (0.29 dB/0.85 dB/0.62 dB), and crosstalk (-21.4 dB/-20.4 dB/-18.0 dB) for TE0/TE1/TE2. And the device has a compact footprint of 5 × 61 μm. At 1.55 μm, all three modes satisfy IL < 0.19 dB and CT < -20.0 dB. The proposed waveguide structures may provide an alternative building block for broadband and compact multimode on-chip directional coupler-based devices.

Inverse design of an ultra-compact and large-bandwidth bent subwavelength grating wavelength demultiplexer.

Inverse design has attracted significant attention as a method to improve device performance and compactness. In this research, we employed a combination of forward design and the inverse algorithm using particle swarm optimization (PSO) to design a bent ultra-compact 1310/1550nm broadband wavelength demultiplexer assisted by a subwavelength grating (SWG). Through the phase matching at 1550nm and the phase mismatch at 1310nm, we rapidly designed the width parameters of SWG in the forward direction. Then the PSO algorithm was used to optimize the SWG parameters in a certain range to achieve the best performance. Additionally, we introduced a new bent dimension significantly reducing the device length while maintaining low insertion loss (IL) and high extinction ratios (ERs). It has been verified that the length of the device is only 7.8µm, and it provides a high ER of 24dB at 1310nm and 27dB at 1550nm. The transmitted spectrum shows that the IL values at both wavelengths are below 0.1dB. Meanwhile, the 1dB bandwidth exceeds 150nm, effectively covering the entire O-band and C-band. This approach has been proven successful in enhancing performance and significantly reducing the device footprint.

Mode thermo-optic coefficient engineering of sub-wavelength gratings and its application for a mode-insensitive switch.

It is shown that the thermo-optic (TO) coefficients of various waveguide modes of a sub-wavelength grating (SWG)-assisted strip waveguide is closely dependent on the various waveguide parameters with different dependencies, including the SWG width, strip waveguide width, duty cycle, and pitch. This offers what we believe to be new degrees of freedom in the design of TO coefficients for integrated-optic waveguides, opening the door to engineering the TO coefficients of individual spatial modes or polarization states using sub-wavelength structures. Such a capability is expected to offer new design possibilities for a variety of integrated photonic, thermo-optic devices. To demonstrate the application of the concept, a mode-insensitive switch on silicon-on-insulator using a TO coefficient-engineered SWG as a mode-independent, thermo-optic phase shifter is designed and experimentally demonstrated. The experimental results show that the switching powers of the TE0-TE2 modes are only ∼29 mW, and the maximum extinction ratios for the cross (bar) states are 38.2 dB (31 dB), 37.9 dB (37 dB), and 31.9 dB (20.5 dB) for the TE0-TE2 modes, respectively, at the wavelength of 1550 nm.

Temperature-insensitive and low-loss single-mode silicon waveguide crossing covering all optical communication bands enabled by curved anisotropic metamaterial.

We propose two designs of low-loss and temperature-insensitive single-mode waveguide crossing on silicon-on-insulator (SOI) platform with 415-nm operation bandwidth covering all optical communication bands. Both designs are enabled by subwavelength grating (SWG) modeled as an anisotropic metamaterial. The initial design applies straight SWG as the lateral cladding of the waveguide crossing to minimize the refractive index contrast and reduce the insertion loss (IL), but needs a relatively long taper. An improved design is then proposed where the curved SWG is introduced to replace the straight SWG to decrease the taper length and improve the performance. The waveguide crossing with the improved design achieves a calculated maximum IL of 0.229 dB and maximum crosstalk of -35.6 dB over a 415-nm wavelength range from 1260 nm to 1675 nm. The proposed devices are fabricated and characterized. Measured results of the improved design show a maximum IL of 0.264 dB and maximum crosstalk of -30.9 dB over a 230-nm wavelength range including O-, C-, and L-bands, which accord well with the simulation. Low temperature sensitivity has also been demonstrated in both simulations and experiments.

High-performance and compact integrated photonic dichroic filters and triplexer realized by an efficient inverse design.

