Sensitive Pressure Sensor Research Articles

An adaptive bionic sensor: enhancing ankle joint tracking with high sensitivity and superior cushioning performance

Flexible sensors are renowned for their rapid responsiveness, high flexibility, and outstanding mechanical properties, making them ideal for applications in wearable devices, sports and health monitoring, and human-machine interfaces. To enhance the sensing performance of these flexible sensors, researchers have drawn inspiration from nature, creating various bionic microstructures. However, these structures often manifest in the macroscopic form of thin films, which do little to improve impact resistance and joint protection. In response, this work achieves a highly sensitive and impact-resistant pressure sensor by integrating bionic principles at both micro and macro levels. Specifically, at the micro level, a muscle-like hydrogel system consisting of MXene nanosheets incorporated into the double network of polyvinyl alcohol and sodium alginate matrix is selected. At the macro level, the bionic prototypes of mimosa leaves and durian spikes with good energy absorption structure, together with octopus’ sucker with good adsorption capacity are selected, and the synergistic construction of the three structures is realized through 3D printing methods. The obtained sensor has an appropriate response range, sensitivity and stability. More importantly, the displacement deformation of the hydrogel can be reduced by 91.22%, while its adhesion strength can be increased by 57.5% compared to the unstructured hydrogel. As a proof-of-concept, the proposed bionic flexible sensor can be used to monitor the motion status of the human ankle joint in real-time, thereby assisting users in making real-time judgments on gait health.

Fully Degradable, Highly Sensitive Pressure Sensor Based on Bipolar Electret for Biomechanical Signal Monitoring

Fully Degradable, Highly Sensitive Pressure Sensor Based on Bipolar Electret for Biomechanical Signal Monitoring

Fabrication of Highly Sensitive Porous Polydimethylsiloxane Pressure Sensor Through Control of Rheological Properties.

In order to enhance the sensitivity of elastomers, pores were integrated into their structure. These pores facilitate the adjustment of thickness in response to external pressure variations, thereby improving the sensitivity of pressure sensors. Pores were introduced by emulsifying immiscible polydimethylsiloxane (PDMS) and water with a surfactant. By controlling the water content in the PDMS and water emulsion, we controlled the size, density, uniformity, and spatial distribution (2D or 3D) of the pores within the PDMS matrix. The presence of these pores significantly improved the sensitivity of PDMS under low external pressure conditions compared to high pressures. Specifically, porous PDMS exhibited approximately 10-times greater sensitivity under low-pressure conditions than non-porous PDMS. The effectiveness of porous PDMS was demonstrated through dynamic loading and unloading detection of a small Lego toy and monitoring of human heartbeats. These results highlight the efficacy of our pressure sensor based on porous PDMS, which is fabricated through a simple and cost-effective process using a PDMS and water emulsion. This approach is highly suitable for developing the ability to detect applied pressures or contact forces.

Investigating the Potential of Cr3+-Doped Pyroxene for Highly Sensitive Optical Pressure Sensing.

Luminescent manometry has gained significant popularity in recent years due to its capability to provide in situ pressure measurements in a remote manner. Therefore, there is a growing need to identify phosphors with pressure-dependent spectroscopic properties that can be utilized to develop highly sensitive pressure sensors operating over a wide pressure range. Hence, we present a novel temperature-invariant luminescent manometer based on Cr3+ ion emission in pyroxene Ca0.8Sr0.2MgSi2O6:Cr3+. We utilized two readout modes, including an innovative luminescent pressure sensing ratiometric approach based on the broad emission band associated with the 4T2g → 4A2g electronic transition of Cr3+ ions. This approach provided an exceptionally high sensitivity of SR = 50.7 ± 0.5% GPa-1 and ensured temperature-independent pressure measurements, thus offering highly reliable readouts. Furthermore, the proposed readout mode, which leverages changes in luminescence kinetics, demonstrated high sensitivity at high pressure at around 5 GPa (SR ∼ 8 ± 0.2% GPa-1) surpassing the performance of luminescence kinetics-based manometers reported to date. Consequently, Ca0.8Sr0.2MgSi2O6:Cr3+ emerges as a highly promising phosphor with significant application potential for pressure sensing across a broad pressure range.

