Rayleigh-type Surface Acoustic Waves Research Articles

Guided acoustic waves in thin epitaxial films: Experiment and inverse problem solution for NiTi

Despite the fundamental and technological importance of the elastic constants, a suitable method for their full characterization in epitaxial films is missing. Here we show that transient grating spectroscopy (TGS) with highly k-vector-selective generation and detection of acoustic waves is capable of determination of all independent elastic coefficients of an epitaxial thin film grown on a single-crystalline substrate. This experimental setup enables detection of various types of guided acoustic waves and evaluation of the directional dependence of their speeds of propagation. For the studied model system, which is a 3μm thin epitaxial film of the NiTi shape memory alloy on an MgO substrate, the TGS angular maps include Rayleigh-type surface acoustic waves as well as Sezawa-type and Love-type modes, delivering rich information on the elastic response of the film under different straining modes. The resulting inverse problem, which means the calculation of the elastic constants from the TGS maps, is subsequently solved using the Ritz–Rayleigh numerical method. Using this approach, tetragonal elastic constants of the NiTi film and their changes with the austenite→martensite phase transition are analyzed.

Phonon–magnon conversion using longitudinal leaky surface acoustic waves through magnetoelastic coupling

Surface acoustic waves (SAWs) can transmit magnetization oscillation inside magnetoelastic films in the form of magnetoacoustic waves. If the frequency and wavenumber of SAWs match those of spin waves, magnon excitation can be observed. In this work, we studied the phonon–magnon conversion excited by longitudinal leaky SAWs, which possess the same dominant strain component like Rayleigh-type SAWs but a much higher phase velocity. The measured transmission power absorptions of both SAW modes due to spin wave resonance follow a linear frequency dependence and exhibit a fourfold symmetry. We demonstrate that longitudinal leaky SAWs can serve as a very effective means to excite stronger phonon–magnon coupling than Rayleigh SAWs at a lower wave number.

Forward volume magnetoacoustic spin wave excitation with micron-scale spatial resolution

The interaction between surface acoustic waves (SAWs) and spin waves (SWs) in a piezoelectric-magnetic thin film heterostructure yields potential for the realization of novel microwave devices and applications in magnonics. In the present work, we characterize magnetoacoustic waves in three adjacent magnetic micro-stripes made from CoFe + Ga, CoFe, and CoFe + Pt with a single pair of tapered interdigital transducers (TIDTs). The magnetic micro-stripes were deposited by focused electron beam-induced deposition and focused ion beam-induced deposition direct-writing techniques. The transmission characteristics of the TIDTs are leveraged to selectively address the individual micro-stripes. Here, the external magnetic field is continuously rotated out of the plane of the magnetic thin film and the forward volume SW geometry is probed with the external magnetic field along the film normal. Our experimental findings are well explained by an extended phenomenological model based on a modified Landau–Lifshitz–Gilbert approach that considers SWs with nonzero wave vectors. Magnetoelastic excitation of forward volume SWs is possible because of the vertical shear strain ɛxz of the Rayleigh-type SAW.

Acoustofluidic Stimulation of Functional Immune Cells in a Microreactor.

The cytotoxic response of natural killer (NK) cells in a microreactor to surface acoustic waves (SAWs) is investigated, where the SAWs produce an acoustic streaming flow. The Rayleigh‐type SAWs form by an interdigital transducer propagated along the surface of a piezoelectric substrate in order to allow the dynamic stimulation of functional immune cells in a noncontact and rotor‐free manner. The developed acoustofluidic microreactor enables a dynamic cell culture to be set up in a miniaturized system while maintaining the performance of agitating media. The present SAW system creates acoustic streaming flow in the cylindrical microreactor and applies flow‐induced shear stress to the cells. The suspended NK cells are found to not be damaged by the SAW operation of the adjusted experimental setup. Suspended NK cell aggregates subjected to an SAW treatment show increased intracellular Ca2+ concentrations. Simultaneously treating the NK cells with SAWs and protein kinase C activator enhances the lysosomal protein expressions of the cells and the cell‐mediated cytotoxicity against target tumor cells. These have important implications by showing that acoustically actuated system allows dynamic cell culture without cell damages and further alters cytotoxicity‐related cellular activities.