Integrated optical filters are key components in various photonic integrated circuits for applications of communication, spectroscopy, etc. The dichroic filters can be flexibly cascaded to construct filters with various channel numbers and bandwidths. Therefore, the development of high-performance and compact dichroic filters is crucial. In this work, we develop the dichroic filters with 1.49/1.55-µm channels by an inverse design. Benefiting from a search-space-dimension control strategy and advanced optimization algorithm, our efficient design method results in two high-performance dichroic filters without and with subwavelength gratings (SWGs). The comparison suggests that SWGs in filters can be useful for loss reduction and footprint compression by dispersion engineering. The developed dichroic filter with SWGs exhibits measured bandwidths of 26/29 nm, excess losses of < 0.5 dB, and crosstalks of <-10 dB with a compact footprint of 2.5 × 22.0 µm2. It has advantages in performance or compactness compared to the previously reported counterparts. A triplexer with a footprint of 10.5 × 117 µm2 is developed based on the dichroic filters, also showing decent overall performance and compactness.

Demonstration of a High‐Performance 3 dB Power Splitter in Silicon Nitride Loaded Lithium Niobate on Insulator

AbstractLithium niobate on insulator (LNOI) has emerged as a promising platform for photonic integrated circuits (PICs) due to the excellent electro‐optic (EO) properties of lithium niobate (LN). However, such a platform still lacks many critical passive components with superior performance for constructing PICs. The 3 dB power splitters are one of the important passive components in PICs for separating and combining optical energy to construct the other crucial photonic devices such as Mach–Zehnder modulators, optical switches, and optical phased arrays, et al. In this contribution, an ultra‐broadband and compact 3 dB power splitter is proposed and demonstrated using a tapered subwavelength grating (SWG)‐assisted Y‐branch on a silicon nitride (Si3N4) loaded LNOI platform. The SWG is used to alleviate fabrication challenges and reduce radiation loss while increasing the evanescent coupling. The simulation result shows an excellent operation bandwidth of 800 nm (from 1.2 to 2.0 µm) at the insertion loss (IL) of 0.12 dB. The proposed device with a compact footprint (9.6 × 3 µm2) is finally fabricated on a Si3N4 loaded LNOI platform, and the experimental result shows the IL of &lt;0.2 dB in the wavelength ranges from 1.5 to 1.6 µm, which makes it suitable for broadband PICs required for future communication systems.

All-dielectric metasurface refractive index sensor with high figure of merit based on quasi-bound states in the continuum

All-Dielectric metasurfaces are widely used in the field of sense due to their small size, freedom of design, and low radiation loss. However, the optical sensor still has the problem of wide full width at half maximum (FWHM), which leads to a low figure of merit (FOM). In order to solve this problem, an all-dielectric metasurface based on quasi-bound states in the continuum (q-BIC) was proposed for refractive index sensing. The sensor structure consisted of a prism/metasurface/analyte, where the metasurface was composed of periodically arranged subwavelength asymmetric silicon gratings. The asymmetry of the structure led to the coupling of the tangential and radiative field components in the superficial layer at the resonance position, which formed a q-BIC resonance peak with a narrow FWHM in the reflection spectrum. We explained the causes of the q-BIC resonance peak generation by finite element analysis, and analyzed the factors affecting the FWHM, and also simulated the machining errors. The results showed that by reducing the asymmetry of the sensor, it could have a high FOM, with a FOM of 1.35 × 107 RIU−1. In addition, simulated machining errors within ±5 nm showed that small machining errors did not lead to the disappearance of q-BIC, which proved that the sensor had good robustness. These findings had provided ideas for the accurate detection of trace substances.

