Radio Frequency Voltage Research Articles

Monitoring Ion Energy Distribution in Capacitively Coupled Plasmas Using Non-invasive Radio-Frequency Voltage Measurements

A non-invasive method for ion energy distribution measurement at a RF biased surface is proposed for monitoring the property of ion bombardments in capacitively coupled plasma sources. To obtain the ion energy distribution, the measured electrode voltage is analyzed based on the circuit model which is developed with the linearized sheath capacitance on the assumption that the RF driven sheath behaves like a simple diode for a bias power whose frequency is much lower than the ion plasma frequency. The method is verified by comparing the ion energy distribution function obtained from the proposed model with the experimental result taken from the ion energy analyzer in a dual cathode capacitively coupled plasma source driven by a 100 MHz source power and a 400 kHz bias power.

A Wireless-Powered IR-UWB Transmitter for Long-Range Passive RFID Tags in 90-nm CMOS

An impulse radio ultrawideband (IR-UWB) transmitter (TX) intended for long-range passive radio-frequency (RF) identification tags is presented. It is wirelessly powered by an ultrahigh-frequency (UHF) signal. A 128-bit pseudonoise code is transmitted when enough energy is harvested. A new on-off-keying multicycle energy-efficient IR-UWB pulse generator (PG) is proposed, and a co-design with power management circuits is introduced to improve the system supply noise performance. A novel injection-locking divider co-designed with an RF voltage rectifier is proposed to eliminate the injection input resistive load that exists in some designs; otherwise, the input sensitivity would be degraded. A proof-of-concept prototype is fabricated in a TSMC 90-nm CMOS process. Measurements show the TX input sensitivity to be approximately -17.5 dBm with a 900-MHz UHF input. The measured PG output swing is 195 mV <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">p-p</sub> with a -10 dB bandwidth of approximately 3.4 GHz.

Effect of Radio-Frequency and Low-Frequency Bias Voltage on the Formation of Amorphous Carbon Films Deposited by Plasma Enhanced Chemical Vapor Deposition

The effect of radio-frequency (RF) or low-frequency (LF) bias voltage on the formation of amorphous hydrogenated carbon (a-C:H) films was studied on silicon substrates with a low methane (CH4) concentration (2–10 vol.%) in CH4+Ar mixtures. The bias substrate was applied either by RF (13.56 MHz) or by LF (150 kHz) power supply. The highest hardness values (∼18–22 GPa) with lower hydrogen content in the films (∼20 at.%) deposited at 10 vol.% CH4, was achieved by using the RF bias. However, the films deposited using the LF bias, under similar RF plasma generation power and CH4 concentration (50 W and 10 vol.%, respectively), displayed lower hardness (∼6–12 GPa) with high hydrogen content (∼40 at.%). The structures analyzed by Fourier Transform Infrared (FTIR) and Raman scattering measurements provide an indication of trans-polyacetylene structure formation. However, its excessive formation in the films deposited by the LF bias method is consistent with its higher bonded hydrogen concentration and low level of hardness, as compared to the film prepared by the RF bias method. It was found that the effect of RF bias on the film structure and properties is stronger than the effect of the low-frequency (LF) bias under identical radio-frequency (RF) powered electrode and identical PECVD (plasma enhanced chemical vapor deposition) system configuration.

A micropixelated ion-imaging detector for mass resolution enhancement of a QMS instrument.

An in-vacuum position-sensitive micropixelated detector (Timepix) is used to investigate the time-dependent spatial distribution of different charge state (and hence different mass-to-charge (m/z)) ions exiting an electrospray ionization (ESI)-based quadrupole mass spectrometer (QMS) instrument. Ion images obtained from the Timepix detector provide a detailed insight into the positions of stable and unstable ions of the mass peak as they exit the QMS. With the help of image processing algorithms and by selecting areas on the ion images where more stable ions impact the detector, an improvement in mass resolution by a factor of 5 was obtained for certain operating conditions. Moreover, our experimental approach of mass resolution enhancement was confirmed by in-house-developed novel QMS instrument simulation software. Utilizing the imaging-based mass resolution enhancement approach, the software predicts instrument mass resolution of ∼1,0000 for a single-filter QMS instrument with a 210-mm long mass filter and a low operating frequency (880kHz) of the radio frequency (RF) voltage.

