Membranes with tunable, sub-nanometer pores are needed for molecular separations in applications including water treatment, critical mineral extraction, and recycling. Ceramic membranes are a promising alternative to the polymeric membranes typically used in such applications due to their robust operation under harsh chemical conditions. However, current fabrication technologies fail to construct ceramic membranes suitable for selective molecular separations. In this presentation, we describe a ceramic thin film composite (TFC) membrane fabrication method that achieves sub-nm pore size control using atomic layer deposition (ALD) by incorporating a molecular-scale porogen. By co-dosing alkyl alcohols along with the H2O coreactant during Al2O3 ALD, we incorporate alkoxide species in the film which create a continuous network of pores upon calcination. Varying the alkyl alcohol (methanol, ethanol, isopropanol) tunes the pore size. We use Fourier transform infrared absorption spectroscopy, X-ray photoelectron spectroscopy, and scanning electron microscopy to elucidate the surface chemistry and growth during the alcohol-modulated ALD as well as the subsequent pore formation. We evaluate the transport and separations properties of the ALD TFC membranes using a two-chamber diffusion cell with aqueous salt solutions. We measured a remarkable enhancement in the transport of Cl- compared to SO4 2- (8.6 times faster) matching the selectivity of state-of-the-art polymer membranes. We attribute this selectivity to the dehydration of the large divalent ions within the subnanometer pores. In addition, permeation studies using neutral adsorbates revealed average pore sizes of ~7Å, 13Å, and 19Å for ALD TFC membranes prepared using methanol, ethanol, and isopropanol, respectively. This work provides the scientific basis for the design of ceramic membranes with subnanometer pores for molecular sieving using ALD.
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