Topological Surface Acoustic Waves

Topological materials for classical waves, e.g., electromagnetic and acoustic waves, have attracted growing interest, mainly due to the robustness, low loss, and new artificial degree of freedom conferred by their boundaries. Surface acoustic waves (SAWs), as widely used information carriers of microdevice relevance, are ubiquitous in today's wireless communication and sensing networks. Herein, we report the implementation of a SAW topological insulator based on a monolithically integrated platform. By using a miniature acoustic resonator array working tens of megahertz on a piezoelectric half-space, we successfully endow electrically pumped Rayleigh-type SAWs with the ``spin-momentum locking'' feature, enabling solid-state acoustic waves on the ``one-dimensional interface of the two-dimensional surface on the three-dimensional volume'' detour arbitrarily and pass through defects and intersections with much smaller losses than those incurred with any other solutions. These revolutionary topological SAWs may open an avenue for monolithic electronic-(photonic)-phononic circuits with ultrahigh performance and advanced functionalities in, e.g., future mobile communicating, sensing, and quantum-information processing.

Surface acoustic wave attenuation in polycrystals: Numerical modeling using a statistical digital twin of an actual sample

Grain boundary scattering-induced attenuation and phase-velocity dispersion of Rayleigh-type surface acoustic waves are studied with a time-domain finite-element method (FEM). The FEM simulation incorporates a realistic material model based on matching the spatial two-point correlation function of a Laguerre tessellation with that obtained from optical micrographs of a previously studied aluminum sample. Plane surface acoustic waves are excited in a multitude of statistically equivalent virtual polycrystals, and their surface displacement fields are averaged for subsequent extraction of the coherent-wave attenuation coefficient and phase velocity. Comparisons to previous laser-ultrasonic experiments, an analytical mean-field model, and the FEM results show good agreement in a broad frequency range from about 10 to 130MHz. Observed discrepancies between models and measurement reveal the importance of spatial averaging in the context of mean-field approaches and suggest improvement strategies for future experimental studies and advanced analytical models. A different attenuation power law for Rayleigh waves is found in the stochastic scattering regime compared to bulk acoustic waves.

Measurement of coherent surface acoustic wave attenuation in polycrystalline aluminum

Attenuation of Rayleigh-type surface acoustic waves induced by grain-boundary scattering is studied experimentally and theoretically by an effective medium approach. A frequency domain opto-acoustic laboratory setup, capable of measuring a coherent Rayleigh wave response by emulating an ensemble average via spatial averaging, is presented. Measurements are conducted on polycrystalline aluminum at ultrasonic frequencies from 10 MHz to 130 MHz. A constant effective phase velocity of 2893 m s−1 is found below 80 MHz. The effective attenuation coefficient varies in the whole frequency range by nearly two orders of magnitude, and shows classical scattering behavior, comprising stochastic and geometric scattering regimes. A semi-analytical attenuation model is presented, valid below the geometric limit. The model incorporates the material’s spatial two-point correlation function obtained from metallurgical micrographs. Comparisons to experimentally obtained attenuation coefficients show good quantitative agreement, with differences in the frequency power-law dependence. This study attempts to elucidate microstructure induced surface acoustic wave attenuation experimentally by means of a statistical approach. The proposed method and the obtained findings contribute to the understanding of wave propagation in heterogeneous media, and promote the use of surface acoustic waves in non-destructive microstructure characterization.

