Silicon photonic devices consisting of nanowire waveguides are a promising technology for on-chip integration in future optical telecommunication and interconnection systems based on silicon-large scale integration fabrication. However, the accommodation of variable optical components on a chip remains challenging due to the small size of microchips. In this study, we investigated the characteristics of a microelectromechanical silicon nanowire waveguide switch with a gap-variable coupler. Due to its capacitive operation, the proposed waveguide switch consumed negligible power relative to switches that use a thermo-optical effect and carrier injection. The proposed switch was characterized using analyses based on coupled-mode theory for rectangular waveguides, as well as a simulation using the finite difference time domain method. A 2×2 single switch with an improved configuration and a 2×6 multiple switch composed of the 2×2 switches was designed and fabricated by a combination of electron beam lithography, fast-atom beam etching and hydrofluoric acid vapor sacrificial etching. The properties of the switches were measured and evaluated at a wavelength of 1.55 µm. A new miniature silicon optical switch requires far less electrical power than schemes employing thermo-optic effects or carrier injection. The device, developed by Yuta Akihama and Kazuhiro Hane from Tohoku University in Japan, relies on optical coupling between two arms in a 2×2 silicon waveguide coupler. By allowing one of the arms to move and connecting it to an electrostatic comb-drive actuator, an electrical voltage can be used to vary the gap between the waveguide arms and thus control the amount of coupling. The result is an efficient switch that operates at the wavelength of 1.55 µm and has a footprint of 100 µm×100 µm. As well as demonstrating a single 2×2 switch, the researchers also cascaded several devices together to construct a 2×6 switch.
Read full abstract