A new kind of scanning probe microscope is introduced in this paper, which is a combination of atomic force microscope and reflection scanning near field optical microscopy (AF/RSNOM) with equi-amplitude tapping mode. The principle and recent experiment result of AF/RSNOM are reported. Besides convenient operation, the bi-functional probe tip of AF/RSNOM brings an even illumination for every sampling position. Experiment result and analysis show that the signal to noise ratio (SNR) of AF/RSNOM optical image is much better than that of other RSNOM without tapping working mode.
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