Retarding Field Energy Analyzer Research Articles

Spatial structures of different particles in helicon plasma

The spatial density structures of different particles (high-energy electron excited ionic and low-energy electron excited neutral particles) in both discharge and plume plasmas of a helicon source were characterized by an optical emission spectroscope (OES) and a Langmuir probe. Filters of 480 nm band pass and 600 nm high pass were used to distinguish the ionic and the excited neutral particles, respectively. The ion energy distributions at the outlet of the discharge tube with different magnetic field were obtained by a four-grid retarding field energy analyzer (RFEA). Results show that as RF input power increased, the helicon discharge modes change from a capacitive (E mode) to an inductive (H mode) to a wave coupling or a helicon discharge (W mode). After reaching the W mode, neutral particles are basically saturated, but ions will experience another growth as the power increases. Moreover, the reversed applied magnetic field can change the axial distribution of ion density (ionization region). The IEDF test results show that the maximum (most probable) ion energy increases with increasing input power. Meanwhile, the reversed magnetic field (+ 50 A) can increase the maximum ion energy by about 15 eV, which is believed to be the ionization/acceleration zone is close to the ion energy test point. Therefore, the directed ion energy is more correlated with the ion density distribution excited by high-energy electrons.

Study and development of diagnostic systems to characterise the extraction region in SPIDER

SPIDER, an RF-driven negative ion source in the Neutral Beam Test Facility (NBTF), serves as the prototype for ITER's neutral beam injector (NBI). It is composed of 8 drivers powered by 4 RF generators, aiming to accelerate 50 A of negative hydrogen ions to 100 KeV with a beam uniformity target of 10%. The experiment, launched in 2018, tested negative ion production using caesium. Results match those of similar facilities, but SPIDER faces challenges due to its size, multiple drivers, and non-uniform plasma expansion. These issues impact beam uniformity, preventing the machine from reaching expected performance. To address this, SPIDER initiated a significant shutdown at the end of 2021 for improvements.One the most important aspects studied during the first experimental campaign is source uniformity, addressed both in terms of plasma and of caesium distribution. The latter is particularly relevant since its quality is directly related to the beam uniformity and divergence. To have more insight about these issues, monitoring the plasma properties in the extraction region is crucial, hence in the present contribution, the design and development of two new diagnostic systems are described: a movable Langmuir probe and a Retarding Field Energy Analyser (RFEA).The first can provide a vertical scan of the main plasma parameters close to the plasma grid. The spatial resolution would improve with respect to the already installed set of fixed Langmuir probes embedded in the grid system, and the newly installed diagnostic could interact with other sensors to produce complementary measurements (namely, electron photo-detachment).The latter, instead, allows the monitoring of the positive ion energy distribution: positive ions, in fact, can be precursors of the negative ones produced at the caesiated surface, but also influence the energy of negative ion and their extraction probability and thus collecting information about their energy distribution allows inferring details about the extracted negative ion beam.The two diagnostics are designed focusing on the experimental constraint of integrating the diagnostics in a harsh and complex environment such as SPIDER plasma: a preliminary study of the placement inside the source is carried out, then the electrode of the movable probe and the RFEA sensor are sized according to the spatial and energy resolution requested by the system.

A retarding field thermal probe for combined plasma diagnostics

The wide variety and ever-growing applications of plasma processes in research and industry require an equally growing diversity and accessibility of suitable plasma diagnostics. The plasma parameters and the tailoring thereof strongly influence the outcome of thin film deposition, plasma etching, or surface treatments, to name only a few. To further enhance the determination of different fluxes of species, their energies, and behaviour influencing a surface process, a custom-built combination of two commonly used diagnostics was developed. With a retarding field energy analyzer, one can obtain the ion energy distribution in a plasma by measuring the current at the collector depending on the applied voltage at the scan grid. A passive thermal probe determines the energy flux density coming from a process plasma by measuring the temperature change of a dummy substrate. In this study, we present a retarding field energy analyzer where a passive thermal probe substitutes the collector. By doing so, we can determine the energy distribution of the charged ions, their energy flux density at a certain potential, and the power deposited onto a substrate. Another advantage is that the thermal probe can even measure the power deposited by incoming (fast) neutrals and of the background gas when the grids keep away the ions. Hence, combining these two powerful diagnostics yields information neither can deliver on their own. The probe has been tested in three different plasma environments: ion beam source, magnetron sputtering and radio frequency discharge plasma.

