X-ray based residual stress measurements were made on type 316 stainless steel and Fe3Al coatings that were high-velocity oxy-fuel (HVOF) sprayed onto low-carbon and stainless steel substrates. Nominal coating thicknesses varied from 250 to 1500 µm. The effect of HVOF spray particle velocity on residual stress and deposition efficiency was assessed by preparing coatings at three different torch chamber pressures. The effect of substrate thickness on residual stress was determined by spraying coatings onto thick (6.4 mm) and thin (1.4 mm) substrates. Residual stresses were compressive for both coating materials and increased in magnitude with spray velocity. For coatings applied to thick substrates, near-surface residual stresses were essentially constant with increasing coating thickness. Differences in thermal expansion coefficient between low-carbon and stainless steels led to a 180 MPa difference in residual stress for Fe3Al coatings. Deposition efficiency for both materials is maximized at an intermediate (∼600 m/s) velocity. Considerations for X-ray measurement of residual stresses in HVOF coatings are also presented.