Evolution of a single graphene layer with disorder generated by remote oxygen plasmairradiation is investigated using atomic force microscopy, Raman spectroscopy andelectrical measurement. Gradual changes of surface morphology from planar graphene toisolated granular structure associated with a decrease of transconductance areaccounted for by two-dimensional percolative conduction by disorder and the oxygenplasma-induced doping effect. The corresponding evolution of Raman spectra of grapheneshows several peculiarities such as a sudden appearance of a saturated D peakfollowed by a linear decrease in its intensity, a relatively inert characteristic of aD′ peak and a monotonic increase of a G peak position as the exposure time to oxygen plasmaincreases. These are discussed in terms of a disorder-induced change of Raman spectra inthe graphite system.