Numerical and experimental study of ion energy distribution function in a dual-frequency capacitively coupled oxygen discharge

The plasma dynamics of a low pressure oxygen capacitively coupled plasma driven by dual frequencies (27.12 MHz and 271.2 kHz) is studied experimentally and numerically in this work. A retarding field energy analyzer system is employed in the experiment to measure the ion energy distribution function (IEDF) at the grounded electrode for different combinations of low-frequency voltages and pressures. One-dimensional particle-in-cell simulations of the oxygen plasma are conducted at the experimental conditions. A typical bimodal IEDF is observed and good agreement is obtained between experiments and simulations. A semi-analytical model based on the Child law sheath and fitted sheath voltage is constructed to study the structure of the IEDF. It is found that for the investigated conditions the low-energy peak of the IEDF is independent of the low frequency (LF) voltage but determined by the minimum sheath voltage during the sheath collapse; the energy spread of IEDF scales linearly with the LF voltage; both an increase of LF voltage and pressure create more low-energy ions.

Exploring the Potential of a Thermionic LaB6 Virtual Source Mode Electron Gun for a High Angular Current Density and a Narrow Energy Distribution.

To date, lanthanum hexaboride (LaB6) thermionic electron sources have not been able fully to capitalize on their inherent potential, resulting in an ambiguous position within the application area. Although they exhibit higher brightness compared with a tungsten filament source, they still fall short of the performance of Schottky electron sources. This study aims to explore the capabilities of the LaB6 electron source under different operating conditions to bridge the gap, ultimately to realize its untapped potential. Simulations in virtual source mode indicated enhanced beam brightness and a reduced beam half-angle with an increase the extraction voltage, promising up to tenfold times higher beam brightness compared with the crossover mode. The energy distribution measured using a prelens retarding field energy analyzer revealed an energy distribution of 0.55 eV and a high angular current density of 33 mA/sr in the virtual source mode. Therefore, the virtual source mode of LaB6 can provide a narrow energy distribution akin to that of a ZrO/W Schottky electron gun (1600 K) while having an angular current density over 2,000 times higher. In addition, the stability of the virtual source mode is ±0.022%, while that of the crossover mode is ±0.138%.

Measurement of electron energetics in the equatorial and polar planes of a compact dipole plasma driven at steady state

The electron energy distribution function (EEDF) is investigated in a plasma driven at steady state and confined by a single permanent dipole magnet, employing electron cyclotron resonance heating using microwaves of 2.45 GHz. Directional retarding field energy analyzers are used to explore the EEDF in the equatorial and polar planes of the dipole magnetic field. The plasma confined in the magnetic field is found to be Maxwellian in most of the available space. Electrons have higher values of average energy () in the direction parallel to the magnetic field for both the equatorial and polar planes. The energetic electron rich regions are found at specific locations (r = 9 cm in the equatorial plane, and r = 5 cm and near the boundary region around r = 17 cm in the polar plane). The process rates such as electron neutral collisions and ionization show anisotropic variation in the polar plane of the dipole plasma.

Surface production of negative deuterium ions from plasma-exposed boron doped diamond and graphite: work function measurements using photoemission yield spectroscopy

Negative-ion sources are of considerable interest for applications such as materials processing and neutral beam injection for magnetic confinement fusion. The efficient production of negative ions in these sources often relies on surface production. Work function measurements are critical to enable a detailed understanding of the mechanisms that underpin this. In this study we used a combination of photoemission yield spectroscopy and the Fowler method to determine the work functions of boron doped diamond (BDD) and highly oriented pyrolytic graphite (HOPG) directly after exposure to a low-pressure inductively coupled deuterium plasma (150 W, 2 Pa). A magnetised retarding field energy analyser is used to measure the negative ion current from the samples. During plasma exposure, samples are biased at −130 V or −60 V and their temperature is varied between 50 ∘C and 750 ∘C. The results show that the increasing work function of the plasma exposed HOPG occurs over the same sample temperature range as the decreasing negative-ion current. In contrast, the work function of BDD does not show a clear relationship with negative-ion current, suggesting that different mechanisms influence the negative-ion production of metal-like HOPG and dielectric-like BDD. The necessity for an additional fitting parameter for the Fowler fits to BDD suggests that its electronic properties are changing under plasma exposure, unlike HOPG. For both materials, the maximum photocurrent measured from the samples displays a strong similarity with negative-ion current, suggesting they are driven by a common mechanism. The in-situ measurement of the work function using non-invasive techniques is of interest for the development of negative ion sources.