Vacuum Filtration-Coated Silver Electrodes Coupled with Stacked Conductive Multi-Walled Carbon Nanotubes/Mulberry Paper Sensing Layers for a Highly Sensitive and Wide-Range Flexible Pressure Sensor

Flexible pressure sensors based on paper have attracted considerable attention owing to their good performance, low cost, and environmental friendliness. However, effectively expanding the detection range of paper-based sensors with high sensitivities is still a challenge. Herein, we present a paper-based resistive pressure sensor with a sandwich structure consisting of two electrodes and three sensing layers. The silver nanowires were dispersed deposited on a filter paper substrate using the vacuum filtration coating method to prepare the electrode. And the sensing layer was fabricated by coating carbon nanotubes onto a mulberry paper substrate. Waterborne polyurethane was introduced in the process of preparing the sensing layers to enhance the strength of the interface between the carbon nanotubes and the mulberry paper substrate. Therefore, the designed sensor exhibits a good sensing performance by virtue of the rational structure design and proper material selection. Specifically, the rough surfaces of the sensing layers, porous conductive network of silver nanowires on the electrodes, and the multilayer stacked structure of the sensor collaboratively increase the change in the surface contact area under a pressure load, which improves the sensitivity and extends the sensing range simultaneously. Consequently, the designed sensor exhibits a high sensitivity (up to 6.26 kPa−1), wide measurement range (1000 kPa), low detection limit (~1 Pa), and excellent stability (1000 cycles). All these advantages guarantee that the sensor has potential for applications in smart wearable devices and the Internet of Things.

Ultralow-pressure-driven polarization switching in ferroelectric membranes

Van der Waals integration of freestanding perovskite-oxide membranes with two-dimensional semiconductors has emerged as a promising strategy for developing high-performance electronics, such as field-effect transistors. In these innovative field-effect transistors, the oxide membranes have primarily functioned as dielectric layers, yet their great potential for structural tunability remains largely untapped. Free of epitaxial constraints by the substrate, these freestanding membranes exhibit remarkable structural tunability, providing a unique material system to achieve huge strain gradients and pronounced flexoelectric effects. Here, by harnessing the excellent structural tunability of PbTiO3 membranes and modulating the underlying substrate’s elasticity, we demonstrate the tip-pressure-induced polarization switching with an ultralow pressure (down to 0.06 GPa). Moreover, as an application demonstration, we develop a prototype non-volatile ferroelectric field-effect transistor integrated on silicon that can be operated mechanically and electrically. Our findings underscore the great potential of oxide membranes for utilization in advanced non-volatile electronics and highly sensitive pressure sensors.

Highly Sensitive Gas Pressure Sensing with Temperature Monitoring Using a Slightly Tapered Fiber with an Inner Micro-Cavity and a Micro-Channel.

A highly sensitive optical fiber gas pressure sensor with temperature monitoring is proposed and demonstrated. It is based on a slightly tapered fiber with an inner micro-cavity forming an in-fiber Mach-Zehnder interferometer (MZI), and a micro-channel is drilled into the lateral wall of the in-fiber micro-cavity using a femtosecond laser to allow gas to flow in. Due to the dependence of the refractive index (RI) of air inside the micro-cavity on its gas pressure and the high RI sensitivity of the MZI, the device is extremely sensitive to gas pressure. To prevent fiber breakage, the MZI is housed in a silicate capillary tube with an air inlet. Multiple modes are excited by slightly tapering the inner micro-cavity, and the resonance dips in the sensor's transmission spectrum feature different linear gas pressure and temperature responses, so a sensitivity matrix algorithm can be used to achieve simultaneous demodulation of two parameters, thus resolving the temperature crosstalk. As expected, the experimental results demonstrated the reliability of the matrix algorithm, with pressure sensitivity reaching up to ~-12.967 nm/MPa and temperature sensitivity of ~89 pm/°C. The features of robust mechanical strength and high air pressure sensitivity with temperature monitoring imply that the proposed sensor has good practical and application prospects.