Silicon Subwavelength Grating Slot Waveguide based Optical Sensor for Label Free Detection of Fluoride Ion in Water

Recently, Subwavelength Grating Waveguides (SWG WG) attract a lot of attention for sensing applications because it offers better sensitivity than conventional WGs. The sensitivity of SWG WG is greatly improved due to the interaction between the analyte and guiding mode in the SWG segments. In this study, a highly sensitive sensor based on a silicon SWG slot waveguide (SWGSW) is proposed for detecting low-concentration fluoride contaminations in water. The gap called as “slot” between the silicon slab along with cladding and the spaces between the segmented silicon rail waveguide is filled with fluoride ion-contaminated water samples as analyte for strong light–matter interaction between guiding modes of the SWG structure, resulting in greater sensitivity of the proposed sensor. The sensitivity of the proposed structure is estimated by numerical simulations as S = 615.38 nm/RIU which is comparable to the existing reported optical sensor structures based on optical waveguide and optical fibre with a smaller footprint. Additionally, the effect of variation of geometrical parameters on the transmission resonances of the proposed structure is also analyzed for the optimization of a SWG WG structure. The obtained results will be helpful to realize and design highly sensitive sensors based on the SOI platform.

Ultra-Compact Ultra-Broadband Two-Mode Transverse-Electric Based SWG Multiplexer Demonstrated at 64 Gbps

We designed and experimentally demonstrated an ultra-compact and ultra-broadband two-mode de-multiplexer based on a subwavelength grating (SWG) asymmetrical coupler (ADC) on a silicon-on-insulator (SOI) platform. The device consists of a cascaded strip waveguide tapered to a multimode segment and a SWG-based single-mode waveguide. Tapering the strip waveguide in multi-segments guarantees a high fabrication tolerance with a wider wavelength range of operation. The parameters of the periodic structure are chosen to meet the Bragg condition and phase-match the TE1 mode of the strip waveguide. These features produce a faster mode evolution with a shorter coupling length of only 8.5 µm and an entire mode division multiplexing (MDM) link (Mux and Demux) of only 55 µm. The MDM link operates over a wide wavelength range, covering the entire S-, C-, and L-bands. The insertion loss (IL) and crosstalk (CT) achieved at 1550 nm are better than 1 dB and -18 dB, respectively. The device also has low fabrication sensitivity to deviations in the waveguide's parameters. Additionally, the transmission performance of the link is demonstrated at 1550 nm wavelength using non-return-to-zero (NRZ) on-off keying (OOK) modulation, where clear eye diagrams are obtained at 64 Gbps.

Nested micro-ring refractive index sensor based on a subwavelength grating waveguide and theVernier effect.

In this paper, a nested micro-ring refractive index sensor based on a subwavelength grating waveguide and the Vernier effect is proposed. In this scheme, the nested micro-ring structure is combined with a subwavelength grating structure to enhance the contact area between the optical field and the analyte, and the wavelength offset is doubled through the Vernier effect. The proposed sensor can effectively increase sensing sensitivity, taking into account the improvement of the free spectral range. This structure enables the device to reach a sensitivity of 8030nm/RIU near 1550nm wavelength in a deionized water environment, with a detection limit of 5.659×10-5RIU and free spectral range of 41.956nm. The device suggested in this study has a greater reduced footprint than the conventional micro-ring resonant sensor, measuring just 35µm×25µm. Due to its high integration, high sensitivity, and large free spectral range compared to conventional micro-ring resonant sensors, such structures are of great value in biosensing and environmental monitoring.

Micro-fabricated Si subwavelength grating for frequency-domain THz beam steering covering the 0.3-0.5 THz frequency band.

We designed and fabricated beam steering subwavelength grating (BS-SWG) with high efficiency, wide angles, and broadband beam steering in the terahertz (THz) range. Beam steering technology in the THz range by a fixed structure and frequency sweep has to date lacked a device combining high efficiency and a wide beam steering angle. A subwavelength structure using float zone Si, a low-loss dielectric, could combine both of these aspects, but no experimental demonstration in the THz range has been performed to our knowledge. The BS-SWG was designed with an efficiency of 0.708 at 0.4 THz and beam steering angles of -72.1°--34.8° by sweeping the incident frequency from 0.3 THz to 0.5 THz including the Beyond 5 G/6 G communication bands. An efficiency of 0.354 at 0.400 THz and beam steering angles of -74°--34° were experimentally achieved, demonstrating the potential of high-efficiency, wide-angle beam steering for THz communications, imaging, and radar applications.

Enhancement of quantum cascade laser intersubband transitions via coupling to resonant discrete photonic modes of subwavelength gratings.

