Silicon Carbide Industry Research Articles

Digital Intelligence Enables Silicon Carbide Supply Chain Upgrade

From the perspective of supply chain management, the silicon carbide supply chain currently exists in the technical force is low, the development situation is poor, as well as the traditional silicon-based devices still occupy the relevant areas of the market, silicon carbide in addition to the urgent need for breakthroughs in the field of technology, due to the adjustment and transformation of the industrial structure as well as the upstream production capacity expansion makes the silicon carbide industry is also faced with the lack of supply chain management capabilities and the backwardness of the management structure. This is also the core element that this paper will focus on. The research theme of this paper is how to complete the transformation and upgrading of the silicon carbide supply chain through the role of digital intelligence, to effectively increase the production capacity of silicon carbide and change the current production dilemma. To this end, this paper focuses on the feasibility of solving the existing problems of the silicon carbide supply chain by upgrading the supply chain empowered by Digital Intelligence. The results of this paper are based on the successful reform experience of the steel industry, through management restructuring, supply chain expansion, industry chain extension, improving industrial technology, manufacturing to service transformation, and the combination of digital intelligence technology for industrial restructuring, to increase the production capacity of the silicon carbide industry.

Research on the Key Problems in the Industrialization of SiC Substrate Materials

The development of semiconductor materials and devices will lead to a new industrial technology revolution, in which the Silicon Carbide (SiC) substrate material has very excellent performance and it is especially suitable for manufacturing wave length lasers, white light emitting tubes, high-frequency, high-temperature and high-power devices, etc. This paper focuses on solving the key problems for producing large size and low defects of SiC crystals by the PVT method, such as the preparation and purification of the high purity raw material, the simulation of the temperature field, the control of the crystal defects and the growth of the large size SiC crystals.It is critical for the development of SiC industry.

Отечественная экстремальная ЭКБ: карбидокремниевая индустрия СПбГЭТУ "ЛЭТИ"

Отечественная экстремальная ЭКБ: карбидокремниевая индустрия СПбГЭТУ "ЛЭТИ"

Отечественная экстремальная ЭКБ: карбидокремниевая индустрия СПбГЭТУ "ЛЭТИ"

Отечественная экстремальная ЭКБ: карбидокремниевая индустрия СПбГЭТУ "ЛЭТИ"

Non‐contact high precision alternative to Hg‐probe for dopant profiling in SiC

AbstractThe silicon carbide industry has been expanding in the recent years, producing a search for SiC non‐contact electrical characterization methods capable of replacing the commonly used Hg‐probe technique. In this work we present doping metrology based on the corona‐Kelvin method, which was originally developed and used for silicon IC dielectric and interface characterization. The method employs corona discharge in air to deposit precise doses of charge on the SiC surface. The corresponding depletion voltage is then measured with a Kelvin probe enabling non‐contact determination of the static charge‐voltage and capacitance‐voltage characteristics. The approach incorporates three novel elements: 1. corona charging of SiC to high depletion voltage with constant surface potential method; 2. the derivative charge‐voltage measurements for d(1/C2)/dV analysis and doping profiling; 3. surface charge neutralization with appropriate SiC illumination for repeated measurements. We demonstrate excellent repeatability and accuracy of the novel approach for n and p‐type SiC doping measurements in a range from 1014cm‐3 to mid 1018cm‐3 and excellent correlation with results obtained with mercury‐probe C‐V. Using multi‐layer epitaxial SiC structures, we further demonstrate the effectiveness of novel non‐contact depth profiling. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

Dust exposure is associated with increased lung function loss among workers in the Norwegian silicon carbide industry

ObjectivesTo investigate the relationship between dust exposure and annual change in lung function among employees in Norwegian silicon carbide (SiC) plants using a quantitative job exposure matrix (JEM) regarding total...

Determinants of Exposure to Dust and Dust Constituents in the Norwegian Silicon Carbide Industry