Energy distribution function of substrate incident negative ions in magnetron sputtering of metal-doped ZnO target measured by magnetized retarding field energy analyzer

The energy distribution function of the substrate incident negative ions during magnetron sputtering of a metal-doped zinc oxide target was measured using a home-made retarding field energy analyzer (RFEA) with a magnetic field region. The cross-field region in front of the RFEA injection aperture allows the bulk electrons in the plasma into the RFEA are dramatically suppressed, while the inflow of negative ions emitted from the oxide target is largely unaffected. Negative ions were found to be mainly emitted from the target erosion area and incident on the opposing substrate with ion energy equivalent to the target applied voltage. Compared to energy-resolved mass spectrometers, which require differential pumping and are large and not very portable, magnetized RFEA is inexpensive, compact and easy to sweep in space, although there is no mass separation.

Measurement of Ion Energy Distribution Function of Fast Plasma Flow Driven by Plasma Focus Device Using Retarding Field Energy Analyzer

To understand the mechanism of particle acceleration in collisionless shocks, generating a collisionless plasma flowing through dilute gas is required. We have proposed a compact plasma focus (CPF) device to generate collisionless plasma by using pulsed-power discharge. To discuss a particle acceleration process in collisionless shocks, it is necessary to evaluate an ion energy distribution function (IEDF) of the plasma. In this study, we measured the IEDF of the plasma flow using a retarding field energy analyzer (RFA). The experimental results measured by the RFA showed that ions with a few eV are dominant in the plasma flow generated by the CPF device. The IEDF could be fitted with the shifted Maxwellian distribution. The plasma parameters were estimated to be the ion number density ni = 4.6+−00..28 × 1019 m−3, the ion temperature Ti = 0.8+−00..64 eV, and the drift velocity vd = 11+−03..55 km/s. The estimated velocity approximately agreed with the result of a time-of-flight method calculated by the ion current waveform.

Development of an energy spread analyzer for secondary ion mass spectrometry ion source

The energy spread (ΔE) of an ion source is an important parameter in the production of a finely focused primary ion beam applied in secondary ion mass spectrometry (SIMS). A variable-focusing retarding field energy analyzer (RFEA) has been developed and tested with an Ar+ beam and an oxygen ion beam extracted from a 2.45 GHz microwave ion source, which is developed as a candidate ion source for SIMS applications. The simulation results show that the relative resolution ΔE/E of the designed RFEA reaches 7 × 10−5. The experimental results indicate that a focusing electrode can improve the ΔE measurement results, which is consistent with the simulation results. The ion energy distributions of the Ar+ beam and oxygen ion beam are of Gaussian distribution with the value of ΔE of 3.3 and 2.9 eV, respectively. These results indicate that the designed RFEA is reliable for measuring the ion beam energy spread. The developed RFEA is also used to study the plasma behavior in different settings, which reveals that plasma stability is critical to making a low energy spread ion beam. This paper will present the simulation, design, and test of the variable-focusing RFEA. Preliminary ion beam quality studies with this instrument will also be discussed.

