Abstract The growth dynamics of mixed In and Se films on the MoSe2 substrate is modeled using quantum mechanical tight-binding-based molecular dynamics simulations. The substrate temperature, the ratio of In and Se, and the deposition flux are chosen to mimic the experimental conditions as closely as possible. The conversion of individual adatoms and clusters into alternate layers of Se-In-
Se is captured during our simulations. One of the main outcomes of our model is that we are able to identify and obtain energy barriers for the concerted motion of some species on the substrate surface. Such kind of estimates of energy barriers are important for larger scale kinetic Monte Carlo simulations. Furthermore, we have identified different diffusion regimes of In and Se.
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