The aim of this study was to identify important determinants of dust exposure in the Norwegian silicon carbide (SiC) industry and to suggest possible control measures. Exposure to total dust, respirable dust, quartz, cristobalite, SiC, and fiber was assessed in three Norwegian SiC plants together with information on potential determinants of exposure. Mixed-effect models were constructed with natural log-transformed exposure as the dependent variable. The exposure assessment resulted in about 700 measurements of each of the sampled agents. Geometric mean (GM) exposure for total dust, respirable dust, fibers, and SiC for all workers was 1.6mg m(-3) [geometric standard deviation (GSD) = 3.2], 0.30mg m(-3) (GSD = 2.5), 0.033 fibers cm(-3) (GSD = 5.2), and 0.069mg m(-3) (GSD = 3.1), respectively. Due to a large portion of quartz and cristobalite measurements below the limit of detection in the processing and maintenance departments (>58%), GM for all workers was not calculated. Work in the furnace department was associated with the highest exposure to fibers, quartz, and cristobalite, while work in the processing department was associated with the highest total dust, respirable dust, and SiC exposure. Job group was a strong determinant of exposure for all agents, explaining 43-82% of the between-worker variance. Determinants associated with increased exposure in the furnace department were location of the sorting area inside the furnace hall, cleaning tasks, building and filling furnaces, and manual sorting. Filling and changing pallet boxes were important tasks related to increased exposure to total dust, respirable dust, and SiC in the processing department. For maintenance workers, increased exposure to fibers was associated with maintenance work in the furnace department and increased exposure to SiC was related to maintenance work in the processing department. Job group was a strong determinant of exposure for all agents. Several tasks were associated with increased exposure, indicating possibilities for exposure control measures. Recommendations for exposure reduction based on this study are (i) to separate the sorting area from the furnace hall, (ii) minimize manual work on furnaces and in the sorting process, (iii) use remote controlled sanders/grinders with ventilated cabins, (iv) use closed systems for filling pallet boxes, and (v) improve cleaning procedures by using methods that minimize dust generation.

Lung cancer incidence among Norwegian silicon carbide industry workers: associations with particulate exposure factors

ObjectivesAn increased lung cancer risk associated with total dust exposure in the silicon carbide (SiC) industry has previously been reported. The aim of the present study was to examine the...

A Novel Strategy for Retrospective Exposure Assessment in the Norwegian Silicon Carbide Industry

The objective was to construct a retrospective job-exposure matrix (JEM) for the Norwegian silicon carbide industry. More than 3300 historical total dust measurements were available (1967–2005); however, there were few measurements of other agents. Total dust measurements were therefore used as the basis for the JEM, and a novel method was developed to estimate exposure to other agents. Multiple linear regression models were developed to describe historical exposure to total dust. Exposure estimates were extrapolated backward to periods without exposure data by adjustments for process and work-hour related changes. An exposure assessment study was performed where total dust was sampled in parallel with fibers or respirable dust. The respirable dust was analyzed for the content of quartz, cristobalite, and silicon carbide. Mixed-effect models were developed to estimate the exposure to these agents from total dust exposure, plant, and job group. Exposure to asbestos and polycyclic aromatic hydrocarbons was assigned qualitatively. Multiple linear regression models of total dust described historical exposure best in the furnace department (R2 adj = 0.49–0.74). Models in the other departments explained less variance (R2 adj = 0.12–0.32). Exposure determinants and total dust explained a substantial proportion of the between- (70–100%) and within-worker (8.0–54%) variance in the mixed-effect models. The relative bias between available historical measurements and the estimated exposure to dust components varied between –39% (fiber) and 40% (quartz). However, corrections were not considered necessary due to limitations in the historical data. The component-specific metrices were sufficiently different from each other (rPearson < 0.7), with the exception of total and respirable dust (rPearson = 0.84) and total dust and cristobalite (rPearson = 0.72), and will enable component-specific epidemiologic analyses in the future. Improved and less correlated estimates of exposure levels for the different components in the dust were obtained with the updated exposure assessment. Due to limitations in the measurement data, assumptions had to be made, especially in the period before 1967. [Supplementary materials are available for this article. Go to the publisher's online edition of Journal of Occupational and Environmental Hygiene for the following free supplemental resource: a file containing tables outlining multiple linear regression models for prediction of total dust exposure in the processing departments of Norwegian SiC producing plants, evaluation of the predictive abilities of the reduced total dust models, and mixed models for pedicting exposure to fibers and respirable quartz, cristobalite, non-fibrous silicon carbide and respirable dust from total dust exposure.]

Exposure related mortality from obstructive lung diseases among workers in the Norwegian silicon carbide industry

ObjectivesAn excess mortality from asthma, chronic bronchitis, and emphysema, is previously reported from the silicon carbide (SiC) industry. Our objective was to study mortality from obstructive lung diseases (OLD) with...

Mortality from non-malignant respiratory diseases among workers in the Norwegian silicon carbide industry: associations with dust exposure

ObjectivesIncreased mortality from asthma, chronic bronchitis and emphysema has previously been reported among workers in the silicon carbide (SiC) industry. The objective of the present study was to evaluate the...