Propagation properties of leaky surface acoustic wave on water-loaded piezoelectric substrate

To evaluate acoustical loss mainly due to Rayleigh scattering loss of a thin film material using a line-focus-beam ultrasonic material characterization system, surface acoustic waves (SAWs) were excited and detected using IDTs, the propagation properties of SAWs with and without water loading were measured, and the acoustical losses of amorphous SiO2 and Ta2O5 thin films deposited on 128°YX-LiNbO3 were evaluated by subtracting the calculated attenuation of leakage loss into water from the measured propagation loss of leaky SAWs (LSAWs) on water-loaded specimens. The results of the evaluation of acoustical losses using LSAWs with the SAW propagation mode of the small leakage loss were in good agreement with the measured propagation loss of the Rayleigh-type SAW corresponding to the acoustical loss.

Inverse Edelstein effect induced by magnon-phonon coupling

We demonstrate a spin to charge current conversion via magnon-phonon coupling and inverse Edelstein effect on the hybrid device Ni/Cu(Ag)/Bi$_{2}$O$_{3}$. The generation of spin current ($J_{s}\approx 10^{8}A/m^{2}$) due to magnon - phonon coupling reveals the viability of acoustic spin pumping as mechanism for the development of spintronic devices. A full in-plane magnetic field angle dependence of the power absorption and a combination of longitudinal and transverse voltage detection reveals the symmetric and asymmetric components of the inverse Edelstein effect voltage induced by Rayleigh type surface acoustic waves. While the symmetric components are well studied, asymmetric components are widely unexplored. We assign the asymmetric contributions to the interference between longitudinal and shear waves and an anisotropic charge distribution in our hybrid device.

Development of a dual temporal-spatial chirp method for the generation of broadband surface acoustic waves

This study deals with the optimization of transducers for Rayleigh-type Surface Acoustic Waves (SAW) generation. These transducers are based on Interdigital Transducers (IDT) and are specifically developed to characterize properties of thin layers, coatings, and functional surfaces. In order to characterize these coatings and structures, it is necessary to work with wide bandwidths IDT operating in the high frequencies. Therefore, in this study a spatial chirp-based on an IDT are realized for wideband SAW generation. The use of impulse temporal excitation (Dirac-type negative pulse) leads to a wide band emitter excitation but with significantly limited SAW output amplitudes due to the piezoelectric crystal breakdown voltage. This limitation can be circumvented by applying a temporal chirp excitation corresponding in terms of frequency band and duration to the spatial chirp transducer configuration. This dual temporal-spatial chirp method was studied in the 20 to 125 MHz frequency range and allowed to obtain higher SAW displacement amplitudes with an excitation voltage lower than that of the impulse excitation.

Surface waves in granular phononic crystals.

The existence of surface elastic waves at a mechanically free surface of granular phononic crystals is studied. The granular phononic crystals are made of spherical particles distributed periodically on a simple cubic lattice. It is assumed that the particles are interacting by means of normal, shear, and bending contact rigidities. First, Rayleigh-type surface acoustic waves, where the displacement of the particles takes place in the sagittal plane while the particles possess one rotational and two translational degrees of freedom, are analyzed. Second, shear-horizontal-type waves, where the displacement of the particles is normal to the sagittal plane while the particles possess one translational and two rotational degrees of freedom are studied. The existence of zero-group-velocity surface acoustic waves of Rayleigh type is theoretically predicted and interpreted. A comparison with surface waves predicted by the reduced Cosserat theory is performed, and some limitations of the latter are established.

Study on the electromechanical coupling coefficient of Rayleigh-type surface acoustic waves in semi-infinite piezoelectrics/non-piezoelectrics superlattices

The electromechanical coupling coefficient of Rayleigh-type surface acoustic waves in semi-infinite piezoelectrics/non-piezoelectrics superlattices is investigated by the transfer matrix method. Research results show the high electromechanical coupling coefficient can be obtained in these systems. The optimization design of it is also discussed fully. It is significantly influenced by electrical boundary conditions on interfaces, thickness ratios of piezoelectric and non-piezoelectric layers, and material parameters (such as velocities of pure longitudinal and transversal bulk waves in non-piezoelectric layers). In order to obtain higher electromechanical coupling coefficient, shorted interfaces, non-piezoelectric materials with large velocities of longitudinal and transversal bulk waves, and proper thickness ratios should be chosen.

