ABSTRACTA main limitation of biomedical devices is the inability to start, stop, and control cell growth making it crucial to develop biomaterial surfaces that induce a desired cellular response. Micropatterns of ridges and pillars were created in a siloxane elastomer (Dow Corning) by casting against epoxy replicates of a micromachined silicon wafer. Silicone oils were incorporated to determine the change in modulus and surface energy caused by these additives. SEM and white light interference profilometry verified that the micropatterning process produced high fidelity, low defect micropatterns. Mechanical analysis indicated that varying the viscosity, weight percent and functionality of the added silicone oil could change the elastic modulus by over an order of magnitude (0.1-2.3 MPa). As a self-wetting resin, silicone oils migrate to the surface, hence changing the surface properties from the bulk. Both topographical and chemical features define the surface energy, which in combination with elastic modulus, dictate biological activity. The results imply that the morphology, mechanical properties and surface energy of the siloxane elastomer can be modified to elicit a specific cell response as a function of engineered topographical and chemical functionalization.