The initial stages of growth of noble metals deposited onto untreated as well as Ar + beam-treated polymer surfaces were investigated by means of X-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM), and radiotracer methods. Condensation coefficients C of the metals on the polymer surfaces were determined by comparison of the XPS signals of the metals with the nominal thicknesses measured by a quartz microbalance during deposition. These measurements were combined with radiotracer measurements, which allow to determine C independently with high accuracy and sensitivity. C was found to depend strongly on the chemical composition of the polymer surface, e.g., at room temperature, C varies between 0.95 for PMDA-ODA polyimide and 0.002 for Teflon AF. By ion beam treatment of the latter, C was raised considerably. During nucleation of the metal on the polymer surface, C increases strongly with metal coverage. C also depends on the deposition rate of the metal and decreases strongly at elevated temperatures.