Integrated active mixing and biosensing using surface acoustic waves (SAW) and surface plasmon resonance (SPR) on a common substrate

This article presents a device incorporating surface plasmon resonance (SPR) sensing and surface acoustic wave (SAW) actuation integrated onto a common LiNbO(3) piezoelectric substrate. The device uses Rayleigh-type SAW to provide active microfluidic mixing in the fluid above the SPR sensor. Validation experiments show that SAW-induced microfluidic mixing results in accelerated binding kinetics of an avidin-biotin assay. Results also show that, though SAW action causes a parasitic SPR response due to heat injection into the fluid, a relatively brief relaxation time following the SAW pulses allows the effect to dissipate, without affecting the overall assay response. Since both SPR sensors and SAW transducers can be fabricated simultaneously using low-cost microfabrication methods on a single substrate, the proposed design is well-suited to lab-on-chip applications.

Planar-Integrated Optics and Microfluidics for Lab-on-a-Chip Systems

A planar integration platform for lab-on-a-chip systems is proposed. It evolves from planar-integrated free-space optics and includes planar microfluidics. Optical systems are folded into transparent wafers and can be fabricated with mask-based techniques. Fluidic actuation is achieved electroacoustically by means of Rayleigh-type surface acoustic waves that are generated with interdigital transducers on a piezoelectric wafer. Simple proof-of-principle demonstrators were constructed and experimentally tested. They contain a ring-shaped flow channel in which an arbitrary fluid can be set into circulation, and integrated free-space optical systems for microscopic brightfield and darkfield illumination, respectively. As piezoelectric material 128° y-cut LiNbO3 was used, the flow channel and the optical functions were realized in poly(methyl methacrylate) (PMMA).

Surface acoustic wave generation in ZX-cut LiNbO3 superlattices using coplanar electrodes

We report on a configuration to generate surface acoustic waves (SAWs) in acoustic superlattices based on ZX-cut periodically poled lithium niobate. The coplanar electrode configuration allows inducing Rayleigh type SAWs with the elastic energy mainly concentrated in between the electrodes gap and under the crystal surface. With respect to standard interdigitated transducers using the same crystal orientation, the efficiency of the SAW generation in the proposed designs are similar, while, for the same grating period, the resonance frequency that can be achieved is two times larger.

Nonlinear surface acoustic waves: Theory

A theoretical description is given for the propagation of surface acoustic wave pulses in anisotropic elastic media subject to the influence of nonlinearity. On the basis of nonlinear elasticity theory, an evolution equation is presented for the surface slope or the longitudinal surface velocity associated with an acoustic pulse. It contains a non-local nonlinearity, characterized by a kernel that strongly varies from one propagation geometry to another due to the anisotropy of the substrate. It governs pulse shape evolution in homogeneous halfspaces and the shapes of solitary surface pulses that exist in coated substrates. The theory describing nonlinear Rayleigh-type surface acoustic waves is extended in a straightforward way to surface waves that are localized at a one-dimensional acoustic waveguide like elastic wedges.

Stresses and displacements for some Rayleigh-type surface acoustic waves propagating on an anisotropic half space

Specific relations between mechanical displacements and stresses for Rayleigh-type surface acoustic waves propagating on an anisotropic half space are demonstrated. For 16 symmetry configurations belonging to the orthorhombic, tetragonal, hexagonal and cubic systems, involving only two displacement and stress components, it is shown that the ratio between the shear and normal stresses inside the propagation media is equal to the ratio between the normal and in-plane displacement components at the free surface. This result generalizes the previous one obtained in the case of an isotropic solid [W. Hassan and P. B. Nagy, J. Acoust. Soc. Am. 104, 3107-3110 (1998)].