Embedded Capacitive Filter Units in LTCC for the Protection of Active Implantable Medical Devices

We investigate the compact integration of passive capacitive filter units embedded in low-temperature cofired ceramics for active implantable medical devices. The goal lies in avoiding volume consumption by large passive components and to achieve a miniaturized integration of filters for the reduction of induced radio frequency currents and voltages during magnetic resonance imaging. Embedding such filter units inside the substrates carrying the electronics can be a promising solution for implants to allow higher channel densities with only a marginal increase in implant's size. By combining laser ablation and screen printing manufacturing technologies, we investigated a fabrication process for multilevel ceramic capacitors (MLCCs) in low temperature co-fired ceramic (LTCC) substrates resulting in mean capacitances of 220 pF, (10 × 0.4 × 0.62 mm3) with a dissipation factor of 0.42% and a breakdown voltage of 500 V. Dissolution of the material during accelerated aging tests however raises concerns over its biostability and biocompatibility during chronic implantation and needs further testing.

A modified model of helical resonator with predictable loaded resonant frequency and Q-factor.

High voltage radio frequency (RF) supply is a critical part in an ion trapping system. The RF supply should have high Q-factor and relatively high driving frequency. A frequently used RF supply for an ion trap system is a helical resonator. In certain applications, it is advantageous to have a predictable resonant frequency and Q-factor when the helical resonator is connected to a capacitive load. We develop a model to describe the behavior of a helical resonator with capacitive load. With this model, we can correctly predict the loaded resonant frequency and the loaded Q-factor. To test our prediction, we construct a helical resonator, and measure its resonant frequencies and Q-factors under different capacitive loads. The experimental results agree with our prediction.

Multipactor Effect in a Parallel-Plate Waveguide Partially Filled With Magnetized Ferrite

The aim of this paper is the analysis of the multipactor effect in a parallel-plate waveguide when a ferrite slab, transversally magnetized by a static magnetic field parallel to the waveguide walls, is present. Employing an in-house developed code, numerical simulations are performed to predict the multipactor radio frequency voltage threshold in such a ferrite-loaded waveguide. Variations of the ferrite magnetization field strength and the ferrite slab height are analyzed. Effective electron trajectories are also shown for a better understanding of the breakdown phenomenon, finding different multipactor regimes.

A Linear Radio Frequency Field Intensity Meter

In this paper the construction of a linear and stable signal strength meter is described for accurate study of radio signal strengths. A simple d.c. amlplifier has been designed for being used along with a communication receiver. Type BC 348 Q. Overlapping linear ranges are provided in this meter enabling comparison of readings taken on successive ranges. The calibration curves are linear in the range of variation usually met with. A suitable micro ammeter of range 0-60 microampere A with 60 divisions is used as an indicator. This instrument measures radio frequency voltages from 5 microvolts to more than 1.5 volts. The error in measurement of varying radio fields is less than 10% for recorded observations and less than 15% for visual observations. The modification of this circuit for actuating a pen and ink recorded is also described. This instrument can also be used as an r.f.. microvoltmeter.

Two-dimensional electron gases in strained quantum wells for AlN/GaN/AlN double heterostructure field-effect transistors on AlN

Double heterostructures of strained GaN quantum wells (QWs) sandwiched between relaxed AlN layers provide a platform to investigate the quantum-confined electronic and optical properties of the wells. The growth of AlN/GaN/AlN heterostructures with varying GaN quantum well thicknesses on AlN by plasma molecular beam epitaxy (MBE) is reported. Photoluminescence spectra provide the optical signature of the thin GaN QWs. Reciprocal space mapping in X-ray diffraction shows that a GaN layer as thick as ∼28 nm is compressively strained to the AlN layer underneath. The density of the polarization-induced two-dimensional electron gas (2DEG) in the undoped heterostructures increases with the GaN QW thickness, reaching ∼2.5 × 1013/cm2. This provides a way to tune the 2DEG channel density without changing the thickness of the top barrier layer. Electron mobilities less than ∼400 cm2/Vs are observed, leaving ample room for improvement. Nevertheless, owing to the high 2DEG density, strained GaN QW field-effect transistors with MBE regrown ohmic contacts exhibit an on-current density ∼1.4 A/mm, a transconductance ∼280 mS/mm, and a cut off frequency fT∼104 GHz for a 100-nm-gate-length device. These observations indicate high potential for high-speed radio frequency and high voltage applications that stand to benefit from the extreme-bandgap and high thermal conductivity of AlN.