We present an optical spectroscopic study of InGaAs/AlInAs active region of quantum cascade lasers grown by low pressure metal organic vapor phase epitaxy combined with subwavelength gratings fabricated by reactive ion etching. Fourier-transformed photoluminescence measurements were used to compare the emission properties of structures before and after processing the gratings. Our results demonstrate a significant increase of the photoluminescence intensity related to intersubband transitions in the mid-infrared, which is attributed to coupling with the grating modes via so called photonic Fano resonances. Our findings demonstrate a promising method for enhancing the emission in optoelectronic devices operating in a broad range of application-relevant infrared.

Subwavelength grating-based silicon photonic TE mode division multiplexer for C + L band operation

This paper reports a subwavelength grating (SWG) based multiplexer (MUX) on a silicon photonics platform capable of multiplexing three transverse electric modes. The designed MUX is simulated using a commercial 3D finite-difference time-domain solver and shows broadband operation over the whole C and L optical telecom bands from 1530 nm to 1625 nm wavelength range. The effective indices of the Bloch modes in the SWG waveguides are extracted from the band structure plot. The designed MUX consists of two co-directional coupling regions for fundamental to higher-order mode coupling, with each coupling stage consisting of single-mode and multimode SWG waveguides. The transmission characteristics, viz. transmittance, insertion loss, and return loss, are presented and discussed. The coupling lengths without the tapering regions for TE0–TE1 and TE0–TE2 mode couplings are 14μm and 1.48μm, respectively. The transmittance is >78% with the highest insertion loss and return loss of 1.1 dB and –15 dB, respectively. At 1550 nm, the transmission is >88%, insertion loss is <0.6 dB, and return loss is <−15 dB. A uniform under-etch and over-etch of 5 nm are taken for the fabrication tolerance study, which shows a maximum variation of 0.58 dB for the insertion loss with return loss <−14.6 dB at 1550 nm. Over the whole simulated range, the insertion loss is <1.4 dB, and return loss is <−14.6 dB with ±10 nm change in device dimension. A temperature tolerance study with 50 °C and 100 °C rise in temperature has been done, and the device retains its broadband operation over the simulated range. The maximum increase in insertion loss is 0.1 dB for the TE0–TE2 coupling, while the overall return loss of the device decreases to <−20 dB for the TE0–TE1 coupling.

Silicon-based subwavelength grating polarization beam splitter with asymmetric directional coupler

In this paper, a novel polarization beam splitter (PBS) is proposed. The silicon-based subwavelength grating (SWG) is successfully applied to the asymmetric directional coupled PBS, and the research shows that its performance has improved in many aspects. By carefully optimizing structural parameters, the transverse electric (TE) polarization is in a reflected state in the SWG, which effectively weakens the coupling strength, while the transverse magnetic (TM) polarization is almost unaffected. Simulation results show that the bandwidths of TE polarization and TM polarization are 200 nm (1450–1650 nm) and 141 nm (1450–1650 nm) in the extinction ratio of >20 dB, respectively, while the insertion loss is <0.5 dB and <1.3 dB, respectively. The PBS is very robust to the process production. With the manufacturing error exceeding 20 nm, the performance is only reduced by 0.6 dB, effectively solving the problem of complex preparation process.

Ultrabroadband and compact 2 × 2 3-dB coupler based on trapezoidal subwavelength gratings.

We propose and experimentally demonstrate an ultrabroadband and compact 2 × 2 3-dB coupler based on the trapezoidal subwavelength gratings (SWGs). The adiabatic coupling is achieved between a trapezoidal SWG waveguide and a reversely tapered strip waveguide, which contributes to the ultrabroad operation bandwidth and the compact footprint of the coupler. Numerical results prove that our device has a power splitting imbalance of < ± 0.5 dB and an excess loss of < 0.2 dB in the ultrabroad bandwidth of 300 nm from 1400 nm to 1700nm, with a coupling length of 4.4 µm and a total length of 24.4 µm. The fabricated device is characterized in a 270-nm bandwidth from 1400 nm to 1670 nm, showing a measured power splitting imbalance of < ± 0.7 dB and an excess loss of < 0.5 dB.