Data processing techniques for ion and electron-energy distribution functions

Retarding field energy analyzers and Langmuir probes are routinely used to obtain ion and electron-energy distribution functions (IEDF and EEDF). These typically require knowledge of the first and second derivatives of the current–voltage characteristics, both of which can be obtained using analog and numerical techniques. A frequent problem with electric-probe plasma diagnostics is the noise from the plasma environment and measurement circuits. This poses challenges inherent to differentiating noisy signals, which often require prior filtering of the raw current–voltage data before evaluating the distribution functions. A review of commonly used filtering and differentiation techniques is presented. It covers analog differentiator circuits, polynomial fitting (Savitzky–Golay filter and B-spline fitting), window filtering (Gaussian and Blackman windows) methods as well as the AC superimposition and Gaussian deconvolution routines. The application of each method on experimental datasets with signal-to-noise ratios ranging from 44 to 66 dB is evaluated with regard to the dynamic range, energy resolution, and signal distortion of the obtained IEDF and EEDF as well as to the deduced plasma parameters.

Experimental study of a neutralizer-free gridded ion thruster using radio-frequency self-bias effect

An experimental study on the quasi-neutral beam extracted by a neutralizer-free gridded ion thruster prototype was presented. The prototype was designed using an inductively coupled plasma source terminated by a double-grid accelerator. The beam characteristics were compared when the accelerator was radio-frequency (RF) biased and direct-current (DC) biased. An RF power supply was applied to the screen grid via a blocking capacitor for the RF acceleration, and a DC power supply was directly connected to the screen grid for the DC acceleration. Argon was used as the propellant gas. Furthermore, the characteristics of the plasma beam, such as the floating potential, the spatial distribution of ion flux, and the ion energy distribution function (IEDF) were measured by a four-grid retarding field energy analyzer. The floating potential results showed that the beam space charge is compensated in the case of RF acceleration without a neutralizer, which is similar to the case of classical DC acceleration with a neutralizer. The ion flux of RF acceleration is 1.17 times higher than that of DC acceleration under the same DC component voltage between the double-grid. Moreover, there are significant differences in the beam IEDFs for RF and DC acceleration. The IEDF of RF acceleration has a widened and multi-peaked profile, and the main peak moves toward the high-energy region with increasing the DC self-bias voltage. In addition, by comparing the IEDFs with RF acceleration frequencies of 3.9 and 7.8 MHz, it is found that the IEDF has a more centered main peak and a narrower energy spread at a higher frequency.

Measurements of ion fluxes in extreme ultraviolet-induced plasma of new EUV-beam-line 2 nanolithography research machine and their applications for optical component tests

In modern extreme ultraviolet (EUV) lithography machines, sensitive optical components, such as multilayer mirrors and photomasks, may be affected by plasma interactions. The new 13.5 nm EUV-beam-line 2, designed to provide accelerated tests for next generation lithography, is used to investigate EUV-induced plasma phenomena. First systematic measurements of ion fluxes produced in EUV-induced hydrogen plasma are reported, with operating conditions including 5 and 20 Pa gas pressure, 3 kHz EUV pulse repetition rate, and 4.2 W total EUV beam power produced in a 10–15 ns EUV pulse. Space- and time-resolved distributions of ion fluxes and ion energies were measured using a retarding-field ion energy analyzer mounted next to the EUV beam. Typical ion energies were in the range of 1–8 eV and typical ion fluxes were in the range of 2–8 × 1017 ions m−2 s−1. The obtained ion fluxes are applied in a photomask lifetime test to understand the material effects after an EUV exposure.

High-Performance Compact Pre-Lens Retarding Field Energy Analyzer for Energy Distribution Measurements of an Electron Gun.

The energy distribution of an electron gun is one of the most important characteristics determining the performance of electron beam-based instruments, such as electron microscopes and electron energy loss spectroscopes. For accurate measurements of the energy distribution, this study presents a novel retarding field energy analyzer (RFEA) with the feature of an additional integrated pre-lens, which enables an adjustment of beam trajectory into the analyzer. The advantages of this analyzer are its compact size and simple electrode configuration. According to trajectory simulation theories, the optimum condition arises when the incident electron beam inside the RFEA is focused on the center of a retarding electrode. Comparing I–V curves depending on whether the pre-lens working or not, it is confirmed that the use of the pre-lens dramatically improves the energy resolution and efficiency of the signal acquisition process. The pre-lens RFEA was applied to characterize a Schottky electron gun under various temperatures and extraction voltages as operational conditions. When the tip temperature was increased by 50 K, we were able to measure an energy distribution broadening of 13.8 meV with the proposed pre-lens RFEA. The relative standard deviation of energy distribution was 0.7% for each working condition.

