In the present study, how certain growth, processing and surface treatment techniques can be used to dramatically lower the dark current behavior of APDs by several orders of magnitude and improve the depletion characteristics of the built-in structures is shown. Through careful dopant calibration, the devices could be grown such that they were essentially fully depleted as grown, even though doping levels in the avalanche region were in the low 10 18 cm -3 . The full depletion characteristics of the APDs were verified using theoretical modeling conducted for devices with similar structure and doping profiles. After processing the devices into mesa diodes, various surface passivation treatments were investigated These include both 02 plasma and sodium sulfide treatments. Through the application of such treatments, a decrease in the reverse bias dark current by as much as a factor of 1000 was achieved. Dark currents as low as 1 pA were obtained near zero bias. In some APDs, the dark currents increased to only 12 pA at 20% of breakdown. In addition, these devices exhibited extremely high gains, which exceeded 35006 in some APDs. The effect of the dopant profile in the avalanche region was also investigated. It was found that by the proper choice of dopant density and separation the break down voltage of the devices could be reduced by as much as 25%.