In this work, well-crystalline Ag2Se thermoelectric thin film with high power factor at room temperature was successfully fabricated at solid substrate by a facile in-situ growth method via co-evaporation deposition. Micro-structure characterizations show that the thin films prepared under proper growth temperature have single α-Ag2Se phase and stable chemical valence states, leading to a high electrical conductivity. Additionally, the carrier concentration is optimized after adjusting growth temperature and further contributes to a high Seebeck coefficient. As a result, a maximum power factor of 15.34 μWcm-1K−2 is achieved, demonstrating that our in-situ growth method is an effective way to fabricate high performance Ag2Se thermoelectric thin films.
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