Investigation of Negative Ion Energy Distribution and Extraction Mechanism With a Compact Retarding Field Energy Analyzer in a Large Filament-Arc Source for Neutral Beam Injectors

In large beam sources for neutral beam injectors (NBIs) operating at high energies, negative hydrogen ions (NI) are extracted from a caesiated plasma discharge. H− ions are generated from volume and surface processes; surface production is enhanced by cesium deposition on the source walls and in particular on the plasma-facing electrode of the accelerator. The mechanisms of negative ion production and of extraction in the magnetic field present at the extraction apertures influence the formation of the single beamlets and their optics. A newly developed compact retarding field energy analyzer (CRFEA) was constructed and installed at the upstream surface of the plasma grid (PG) of a filament-arc source, the research negative ion source (RNIS) at the National Institute of Fusion Science. It was used to characterize the negative ions in the plasma source with and without cesium. The first electrode of the analyzer has a conical shape, resembling the PG apertures from which the beam is extracted. The measured saturation current was analyzed and correlated with the source parameters and the current of the negative-ion beam. The energy distribution of collected ions depends on the origin of the negative ions, and on possible energy exchange processes; but it is found to be also strongly influenced by the curvature of the meniscus (the plasma edge where the beam is formed). This compact retarding field analyzer proved to be effective for the study of the formation of a negative ion beam. The limits of the present design, and possible improvements are discussed, in particular to minimize the dependence of the transmission on perveance and extend the dynamic range of the diagnostic.

Formations of anode double layer and ion beam in bipolar-pulse HiPIMS (BP-HiPIMS)

As an emerging ion acceleration plasma source, the bipolar-pulse high power impulse magnetron sputtering (BP-HiPIMS) discharge provides an effective approach to improve deposited ion energy and tailor the film properties for a large range of applications. The ion acceleration mechanism in BP-HiPIMS discharge is very vital but still unclear now. In the present work, the ion acceleration mechanism is systematically investigated via the experimental measurements, particle-in-cell/Monte Carlo collision (PIC-MCC) simulation, and theoretical model together. In the experiment part, the floating potential V f and the ion velocity distribution function (IVDF) have been measured via the Langmuir probe and the retarding field energy analyser (RFEA) respectively. The measurements show that the V f at the downstream drops from +80 V to ∼+40 V after applying the positive pulse for ∼75 μs, suggesting the formation of the double layer. Correspondingly, the IVDF changes from the unimodal Maxwellian distribution to the bimodal distribution, suggesting the existence of the ion beam. The PIC-MCC simulation results clearly show the development process of the double layer and ion beam. A theoretical model is introduced to explore the complex plasma dynamics in the experiment and simulation. The theoretical results illustrate that (i) the sheath in front of the target surface prefers an ion sheath rather than an electron sheath, (ii) the stable position of the double layer boundary is in the magnetic null point, (iii) the potential drop across the boundary is influenced by the gas pressure p. These important theoretical results are well consistent with the measurements and simulation. In addition, the oscillation of the double layer boundary and the instabilities of the ions are briefly discussed by combining the previous works.

Radial characterization of an ion beam in a deflected magnetic nozzle

The radial characterization of an ion beam generated in a magnetically steered radio-frequency (RF) plasma source is presented. In the symmetrical magnetic nozzle (MN) configuration, radial profiles of the ion saturation current obtained with a planar Langmuir probe show a double-peaked profile. The same behaviour is confirmed by the radial measurements of the total ion current and the ion energy distribution functions (IEDFs) obtained with a retarding field energy analyzer. The IEDFs also show the presence of an ion beam centred at r = -2 cm. On the contrary, radial measurements taken with a magnetic nozzle deflected on the r - z plane exhibit a single-peaked profile with both the local ion population and the ion beam centred at r = -5 cm, in the direction of the MN orientation. It is shown that the ion beam location is changed as a result of a deflected magnetic nozzle, and that it follows the direction of increasing radial magnetic field.

