Abstract
A multi-parameter sensor comprising of a Fabry–Perot (FP) pair and a fiber-optic FP microcavity was proposed for simultaneous measurement of differential pressure (DP), static pressure (SP) and temperature. The push-pull FP pair is used to measure the differential pressure, and wide measurement range can be achieved by adjusting the dimensions of the diaphragm. The self-enclosed fiber-optic microcavity is utilized to measure the static pressure. For multi-parameter measurement, a matrix equation is proposed to solve the differential pressure, static pressure and temperature by fully considering the relationship of the FP cavity lengths and measurands. The performance of multi-parameter sensing is verified experimentally. The sensitivities of differential pressure, static pressure and temperature are 294.4822 nm/KPa, 353.08 nm/MPa and 42.4056 nm/°C, respectively, in variation of cavity lengths. The sensing characteristics show good linearity. Such a sensor could find important applications in the fields of process industry and oil industry, etc.
Published Version
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