It is of importance to develop the proper decontamination technique for decommissioning of nuclear plant. In this paper, in order to investigate the feasibility of plasma process operated at atmospheric pressure, cold experiments to remove the oxide film deposited on the AISI 304 surface under the BWR condition were carried out. After 4 minutes plasma irradiation, surface changed significantly to be converted into metal fluorides which can be scraped off easily. The removal rate due to fluorination reaction on surface depends strongly on the number density of fluorine atoms in plasma. In our experimental conditions, the maximum removal rate 0.22g-m-2 min-1 was obtained. From these results it is concluded that plasma decontamination method can be feasible.