Peculiarities of the Resonant Response of a Subwavelength Double Grating with Optical PT-Symmetry

In this paper, we study the features of the resonant response of a system consisting of two subwavelength one-dimensional periodic structures, considering the dispersion of the refractive index in the presence of optical PT-symmetry for TM polarization. For the considered structure in the green wavelength range, two possible resonance lines were identified at 514.86 nm and 518.5 nm. Ultra-narrow resonances (FWHM of 0.00015 nm) have been obtained for transmitted and reflected waves, and a significant enhancement of the resonant response has been achieved (up to 105 times). The dependence of the system’s optical response on the relative position of its two sub-wavelength gratings and the magnitude of the amplification coefficient of the active part was investigated. This can be used to tune the spectral characteristics of filters, modulate the optical radiation, and create optomechanical sensors such as strain gauges.

Polarization-sensitive UV detector based on a double-layer subwavelength grating of Al and ZnO

Polarization-sensitive detectors are of great importance in the fields of remote sensing and imaging, environmental monitoring, and medical diagnosis. The surface plasmon effect can the enable polarization sensitivity of photodetectors through metallic gratings. However, limited by the precision of the nano-fabrication process, it is difficult to fabricate an ultraviolet (UV) polarization-sensitive detector integrated with sub-wavelength metal gratings and the polarization extinction ratio is relatively low. In this paper, an Al–ZnO composite double-layer grating structure was designed. The ZnO active layer and the Al layer were both fabricated into same-sized grating structures. Through this design, the slit width could be enlarged to some degree, while the response to 90° polarized light remained low. It is beneficial to realize a high polarization ratio and to spare the need for rigid fabrication accuracy. In addition, the influence of the structural parameters of the grating on the performance of the detector was studied by simulation. It was found that the resonance wavelength can be adjusted by changing the slit width and grating height, respectively. This provides a useful means for polarization-sensitive detection in different wavelength ranges. The polarization extinction ratio of the detector with a double-layer composite grating can reach 52 in the UV band (365 nm). This provides a good alternative to replace the traditional framework relying on the combination of polarizers and detectors. Moreover, it is a promising structure for high-density integrated photodetectors and imaging chips in the future.

Miniaturized Bloch Surface Wave Platform on a Multicore Fiber

We propose a novel implementation of a miniaturized photonic platform fabricated on a multicore fiber tip, capable of tunable optical functions via coupling to Bloch surface waves (BSWs). A one-dimensional photonic crystal is deposited on the cleaved surface of a fiber tip, allowing the propagation of BSWs in the near-infrared. On top of each core, subwavelength gratings are fabricated to operate as optical couplers between BSWs and the corresponding fiber modes. The ability to control the optical interconnection among different pairs of cores of the multicore fiber via polarization-selective BSW coupling is demonstrated. The resulting compact, tunable, and portable platforms can be fruitfully employed in the vast application domain covered by optical fiber technology including sensing, optical trapping, manipulation, and information processing.

Anisotropic leaky-like perturbation with subwavelength gratings enables zero crosstalk

Electromagnetic coupling via an evanescent field or radiative wave is a primary characteristic of light, allowing optical signal/power transfer in a photonic circuit but limiting integration density. A leaky mode, which combines both evanescent field and radiative wave, causes stronger coupling and is thus considered not ideal for dense integration. Here we show that a leaky oscillation with anisotropic perturbation rather can achieve completely zero crosstalk realized by subwavelength grating (SWG) metamaterials. The oscillating fields in the SWGs enable coupling coefficients in each direction to counteract each other, resulting in completely zero crosstalk. We experimentally demonstrate such an extraordinarily low coupling between closely spaced identical leaky SWG waveguides, suppressing the crosstalk by ≈40 dB compared to conventional strip waveguides, corresponding to ≈100 times longer coupling length. This leaky-SWG suppresses the crosstalk of transverse–magnetic (TM) mode, which is challenging due to its low confinement, and marks a novel approach in electromagnetic coupling applicable to other spectral regimes and generic devices.