Evaluation method of vibration properties such as resonant frequency, amplitude, and vibration mode was researched using scanning electron microscope (SEM) in this study for nano- and micro-scale mechanical resonator. Measurements of resonant frequency and amplitude of mechanical resonators made of silicon and diamond-like carbon were demonstrated by investigating the relationship between secondary electron emission and amplitude. Measurement errors of resonant frequency and amplitude were 0.0013 % and 8.3 %, respectively. Also, vibration mode observation was achieved in this study. Phage-resolved SEM images of vibration mode were obtained using stroboscopic SEM method. These results indicated that the dynamic characteristics method using SEM was a powerful tool for characterization of nano- and micro-scale mechanical resonator.