Electrical characteristics and optical emission spectrum of the radio frequency (RF) surface dielectric barrier discharge (SDBD) plasma actuation are investigated experimentally in this paper. Influences of operating pressure, duty cycle and load power on the discharge are analyzed. When the operating pressure reaches 30 kPa, the discharge energy calculated from the Charge–Voltage (Q–V) Lissajous figure increases significantly, while the effective capacitance decreases remarkably. As the duty cycle of the applied voltage increases, the voltage–current waveforms, the area of Q–V loop and the capacity show no distinct changes. Below 40 W, effective capacitance increases with the increase of load power, but it almost remains unchanged when load power is between 40 W and 95 W. The relative intensity changes little as the operating pressure varies from 4 kPa to 100 kPa, while it rises evidently with the pressure below 4 kPa, which indicates that the RF discharge mode shifts from filamentary discharge to glow discharge at around 4 kPa. With the increase of load power, the relative intensity rises evidently. Additionally, the relative intensity is insensitive to the pressure, the duty cycle, and the load power.
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