Cancer incidence among short- and long-term workers in the Norwegian silicon carbide industry

A previous study among workers in the Norwegian silicon carbide industry, followed until 1996, revealed an excess incidence of lung and total cancer. The present study adds nine years of follow-up and focuses on cancer risk among short- and long-term workers, based on the assumption that these two groups have different exposure and lifestyle characteristics. The total cohort for this study comprised 2612 men employed for >6 months between 1913 and 2003. The follow-up period for cancer was 1953-2005. Short-term workers were defined as having <3 years of total employment in the industry. We estimated standardized incidence ratios (SIR) using national rates as the expected values. Among the short-term workers, we observed an overall excess incidence of cancer [SIR 1.4, 95% confidence interval (95% CI) 1.2-1.6], with an excess of lung cancer (SIR 2.6, 95% CI 1.9-3.5) as the most important contributing factor. The long-term workers also had an excess incidence of total cancer (SIR 1.2, 95% CI 1.1-1.3) and lung cancer (SIR 1.7, 95% CI 1.3-2.2). We also observed an increased risk of cancers at other sites, specifically among short-term workers. We observed an increased risk of cancer (especially in the lung but also at other sites) among both short- and long-term workers. Dust exposure in the silicon carbide industry may have contributed to the increased risk among long-term workers, whereas the increased risk among short-term workers may be due to a combination of occupational and lifestyle factors.

Quantitative Determination of Airborne Respirable Non-Fibrous α-Silicon Carbide by X-ray Powder Diffractometry

The purpose of the present investigation was to establish a method for the determination of airborne respirable non-fibrous silicon carbide (SiC). The main application is within the industrial production of SiC. Due to the complex airborne aerosol mixture of crystalline compounds in the SiC industry, X-ray powder diffractometry was selected as the most appropriate method. Without any international standard material for the respirable fraction of non-fibrous SiC, pure and suitable products from three SiC plants in Norway were selected. These products have a median particle diameter in the range 4.4-5.1 mum. The method is based on thin sample technique, with the dust deposited on a polycarbonate filter. Absorption correction is done by standard procedures with the use of a silver filter, situated below the polycarbonate filter. The diffraction line used for quantitative determination was selected carefully. This was done to avoid interferences from quartz, cristobalite, and graphite, which all are airborne components present in the atmosphere during the industrial process. The instrumental limit of detection for the method is 12 microg. This method has been used to determine airborne non-fibrous SiC in a comprehensive ongoing project in the Norwegian SiC industry for further epidemiological studies. The method is fully applicable for compliance work.

Exposure to fibres, crystalline silica, silicon carbide and sulphur dioxide in the norwegian silicon carbide industry.

Objectives: The aim of this study was to assess personal exposure to fibres, crystalline silica, silicon carbide (SiC) and sulphur dioxide in the Norwegian SiC industry.Methods: Approximately 720 fibre samples, 720 respirable dust samples and 1400 total dust samples were collected from randomly chosen workers from the furnace, processing and maintenance departments in all three Norwegian SiC plants. The respirable dust samples were analysed for quartz, cristobalite and non-fibrous SiC content. Approximately 240 sulphur dioxide samples were collected from workers in the furnace department.Results: The sorting operators from all plants, control room and cleaning operators in Plant A and charger, charger/mix and payloader operators in Plant C had a geometric mean (GM) of fibre exposure above the Norwegian occupational exposure limit (OEL) (0.1 fibre cm−3). The cleaner operators in Plant A had the highest GM exposure to respirable quartz (20 μg m−3). The charger/mix operators in Plant C had the highest GM exposure to respirable cristobalite (38 μg m−3) and the refinery crusher operators in Plant A had the highest GM exposure to non-fibrous SiC (0.65 mg m−3). Exposure to the crystalline silica and non-fibrous SiC was generally low and between 0.4 and 2.1% of the measurements exceeded the OELs. The cleaner operators in Plant A had the highest GM exposure to respirable dust (1.3 mg m−3) and total dust (21 mg m−3). GM exposures for respirable dust above the Norwegian SiC industry-specific OEL of 0.5 mg m−3 were also found for refinery crusher operators in all plants and mix, charger, charger/mix and sorting operators in Plant C. Only 4% of the total dust measurements exceeded the OEL for nuisance dust of (10 mg m−3). Exposure to sulphur dioxide was generally low. However, peaks in the range of 10–100 p.p.m. were observed for control room and crane operators in Plants A and B and for charger and charger/mix operators in Plant C.Conclusion: Workers in the SiC industry are exposed to a mixture of several agents including SiC fibres, quartz, cristobalite, non-fibrous SiC and sulphur dioxide. Exposure levels were generally below the current Norwegian OELs; however, high exposure to fibres and respirable dust still occurs in the furnace department.

