Silicon Nitride Microdisk Research Articles

Investigating mode characteristics of an ultra-high Q silicon nitride micro-disk resonator and high resolution microwave photonic filtering

Investigating mode characteristics of an ultra-high Q silicon nitride micro-disk resonator and high resolution microwave photonic filtering

Tunable microwave frequency comb generation using a Si3N4-MDR based actively mode-locked OEO.

Microwave frequency combs (MFCs) have important applications in communication and sensing owing to their characteristics of large number of comb lines, wide frequency range, and high precision of comb spacing. In many applications, MFCs are required to emit signals with tunable center frequency and variable comb spacing to accommodate different operating frequency bands and accuracies. Here, we demonstrate a tunable MFC by injecting a low-frequency electrical signal into a tunable optoelectronic oscillator (OEO). Tuning of MFC's center frequency and comb spacing are realized, allowing a frequency tuning range from 1 to 22 GHz and 50 comb lines within a 5 MHz bandwidth obtained in the MFC generator. In addition, the introduction of the silicon nitride micro-disk resonator (Si3N4-MDR) in the system paves the way for the integration of MFC generator.

Parity-time symmetric frequency-tunable optoelectronic oscillator based on a Si3N4 microdisk resonator.

The optoelectronic oscillator (OEO) generates low-phase noise and high-frequency microwave signals thanks to a high Q-factor cavity with long and low-loss fiber delay. Traditionally, for the desired mode selection from the ultradense cavity modes, a narrowband electrical filter is needed, whose frequency tuning is very limited. On the other hand, for a tunable OEO offered by a microwave photonic filter (MPF), a paradox existed between the large number of cavity modes and the wide MPF bandwidth. Here, we achieve a tunable OEO using the mode-selection mechanism of parity-time symmetry, which overcomes the paradox. A high Q-factor silicon nitride microdisk resonator (Si3N4 MDR) is introduced to achieve frequency filtering and tuning. Moreover, the experimental results reveal that the tunable OEO generates a signal range from 3 GHz to 20 GHz with a phase noise about -120dBc/Hz at a 10 kHz offset frequency.

Cooperative interactions between nano-antennas in a high-Q cavity for unidirectional light sources

We analyse the resonant mode structure and local density of states in high-Q hybrid plasmonic-photonic resonators composed of dielectric microdisks hybridized with pairs of plasmon antennas that are systematically swept in position through the cavity mode. On the one hand, this system is a classical realization of the cooperative resonant dipole–dipole interaction through a cavity mode, as is evident through predicted and measured resonance linewidths and shifts. At the same time, our work introduces the notion of ‘phased array’ antenna physics into plasmonic-photonic resonators. We predict that one may construct large local density of states (LDOS) enhancements exceeding those given by a single antenna, which are ‘chiral’ in the sense of correlating with the unidirectional injection of fluorescence into the cavity. We report an experiment probing the resonances of silicon nitride microdisks decorated with aluminium antenna dimers. Measurements directly confirm the predicted cooperative effects of the coupled dipole antennas as a function of the antenna spacing on the hybrid mode quality factors and resonance conditions.

Implementation of a Highly-Sensitive and Wide-Range Frequency Measurement Using a Si3N4 MDR-Based Optoelectronic Oscillator

Microwave photonic technologies have been introduced for achieving broadband radio-frequency signal measurement. However, few of the proposed schemes mention the low-power radio-frequency signal detection, which stringently limits their practical applications in certain areas. In this paper, we designed and demonstrated a wideband low-power radio-frequency signal measurement system with optoelectronic oscillator. Here, the unknown radio-frequency signal matched the potential oscillation mode is allowable to be detected, amplified and estimated. The key component in the tunable optoelectronic oscillator is a silicon nitride micro-disk resonator with a very high Q-factor, which is utilized to achieve frequency selection as a microwave filter. A frequency measurement system range from 1 ∼ 20 GHz with radio frequency power as low as −105 dBm, measurement errors of ±375 MHz and the maximum gain of 61.7 dB were realized experimentally

Fabrication and characterization of on-chip silicon nitride microdisk integrated with colloidal quantum dots.

We designed and fabricated free-standing, waveguide-coupled silicon nitride microdisks hybridly integrated with embedded colloidal quantum dots. An efficient coupling of quantum dot emission to resonant disk modes and eventually to the access waveguides is demonstrated. The amount of light coupled out to the access waveguide can be tuned by controlling its dimensions and offset with the disk edge. These devices open up new opportunities for both on-chip silicon nitride integrated photonics and novel optoelectronic devices with quantum dots.

Refractometric sensing of Li salt with visible-light Si3N4 microdisk resonators

We demonstrate aqueous refractive index sensing with 15–30 μm diameter silicon nitride microdisk resonators to detect small concentrations of Li salt. A dimpled-tapered fiber is used to couple 780 nm visible light to the microdisks, in order to perform spectroscopy on their optical resonances. The dimpled fiber probe allows testing of multiple devices on a chip in a single experiment. This sensing system is versatile and easy to use, while remaining competitive with other refractometric sensors. For example, from a 20 μm diameter device we measure a sensitivity of 230 ± 20 nm/refractive index units (RIU) with a loaded quality factor of 1.5 × 104, and a limit of detection down to (1.3 ± 0.1) × 10−6 RIU.