Evaluation of mass-produced commercial LiTaO/sub 3/ single crystals using the LFB ultrasonic material characterization system

A mass-production line of lithium tantalate (LiTaO3) crystals with a maximum charge number of 60 for surface acoustic wave (SAW) devices was evaluated with the line-focus-beam (LFB) ultrasonic material characterization system. Some serious problems associated with chemical compositions were observed and resolved by measuring the velocities of Rayleigh-type leaky surface acoustic waves (LSAWs), VLSAW, for two groups of LiTaO3 wafers: 21 36 degrees Y X-LiTaO3 wafers selected randomly from crystal ingots grown with different charge numbers in different furnaces, and 14 42 degrees Y X-LiTaO3 wafers obtained at the top, middle, and bottom parts from 5 crystals selected from 39 crystals grown successively in the same furnace and crucible. Using the measured VLSAW and the predetermined relationship between VLSAW and Li2O concentrations, M(Li2O), we estimated the average M(Li2O) controlled in the current mass-production line to be about 48.77 mol% with a maximum difference of 0.75 mol%. The composition for each crystal ingot increased linearly about 0.04 mol% from the top to the bottom, and no dependence on the charge number was observed, as the melt composition used for the mass production was controlled through Curie temperature (TC) measurements. A nearly true congruent composition of 48.49 Li2O-mol% was obtained through the precise VLSAW data for the 42 degrees Y X-LiTaO3 wafers, that was about 0.3 mol% less than the melt composition in the production line. It was also pointed out that the TC measurement conditions, including room temperatures surrounding the measurement systems, should be re-examined for reliable production control. A guideline for more efficient mass production of the crystals has been established concerning the true congruent composition as the starting material.

Calibration of Curie temperatures for LiTaO/sub 3/ single crystals by the LFB ultrasonic material characterization system

The line-focus-beam ultrasonic material characterization (LFB-UMC) system is applied to a standardized comparison and evaluation of the Curie temperatures, T/sub C/, exclusively used in evaluating the chemical compositions of commercial LiTaO/sub 3/ crystals by measuring the velocities of Rayleigh-type leaky surface acoustic waves (LSAWs), V/sub LSAW/. We measured V/sub LSAW/ and T/sub C/ (standardized) under the same T/sub C/ measurement conditions for 36/spl deg/Y X-LiTaO/sub 3/ single-crystal wafers produced by four manufacturers and related the results to the T/sub C/ (individual) measured by the individual manufacturers. The relationships between V/sub LSAW/ and T/sub C/ (individual) varied from one company to another, and a single straight line of the proportional relationship between V/sub LSAW/ and T/sub C/ (standardized) was obtained for all wafers regardless of the manufacturer. These experimental results clarify that the problem associated with T/sub C/ measurements lies in the measurement conditions and the absolute accuracy of the measurement instruments. Measurements of the center frequencies of SH-type surface acoustic wave (SAW) filter devices are compared with V/sub LSAW/ measurements. A method of calibrating T/sub C/ using this ultrasonic system is proposed to establish standardized specifications of SAW-device crystal wafers.

Development of the line-focus-beam ultrasonic material characterization system.

A line-focus-beam ultrasonic material characterization (LFB-UMC) system has been developed to evaluate large diameter crystals and wafers currently used in electronic devices. The system enables highly accurate detection of slight changes in the physical and chemical properties in and among specimens. Material characterization proceeds by measuring the propagation characteristics, viz., phase velocity and attenuation, of Rayleigh-type leaky surface acoustic waves (LSAWs) excited on the water-loaded specimen surface. The measurement accuracy depends mainly upon the translation accuracy of the mechanical stages used in the system and the stability of the temperature environment. New precision mechanical translation stages have been developed, and the mechanical system, including the ultrasonic device and the specimen, has been installed in a temperature-controlled chamber to reduce thermal convection and conduction at the specimen. A method for precisely measuring temperature and longitudinal velocity in the water couplant has been developed, and a measurement procedure for precisely measuring the LSAW velocities has been completed, achieving greater relative accuracy to better than +/- 0.002% at any single chosen point and +/- 0.004% for two-dimensional measurements over a scanning area of a 200-mm diameter silicon single-crystal substrate. The system was developed to address various problems arising in science and industry associated with the development of materials and device fabrication processes.