Replica Technology Research Articles

Deep submicron pattern transfer using high density plasma etching and nanochannel glass replica technology

Nanochannel glass (NCG)-based lithography has been used in conjunction with electron cyclotron resonance microwave plasma reactive ion etching (ECR-RIE) to demonstrate deep submicron features in HgCdTe alloys and InAs/GaSb heterostructures. NCG-based lithography is attractive as a massively parallel, low cost technology for nanometer-scale patterning. Samples patterned using thin-film metal replicas of NCG and methyl-radical-based ECR-RIE demonstrate a high degree of uniformity and fidelity with individual features having nearly vertical sidewalls and aspect ratios of up to 2 to 1. Dot arrays with features as small as 250 nm (and with packing densities of ∼1010/cm2) and anti-dot arrays with features as small as 600 nm have been realized.

Grazing incidence replica optics for astronomical and laboratory applications

Replica technology was developed for manufacturing numerous low-cost grazing incidence x-ray mirrors for both laboratory and astrophysical experiments. About forty mirrors with apertures between 1.7 and 24 cm have so far been made. The results of tests both at optical and x-ray wavelengths indicate that replica optics is well suited for space and laboratory uses.

The Possibilities of the Use of Replica X-Ray Imaging Mirrors in Plasma Diagnostics

AbstractThe replica technology based on galvanoplastics offers the unique possibility of manufacturing of precise light-weight and low-cost imaging X-ray mirrors having both very small and large apertures of various types (paraboloid-hyperboloid, paraboloid-paraboloid, elipsoid- hyperboloid). Some of the further advantages such as the wide use of X-ray microscopic systems and the possibility to built large arrays of identical optical systems for simultaneous multispectral analysis are discussed together with the presentation of some examples of the manufactured mirrors. The first preliminary results are also presented.