Tailored Porous Conductive Elastomer Composites for Highly Sensitive Flexible Pressure Sensors over a Wide Range

Tailored Porous Conductive Elastomer Composites for Highly Sensitive Flexible Pressure Sensors over a Wide Range

Flexible wide-range, sensitive three-axis pressure sensor array for robotic grasping feedback

Flexible pressure sensors capable of detecting normal and tangential forces through physical contact have garnered considerable interest in the realm of human-interactive systems. However, simultaneous detection of multi-directional forces is still a challenge for current research. Herein, a capacitive flexible pressure sensor based on a sandwich structure for three-dimensional force detection is proposed. The fabrication process of the sensor array is straightforward, capable of effectively distinguishing between normal and tangential forces. Polyimide (PI) serves as the flexible substrate for depositing the metal electrode pattern, while Polydimethylsiloxane (PDMS) acts as the intermediate dielectric layer material and the three-dimensional force conduction block. Through a comparative study of the thickness of the hollow dielectric layer, a pressure sensor with superior performance was prepared, featuring high sensitivity across a wide working range. Test results demonstrate its capability to detect normal forces ranging from 0 to 46 N (0–520 kPa) with a sensitivity of 0.442 N−1 (0.031 kPa−1) and tangential forces from 0 to 10 N with a sensitivity of 0.08 N−1 (X-axis) and 0.07 N−1 (Y-axis). The designed acquisition system can simultaneously gather data from 6 sensor arrays, totaling 240 channels, with a response time of 11 ms. This sensor array, characterized by flexibility, versatility, and a wide range, is suitable for applications in robot tactile perception.

Persistent Photoluminescence and Mechanoluminescence of a Highly Sensitive Pressure and Temperature Gauge in Combination with a 3D-Printable Optical Coding Platform.

Distinct types of luminescence that are activated by various stimuli in a single material offer exciting developmental opportunities for functional materials. A versatile sensing platform that exhibits photoluminescence (PL), persistent luminescence (PersL), and mechanoluminescence (ML) is introduced, which enables the sensitive detection of temperature, pressure, and force/stress. The developed Sr2MgSi2O7:Eu2+/Dy3+ material exhibits a linear relationship between ML intensity and force and can be used as an ML stress sensor. Additionally, the bandwidth of the PL emission band and the PL lifetime of this material are remarkably sensitive to temperature, with values of ≈0.05nmK-1 and 1.29%/K, respectively. This study demonstrates PersL pressure sensing for the first time, using long-lasting (seconds) lifetime as a manometric parameter. The developed material functions as an exceptionally sensitive triple-mode visual pressure sensor; specifically, it exhibits: i) a sensitivity of ≈-297.4cmGPa-1 (8.11nmGPa-1) in bandshift mode, ii) a sensitivity of ≈272.7cm-1/GPa (14.8nmGPa-1) in bandwidth mode, and iii) a sensitivity of 42%GPa-1 in PL-lifetime mode, which is the highest value reported to date. Notably, anti-counterfeiting, night-vision safety-sign, 8-bit optical-coding, and QR-code applications that exhibit intense PersL are demonstrated by 3D-printing the studied material in combination with a polymer.

Ultrahighly Sensitive Flexible Pressure Sensors with Dual-Mode Response Based on Monolayer Films of Calcium Niobate Nanosheets.

