The sol-gel approach was utilized to synthesize the pure TiO2 films. Hydrogen ions are irradiated on these synthesized films with a flow rate of 2x1013, 2x1014 and 2x1015 ionscm-2, and the beams are accelerated at 700 KeV. The XRD analysis confirmed the tetragonal structure of TiO2. The high grain size is observed at 2x1014 ions/cm2 . UVvisible spectroscopy showed that films are highly transparent to visible light and hydrogen ions produces a red shift in the absorbance peak. The low value of Eg is observed at 2x1014 ions/cm2 . The calculated value of conduction band edges gave suitable information of the behavior of free charge carriers in the solar cells. PL analysis showed that the recombination rate reduced, which will enhance the dye-sensitized solar cells' efficiency. DSSCs have been prepared with these films. The EIS results indicate the resistance in the transportation of charges across the interfaces reduces. Via current voltage J-V analysis, open circuit voltage Voc, short circuit current density Jsc and fill factor FF were improved with the H-irradiation process at 2x1014 ions/cm2 fluence rate, resulting in maximum photoconversion efficiency of 4.05%.
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