All inorganic lead-free halide perovskites have attracted much attention due to their non-toxic and suitable bandgap. In this paper, we first prepared all inorganic lead-free perovskite CsBi3I10 thin-films by single-source thermal evaporation deposition. The results show that CsBi3I10 thin films prepared by single-source thermal evaporation have layered structure, high purity hexagonal phase and high crystallinity, which are consistent with the theoretical calculation results. The surface of the thin film was compact and uniform, and had high homology with the crystal structure of the evaporation source material. After annealing, the crystallinity of the film was further improved. The photovoltaic conversion efficiency of perovskite solar cells based on the CsBi3I10 thin film is as high as 0.84%. These results indicate that the proposed single-source thermal evaporation method has the potential to prepare high efficiency inorganic lead-free perovskite solar cells.