Flexible pressure sensors present enormous potential for applications in health monitoring, human-machine interfacing, and electronic skins (e-skin). However, at the cost of flexibility, the design of flexible pressure sensors has been facing the trade off between high sensitivity and wide sensing range. Herein, we propose a sandwiched structure composed of monolayer films of calcium niobate nanosheets to endow the device with both ultrahigh sensitivity and a wide sensing range. Tunable contact between the two electrodes of the pressure sensor through the gaps in the insulative monolayer film and precise thickness modulation of the monolayer films at the nanoscale result in an ultrahigh sensitivity and wide sensing range of the sensors. By virtue of these two traits, the pressure sensor distinguishes itself with unprecedented performances of ultrahigh sensitivity (6.43 × 104 kPa-1), a wide sensing range (1.94-60.00 kPa), a fast response time (<165 ms), and reliable repeatability. In addition, the sensor has a sensing mechanism transition from capacitive mode to piezoresistive mode from low pressure to high pressure. The sensors demonstrates the ability for motion detection of the human body. This work sheds light on the development of highly sensitive flexible pressure sensors.

Ultra-thin and sensitive pressure sensor based on MXene/PVDF-HFP composite fiber TENG for self-diagnosis of ligament injuries

Early screening of anterior cruciate ligament (ACL) injuries using wearable devices enables timely intervention and reduces the risk of chronic complications. However, the subtle biomechanical signals of the ACL pose challenges to the baseline stability, sensitivity and skin adherence of wearable devices. Here, we present a TENG based on MXene/PVDF-HFP composite fibers for ACL self-diagnosis, leveraging the inherent advantages of TENG in baseline stability. The fiber-network structure prepared by electrospinning ensures that the TENG is ultra-thin and flexible to wear. The addition of MXene significantly increases the relative permittivity of the electrode materials, and re-modulates the crystalline phase (α and β). Consequently, the peak-to-peak open circuit voltage of the TENG reaches 160 V under a pressure of 10 N. It can respond to pressures as low as 0.01 N, allowing it to distinguish subtle relative displacements between the tibia and the knee. Integrated with a mobile app, a self-diagnostic system capable of detecting varying degrees of ACL injury has been developed. We expect this approach to facilitate the early detection and timely treatment of ACL injuries.

Microstructured CNTs/Cellulose Aerogel for a Highly Sensitive Pressure Sensor.

Flexible sensors have been applied in human health monitoring and biomedical research, but producing high-performance piezoresistive sensors at low cost is still challenging. To address these shortcomings, we proposed a microstructured carbon nanotube (CNT)/cellulose aerogel-based pressure sensor. The sensor consists of three parts, i.e., cellulose/poly(vinyl alcohol)/CNT aerogel-based sensing layer and top and bottom thermoplastic polyurethane elastomer (TPU)/silver nanowire (Ag NW) nanofiber electrode. The aerogel is fabricated using a simple freeze-drying method and an easy electrospinning method to obtain the nanofiber-based electrode. Two TPU/Ag NW nanofiber electrodes sandwiched the aerogel with a microstructure in the middle. Benefiting from the microcone and micropore structures on the nanofiber electrode, the assembled sensors show a high sensitivity of 66.4 kPa-1, a significant detection boundary of 50 kPa, and an excellent response speed of 10 ms. The high sensing performance enables the sensor to monitor physiological signals, Morse code interactions, and gesture recognition. With the help of machine learning, the success rate of gesture recognition is as high as 98.8%. The preparation of this pressure sensor based on an aerogel shows excellent health and environmental monitoring potential as an artificial skin.