Airborne Fibres in the Norwegian Silicon Carbide Industry

Morphology of silicon carbide (SiC) fibres from the Norwegian SiC industry has been studied by scanning electron microscopy (SEM). The fibres are an unwanted side-product in SiC production. They represent a probable cause of the observed increased occurrence of lung diseases among SiC workers. The main aim of this work is to give a detailed description of the morphological variation of the fibres. Furthermore, it is important to study the occurrence of various morphological types with respect to job types and process parameters. SiC fibres accounted for >90% of all fibres observed. Eight categories of SiC fibres are described based on their morphology. The most frequent fibre category had a smooth surface and accounted for more than half of the observed SiC fibres. The diameter distributions of the eight fibre types were significantly different except for two of the categories. More than 99% of the SiC fibres observed were <3 microm in diameter, satisfying one WHO criterion for health relevant fibres. The aspect ratio and diameter of health-relevant fibres generally followed a lognormal distribution for different fibre categories, whereas fibre length did not. The proportions of SiC fibres (all categories) did not differ significantly between the plants. The proportions differed between plants for two SiC fibre categories including the most dominant type. For two SiC fibre categories and the SiC cleavage fragments differences were observed between job groups. Two other fibre categories were correlated with type of SiC produced (i.e. black or green SiC) and sawdust added to the raw material mix.

Cancer incidence among workers in the Norwegian silicon carbide industry.

The presence of silicon carbide (SiC) fibers in the SiC smelter work environment has suggested a possible cancer hazard. The authors studied cancer incidence among 2,620 men employed for more than 6 months in three Norwegian SiC smelters. Follow-up from 1953 to 1996 revealed an overall excess risk of lung cancer (standardized incidence ratio = 1.9, 95% confidence interval (CI): 1.5, 2.3) and an elevated risk of stomach cancer (standardized incidence ratio = 1.5, 95% CI: 1.1, 2.0). Both standardized incidence ratio and Poisson regression analyses showed that lung cancer risk increased according to cumulative exposure to total dust, SiC fibers, SiC particles, and crystalline silica. The standardized incidence ratio for the upper SiC fiber exposure category was 3.5 (95% CI: 2.1, 5.6) when exposure was lagged by 20 years, while the Poisson regression analysis showed a rate ratio of 4.4 (95% CI: 2.1, 9.0). Smoking did not seem to be an important confounder. The excess risk of lung cancer may be explained by exposure to SiC fibers, but a strong correlation between the different exposures made it difficult to distinguish between them.

Evaluation of worker exposure to polycyclic aromatic hydrocarbons.

A sampling and analytical method was selected to determine the physical and chemical nature of worker exposure to polycyclic aromatic hydrocarbons (PAH). It consists of filter and sorbent tube sampling followed by benzene extraction and analysis of 12 different PAHs with a gas chromatograph connected to a mass spectrometer. This method has undergone extensive field trials. Sampling temperature, inorganic and organic interferences have an effect on the results as they do on the standard gravimetric method of benzene-solubles. A combination of the gravimetric method and the particulate and gaseous concentration profile of 12 PAHs is necessary to obtain an informative evaluation of worker exposure. This approach was used to demonstrate that workers in paving and roofing operations and on some worksites in the steel and silicon carbide industries show an exposure profile that suggests minimal health risk and is largely different from the exposure of workers in aluminum refineries, refractory brick laying and most other worksites in the silicon carbide industry.

Evaluation of occupational exposure to mixed dusts and polycyclic aromatic hydrocarbons in silicon carbide plants.

Workers in the silicon carbide industry have experienced occupational health diseases, particularly lung disorders such as silicosis. The silicon carbide production process mainly employs petroleum coke, sawdust, pure crystalline silica and graphite. Since crystalline silica is present in the occupational environment, the airborne dust content of various polymorphs of silica, especially quartz, cristobalite and tridymite, was determined by X-ray diffraction analysis. The analytical method was modified to eliminate graphite, since it overlaps with the main diffraction plane of quartz. Exploratory field surveys were conducted to identify the minerals present in that occupational environment and to evaluate the validity of the analytical method. The surveys provided information on the mineralogical nature of the dust, its respirable content and the concentration of silica polymorphs. Polycyclic aromatic hydrocarbons also were measured, and the effect of their adsorption on graphite was evaluated.