AbstractDear reader of this issue,We introduce to you a collection of Original Papers, Invited and Contributed Articles presented at the Micro&Nano 2007 Conference (3rd International Conference on Micro‐Nanoelectronics, Nanotechnology and MEMs), held in Athens, Greece on 18–21 November 2007.Micro&Nano 2007 was the third of a series of conferences held at NCSR Demokritos every three years which aim at gathering together all scientists and engineers working in the challenging field of micro‐nanoelectronics, nanotechnology and MEMs in an interactive forum and stimulating discussions on the latest achievements and new developments in this rapidly evolving field.The main topics of Micro&Nano 2007 were:– Micro and nano‐fabrication and processing,– Materials,– Devices,– Quantum devices and molecular electronics,– Integration, circuits and systems,– Industry and technology transferA total of 250 scientists representing 23 countries attended. There were a total of 205 presentations, 71 of which were oral (including 10 invited talks) and 134 were posters presented in two different sessions.The conference opening ceremony was honored by the presence of the General Secretary of Research and Technology Prof. I. Tsoukalas. During the ceremony, an honorary plaque was awarded to Prof. G. Kamarinos from the Polytechnical University of Grenoble, France, acknowledging his contributions to the early stages of microelectronics research in Greece. In addition, Dr. A. G. Nassiopoulou, Conference Chairperson and Director of the Institute of Microelectronics (IMEL) of NCSR Demokritos, gave an overview on the development of microelectronics research in Greece from the mid 1980s to the present day. She also presented the National Scientific Society “Micro&Nano” founded in 2004 (www.micro‐nano.gr).The next conference Micro&Nano will be held at the same place in the year 2010. We look forward to seeing you at that conference.We would like to thank all delegates, our session chairs, delegates who helped with refereeing and all committee members for their contribution to the success of the conference.Our acknowledgements also go to our sponsors for their financial support, NCSR Demokritos for hosting and supporting the conference and the General Secretariat of Research and Technology Greece, under whose auspices the conference was held. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)