Tribological behavior of tribo-pairs is strongly dependent on the surface topography. Further, the structural deformation, manufacturing, and assembly errors cause the hydrostatic thrust pad bearings to tilt slightly. The work in this article is aimed to study the effect of tilt and three-dimensional (3D) surface irregularities on the performance of hydrostatic rectangular thrust pad bearings (HRTPB) compensated with capillary restrictors. The 3D surface irregularities are assumed to follow cosine curve. To perform the analysis, a source code has been developed in MATLAB and the Finite Element Method has been used to solve the governing Reynold's equation. The numerical simulation results indicate that the effect of tilt reduces the value of fluid film reaction, fluid film stiffness, and fluid film damping coefficients. The study reveals that 3D surface irregularities results in a higher value of fluid film stiffness and damping coefficient as compared to that of smooth-bearing surfaces.