A numerical approach based on the hybrid finite element method (HFEM) is described for the analysis of leaky surface acoustic waves (LSAWs) in periodic waveguides with electric-flux leakage into vacuum. Employing superelements and conventional rectangular elements, we evaluate a functional corresponding to the entire region: the substrate region, the inhomogeneous region with electrodes, and the vacuum region. Hence, in this method, all the effects of piezoelectric perturbation, mechanical perturbation, energy storage due to nonradiated bulk waves, and radiation loss of LSAWs are automatically taken into account. Computed results for aluminum strip gratings on a 36° Y–X LiTaO3 substrate are presented. The convergence of solutions are investigated in detail and the dispersion curves and radiation losses of LSAWs are evaluated. Numerical results show that the electric-flux leakage into the vacuum affects the complex wavenumbers, especially in the higher frequency region over the upper edge of the stopband.