A new technique is presented for determining directly the hydrogen concentration near the surface region of solids. We have utilized the detection of α-particles, instead of γ-rays, from the 6.46 MeV 19F resonance nuclear reaction (RNRA) and the elastic recoil detection (ERDA) of hydrogen induced by incident 19F ions simultaneously, to obtain the depth profile of hydrogen in solids. Advantages of this technique include: (1) RNRA can complement the poor depth resolution of ERDA, (2) ERDA can complement the larger time consumption of RNRA, (3) the recoil cross section for hydrogen of 19F-ERDA is in agreement with that of Rutherford scattering.
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