A series of CdO thin films have been prepared by spray pyrolytic technique at different substrate temperatures. X-ray diffraction scans confirmed the polycrystalline structure of the films. The films exhibit preferential orientation along the (111) plane. To describe the preferential orientation, the texture coefficient has been calculated and the standard deviation factor has also been evaluated to explain the growth mechanism. Various structural parameters such as lattice parameter, crystallite size, strain, dislocation density and stacking fault probability have been calculated. From the optical measurements, the void concentration has been determined and the results are discussed.