This paper presents a novel photocatalysis-assisted mechanical polishing method for cobalt-based alloy cladding layers using TiO2 nanoparticles. By leveraging the active oxygen species generated by the photocatalyst under illuminated conditions, surface oxidation reactions on cobalt-based alloys are initiated, thereby enhancing material removal efficiency. The underlying principles of photocatalytic oxidation are elucidated, particularly the promotion of oxidation by •OH when it interacts with the metal surface, leading to the formation of a CoO oxide film on the cladding layer surface and a subsequent reduction in surface hardness. An experimental platform was established, and research findings identified an etching time of 60 min and a TiO2 concentration of 10 wt% as optimal process parameters. Comparative analysis with pure mechanical polishing and chemical mechanical polishing revealed that photocatalysis-assisted mechanical polishing yielded superior surface roughness of 60 nm and a material removal rate of 63.8 μm/min.
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