In this paper a flexible coplanar waveguide resonator with high quality factor is proposed and fabricated. The device consists of a compact coplanar waveguide (CPW) and two complementary split rectangle resonators (CSRR) locating between the central signal wire and the ground plane of the CPW. The designed and measured values of frequency, attenuation, and quality factor of the resonant dips are 31.9GHz and 31.8GHz, −45dB and −12dB, and 115.7 and 35.1, respectively. The differences between the simulated and measured values of attenuation and quality factor are due to the imperfectmetal structure. The frequency of the resonant dip is very sensitive to dielectric environment. This chip device is very promising for biomedical and sensing applications.
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