Highly sensitive push-pull differential pressure sensor with multi-parameter measurement capabilities

A multi-parameter sensor comprising of a Fabry–Perot (FP) pair and a fiber-optic FP microcavity was proposed for simultaneous measurement of differential pressure (DP), static pressure (SP) and temperature. The push-pull FP pair is used to measure the differential pressure, and wide measurement range can be achieved by adjusting the dimensions of the diaphragm. The self-enclosed fiber-optic microcavity is utilized to measure the static pressure. For multi-parameter measurement, a matrix equation is proposed to solve the differential pressure, static pressure and temperature by fully considering the relationship of the FP cavity lengths and measurands. The performance of multi-parameter sensing is verified experimentally. The sensitivities of differential pressure, static pressure and temperature are 294.4822 nm/KPa, 353.08 nm/MPa and 42.4056 nm/°C, respectively, in variation of cavity lengths. The sensing characteristics show good linearity. Such a sensor could find important applications in the fields of process industry and oil industry, etc.

Flexible FPI sensor fabricated by fiber end photopolymerization and integration for high sensitivity gas pressure sensing

This work presents a new design framework for highly sensitive fiber gas pressure sensor. We construct a Flexible Fabry–Perot Interferometer (F-FPI), which consists of three polymer pillars and an end cap, on a fiber end face. A unique fiber-end photopolymerization and integration (FEPI) technique is adopted for fabricating the device. The varied gas pressure in the enclosed space not only changes the refractive index (RI) of the gas but also the length of the pillars. Therefore the difference in the optical path length of the FPI is more sensitive to pressure changes. Experimental results indicate that the F-FPI realizes a gas pressure sensitivity up to 79.0 pm/kPa in the range of 0–200 kPa. In addition, the Vernier effect is introduced to amplify the sensitivity to −409.7 pm/kPa. The temperature compensation is achieved by cascading a Fiber Bragg Grating (FBG) behind the F-FPI. Such a design framework provides a new idea for highly sensitivity gas pressure sensing.

Highly sensitive flexible pressure sensor based on laser ablated Ag-MWCNT /MXene for human motion detection

The complex and dynamic human environment, higher requirements are put forward for the high-performance flexible pressure sensors. The materials selection and microstructure design are crucial to achieve high sensitivity and stability. In this work, we fabricated pressure sensitive layer with multiple dimensional materials. Using laser ablation in liquid method, Ag nanoparticles were uniformly distributed in surface of multi-walled carbon nanotubes (MWCNT). Combined with the delaminated MXene, highly pressure sensitive composite could be prepared due to the reduction of contact resistance under pressure. The corresponding piezoresistive sensors showed high sensitivity (12.7 kPa−1), excellent response speed (150 ms), recovery speed (100 ms), and distinguished cycle stability (3000 cycles). Based on the performance of the sensor, it can realize the monitoring of tiny pressure on the human body, and further realize the detection of human activities and health. In addition, the sensor array has spatial recognition capability, providing a way of thinking for the development needs of future intelligent wearable electronic devices. The sensors can measure changes in resistance caused by finger bending, slight breathing, pulse, vocal cord vibration, and other movements to realize human activity and health monitoring. At the same time, the 3×3 sensor array system can recognize the layout of pressure in space. This simple preparation and low cost of the sensor can Facilitate the progress towards sophisticated wearable electronic gadgets.

Piezoelectric Nanogenerators Based on Poly(vinylidene fluoride) Doped with High Entropy Oxide Nanoparticles for Sensitive Pressure Sensors

Piezoelectric Nanogenerators Based on Poly(vinylidene fluoride) Doped with High Entropy Oxide Nanoparticles for Sensitive Pressure Sensors

Development of Highly Sensitive and Thermostable Microelectromechanical System Pressure Sensor Based on Array-Type Aluminum-Silicon Hybrid Structures.