Quantum frequency conversion in nonlinear microcavities

We study nonlinear microresonantors as potential implements for quantum frequency conversion of narrowband optical signals. Using silicon-nitride microdisks as a concrete example, we show that high-conversion performance can be achieved with relatively low pump power. Being chip integratable, such devices hold promise for use in large-scale quantum applications, including atomic-memory-based quantum repeaters.

Electromagnetically Induced Transparency and Wideband Wavelength Conversion in Silicon Nitride Microdisk Optomechanical Resonators

We demonstrate optomechanically mediated electromagnetically induced transparency and wavelength conversion in silicon nitride (Si3N4) microdisk resonators. Fabricated devices support whispering gallery optical modes with a quality factor (Q) of 10(6), and radial breathing mechanical modes with a Q=10(4) and a resonance frequency of 625 MHz, so that the system is in the resolved sideband regime. Placing a strong optical control field on the red (blue) detuned sideband of the optical mode produces coherent interference with a resonant probe beam, inducing a transparency (absorption) window for the probe. This is observed for multiple optical modes of the device, all of which couple to the same mechanical mode, and which can be widely separated in wavelength due to the large band gap of Si3N4. These properties are exploited to demonstrate frequency up-conversion and down-conversion of optical signals between the 1300 and 980 nm bands with a frequency span of 69.4 THz.

All-optical-switching demonstration using two-photon absorption and the Zeno effect

Low-contrast all-optical Zeno switching has been demonstrated in a silicon nitride microdisk resonator coupled to a hot atomic vapor. The device is based on the suppression of the field build-up within a microcavity due to non-degenerate two-photon absorption. This experiment used one beam in a resonator and one in free-space due to limitations related to device physics. These results suggest that a similar scheme with both beams resonant in the cavity would correspond to input power levels near 20 nW.

From fabrication to mode mapping in silicon nitride microdisks with embedded colloidal quantum dots

We report on the fabrication of free-standing and optically active microdisks with cadmium-based colloidal quantum dots embedded directly into silicon nitride. We show that the process optimization results in low-loss silicon nitride microdisks. The Si3N4 matrix provides the stability necessary to preserve the optical properties of the quantum dots and observe efficient coupling of the photoluminescence to the resonating microdisk modes. Using a spectrally and spatially resolved microphotoluminescence measurement, we map the emission pattern from the microdisk. This technique allows us to identify the resonant modes. The results show good agreement with numerical mode simulations.

Optical manipulation of microparticles using whispering-gallery modes in a silicon nitride microdisk resonator

We demonstrate optical manipulation of 1 μm sized polystyrene microparticles on silicon nitride microdisk resonator devices using whispering-gallery modes in an integrated optofluidic chip. We demonstrate multiple trapping tracks and extended trapping ranges within single wavelengths through exciting high-order modes. We observe various sets of trapping tracks and ranges through exciting various resonance modes. We switch particle traveling tracks by tuning the laser wavelength to various wavelengths. We also observe microparticles assembling along the trapping tracks.

A silicon nitride microdisk resonator with a 40-nm-thin horizontal air slot

We design and fabricate pedestal-type, 15 microm diameter silicon nitride microdisk resonators on Si chip with horizontal air-slot using selective wet etching between Si, SiO2, and SiNx. As the slot structure is determined by deposition process, air slots that are as thin as 40 nm and as deep as 5 microm with ultra-smooth slot surfaces can easily be fabricated with photolithography only. Fundamental TM-like slot mode in which the E-field is greatly enhanced within slot was observed with an intrinsic Q factor of approximately 34,000 (lambdares=1523.7 nm) and energy overlap in slot region of 21.6%.

On-chip, planar integration of Er doped silicon-rich silicon nitride microdisk with SU-8 waveguide with sub-micron gap control

On-chip, planar integration of Er-doped Silicon-rich silicon nitride microdisks with SU-8 waveguide and polymer cladding is achieved. The lack of high temperature or etching processes allows back-end integration without any optical damage to the microcavity resonator. The maximum measured Q-factor at 1475.5 nm was 13,000, corresponding to calculated intrinsic resonator Q-factor of 25,000 that is limited by process-related roughness.

High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range

High quality factor (Q approximately 3.4 x 10(6)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si(3)N(4) layer at the air-substrate interface to improve the coupling.

Silicon nanophotonic devices for integrated sensing

The potentials of a nanophotonic platform, including compactness, low power consumption, integrability with other functionalities, and high sensitivity make them a suitable candidate for sensing applications. Strong light-matter interaction in such a platform enables a variety of sensing mechanisms, including refractive index change, fluorescence emission, and Raman scattering. Recent advances in nanophotonic devices include the demonstration of silicon and silicon-nitride microdisk resonators with high intrinsic Q values (0.5-2×106) for strong field enhancement and the realization of compact photonic crystal spectrometers (high spectral resolution at 100-µm length scales) for on-chip spectral analysis. These two basic building blocks, when combined with integrated fluidic channels for sample delivery, provide an efficient platform to implement different sensing mechanisms and architectures.