YBa 2Cu 3O 7− δ (YBCO) ramp-edge Josephson junctions have been fabricated by pulsed laser deposition (PLD) with a relatively high deposition rate (∼50 nm/min). 200 nm thick YBCO films deposited on LaSrAlTaO x (LSAT) substrates in a PLD system with laser-beam scanning exhibited a typical T c of 88∼90.5 K. LSAT/YBCO bilayers were fabricated and then patterned to form a ramp structure. Electron cyclotron resonance ion bombardment and subsequent annealing in a various atmosphere were employed to form an amorphous layer and a recrystallized barrier layer on the ramp surface. Junction properties strongly depend on distance between the sample and the laser plume when upper layer YBCO is deposited. The junctions fabricated under optimum conditions exhibited resistively and capacitively shunted junction-like I– V curves with a typical I c R n product at 4.2 K of 1.0∼3.2 mV.
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