In order to meet the better performance requirements of pressure detection, a microelectromechanical system (MEMS) piezoresistive pressure sensor utilizing an array-type aluminum-silicon hybrid structure with high sensitivity and low temperature drift is designed, fabricated, and characterized. Each element of the 3 × 3 sensor array has one stress-sensitive aluminum-silicon hybrid structure on the strain membrane for measuring pressure and another temperature-dependent structure outside the strain membrane for measuring temperature and temperature drift compensation. Finite-element numerical simulation has been adopted to verify that the array-type pressure sensor has an enhanced piezoresistive effect and high sensitivity, and then this sensor is fabricated based on the standard MEMS process. In order to further reduce the temperature drift, a thermodynamic control system whose heating feedback temperature is measured by the temperature-dependent structure is adopted to keep the working temperature of the sensor constant by using the PID algorithm. The experiment test results show that the average sensitivity of the proposed sensor after temperature compensation reaches 0.25 mV/ (V kPa) in the range of 0-370 kPa, the average nonlinear error is about 1.7%, and the thermal sensitivity drift coefficient (TCS) is reduced to 0.0152%FS/°C when the ambient temperature ranges from -20 °C to 50 °C. The research results may provide a useful reference for the development of a high-performance MEMS array-type pressure sensor.

Highly Sensitive and Flexible Capacitive Pressure Sensors Combined with Porous Structure and Hole Array Using Sacrificial Templates and Laser Ablation.

Flexible, wearable pressure sensors offer numerous benefits, including superior sensing capabilities, a lightweight and compact design, and exceptional conformal properties, making them highly sought after in various applications including medical monitoring, human-computer interactions, and electronic skins. Because of their excellent characteristics, such as simple fabrication, low power consumption, and short response time, capacitive pressure sensors have received widespread attention. As a flexible polymer material, polydimethylsiloxane (PDMS) is widely used in the preparation of dielectric layers for capacitive pressure sensors. The Young's modulus of the flexible polymer can be effectively decreased through the synergistic application of sacrificial template and laser ablation techniques, thereby improving the functionality of capacitive pressure sensors. In this study, a novel sensor was introduced. Its dielectric layer was developed through a series of processes, including the use of a sacrificial template method using NaCl microparticles and subsequent CO2 laser ablation. This porous PDMS dielectric layer, featuring an array of holes, was then sandwiched between two flexible electrodes to create a capacitive pressure sensor. The sensor demonstrates a sensitivity of 0.694 kPa-1 within the pressure range of 0-1 kPa and can effectively detect pressures ranging from 3 Pa to 200 kPa. The sensor demonstrates stability for up to 500 cycles, with a rapid response time of 96 ms and a recovery time of 118 ms, coupled with a low hysteresis of 6.8%. Furthermore, our testing indicates that the sensor possesses limitless potential for use in detecting human physiological activities and delivering signals.

Fabrication of flexible pressure sensor for human detection by direct-write printing concave surface

Flexible pressure sensor plays an important role in the field of human-computer interaction area due to its high flexibility and sensitivity. Convex surface of flexible electrodes provide an efficient way to enhance the sensitivity of flexible pressure sensors. However, facilely preparing controllable convex surface of flexible electrodes is still a challenge for obtaining high sensitive flexible pressure sensors. In this paper, direct-write print technique was utilized to prepare a concave structure surface with viscoelastic substrate, which could be used to prepare convex structure flexible electrode for fabricating highly sensitive flexible pressure sensors. Interaction between ink droplet and substrate was explored to generate a concave template, which could be controlled in spacing and diameter with printing spacing and nozzle diameter. Convex structure flexible surface could be prepared with the concave template, and then the convex structure flexible electrode could be realized with the evaporation of metallic silver on the surface. Furthermore, flexible pressure sensor was assembled with an interlocking structure by stacking two convex structure flexible electrodes in a face-to-face way, which could efficiently enhance flexibility and electrical property. The flexible pressure sensor presents a high sensitivity, a fast response/recovery time (<100 ms) and excellent flexibility (more than 10,000 cycles of bending), which could be applied in monitor physiological signals such as pulse detection, sound vibration, finger bending and so on. Therefore, this work provides an efficient method for preparing controllable structured surface, which has a great potential in the fabrication of flexible sensors, wearable electronics and energy devices.