Use of plasma oxidation for conversion of metal salt infiltrated thin polymer films to metal oxide

Oxygen plasma treatments for conversion of metal salt infiltrated polymer films to metal oxide films using an asymmetrical capacitively coupled plasma system were investigated. Hydroxylated Poly-2-Vinylpyridine (P2VP-OH) thin films grafted to silicon were exposed to metal salt-solvent solutions which swell the polymer enabling metal ion infiltration. Exposing the resulting film to oxygen plasma resulted in formation of polymer-free metal oxide films. Atomic oxygen and positive ions present in plasma can both influence the process outcome. A design of experiment approach was used to investigate the impact of radio frequency (RF) power, gas pressure and process time on plasma composition and the resulting metal oxide films. A combination of Langmuir probe, retarding field energy analyser and optical emission spectroscopy measurements were used to monitor the plasma. The samples surfaces were examined using x-ray photoelectron spectroscopy, ellipsometry, transmission electron microscopy and energy dispersive x-ray analysis. Gas pressure and RF power were found to strongly influence both ion energy, and atomic oxygen to molecular ion ratios [O]/[O2 +] in the plasma which impacted the resulting surface layer. For the plasma conditions investigated conversion to a metal oxide was achieved in minutes. Sputter contamination was found to be significant in some cases.

Effect of an electron beam on a dual-frequency capacitive rf plasma: experiment and simulation *

One of the crucial challenges facing modern microelectronics is to provide plasma surface treatment at the single atomic level. To minimize defects in the underlying layers, these processes require ions with very low energies—lower than in conventional radio-frequency (rf) plasma and close to the binding energy of atoms. A conventional rf dual-frequency capacitively coupled plasma (df CCP) discharge with additional ionization by an electron beam is considered as a possible solution to this problem. This paper contains a study on the electron beam effect on 81 & 12 MHz plasma parameters such as electron energy probability function, plasma density, electron temperature and ion energy distribution at an rf-biased electrode. The experimental part of the study includes measurements carried out in an asymmetric rf df CCP discharge in Ar at 100 mTorr pressure using a Langmuir probe, a hairpin-probe, and a retarding field energy analyzer. The behavior of plasma parameters is considered in the different types of plasma: electron beam plasma, when no rf power is applied, as well as rf plasma with and without an electron beam. The 1D PIC MCC simulation is used to analyze the effect of an electron beam on the df rf plasma. The obtained results showed that the electron temperature and, accordingly, the energy of ions coming at the electrode surface can be lowered. The use of an electron beam in a df CCP discharge allows to control the plasma density, electron temperature and ion energy spectrum in the low-energy range, which can be of essential interest for atomic layer etching and atomic layer deposition technologies.

Ion flux–energy distributions across grounded grids in an RF plasma source with DC-grounded electrodes

We present an experimental investigation of the ion flux–energy distribution functions (IFEDFs) obtained across grounded grids in an asymmetric capacitively coupled RF source using a helium discharge. The powered electrode in the RF source is DC-grounded via a λ/4 filter, which lifts its DC potential to zero. Grids of different dimensions (hole width, thickness, and geometric transparency) were used to confine the plasma, while the IFEDF of the ion beam departing the grid and reaching the reactor walls was studied using a retarding field energy analyser. The IFEDF obtained was double-peaked, indicating the presence of fast ions arriving from the plasma source, and cold ions generated upon charge exchange collisions between the fast ions and neutrals. The flux, as well as the peak energies of the two ion groups, depended significantly on the process parameters: RF power, He pressure, the distance between grids and walls, and the dimensions of the grids. The results indicate that confining plasma with grids can reduce the ion flux at the walls by over 60%, significantly lowering the wall sputtering rate. This was confirmed with a dedicated long-exposure plasma discharge with a gridded plasma reactor, wherein less than 1 nm of Cu deposition was found on the DC-grounded powered electrode, and the surface reflectivity was preserved to pristine values. In contrast, a similar experiment in a gridless reactor resulted in Cu deposition of 35 nm with a drastic drop in surface reflectivity. These studies are of great importance for the application of similar RF plasma sources with in-situ cleaning of diagnostic mirrors in fusion devices, as well as in a variety of plasma processing applications.