A radio-frequency sheath model for complex waveforms

Plasma sheaths driven by radio-frequency voltages occur in contexts ranging from plasma processing to magnetically confined fusion experiments. An analytical understanding of such sheaths is therefore important, both intrinsically and as an element in more elaborate theoretical structures. Radio-frequency sheaths are commonly excited by highly anharmonic waveforms, but no analytical model exists for this general case. We present a mathematically simple sheath model that is in good agreement with earlier models for single frequency excitation, yet can be solved for arbitrary excitation waveforms. As examples, we discuss dual-frequency and pulse-like waveforms. The model employs the ansatz that the time-averaged electron density is a constant fraction of the ion density. In the cases we discuss, the error introduced by this approximation is small, and in general it can be quantified through an internal consistency condition of the model. This simple and accurate model is likely to have wide application.

An RF-induced voltage sensor for investigating pacemaker safety in MRI

Magnetic resonance imaging (MRI) is inadvisable for patients with pacemakers, as radiofrequency (RF) voltages induced in the pacemaker leads may cause the device to malfunction. Our goal is to develop a sensor to measure such RF-induced voltages during MRI safety tests. A sensor was designed (16.6 cm(2)) for measuring voltages at the connection between the pacemaker lead and its case. The induced voltage is demodulated, digitized, and transferred by optical fibres. The sensor was calibrated on the bench using RF pulses of known amplitude and duration. Then the sensor was tested during MRI scanning at 1.5 T in a saline gel filled phantom. Bench tests showed measurement errors below 5% with a (-40 V; +40 V) range, a precision of 0.06 V, and a temporal resolution of 24.2 μs. In MRI tests, variability in the measured voltages was below 3.7% for 996 measurements with different sensors and RF exposure. Coupling between the sensor and the MRI electromagnetic environment was estimated with a second sensor connected and was below 6.2%. For a typical clinical MRI sequence, voltages around ten Vp were detected. We have built an accurate and reproducible tool for measuring RF-induced voltages in pacemaker leads during MR safety investigations. The sensor might also be used with other conducting cables including those used for electrocardiography and neurostimulation.

How far can ion trap miniaturization go? Parameter scaling and space‐charge limits for very small cylindrical ion traps

A broad effort is underway to make radiofrequency (RF) ion trap mass spectrometers small enough for portable chemical analysis. A variety of trap geometries and fabrication approaches are under development from several research groups. A common issue is the reduced trapping capacity in smaller traps, with the associated reduction in sensitivity. This article explores the key variables that scale with trap size including RF voltage, frequency, electrical capacitance, power and pseudopotential well depth. High-field electric breakdown constrains the maximum RF voltages used in smaller ion traps. Simulations show the effects of space charge and the limits of trapping capacity as a function of trap dimensions for cylindrical ion traps down to the micrometer level. RF amplitudes that scale as the 1/3, 1/2 and 2/3 power of trap radius, r0, were studied. At a fixed level of performance, the number of analyzable ions scales as r0(n), with n ranging from 1.55 to 1.75 depending on the choice of voltage scaling. The implications for miniaturized ion trap mass spectrometry are discussed.

Design of a surface electrode trap for parallel ion strings

We report a linear surface-electrode trap that can be used to form parallel ion strings. By adjusting the balance of the radio-frequency (RF) voltages applied to central and RF electrodes, the RF pseudopotential can be varied from single-well to double-well in the radial direction. Ions located on two parallel lines of the RF potential null are in principle free from excess micromotion if appropriate static voltages are applied. Calcium ions were trapped for the evaluation of the designed electrode. An ion string in the single-well potential and two ion strings in the double-well potential were observed by changing the RF voltages. Such traps could be used for quantum simulation of coupled spin systems.

The temperature field simulation of radiofrequency catheter-based renal sympathetic denervation for resistant hypertension

Renal sympathetic denervation (RSD) by the radiofrequency ablation was used to treat the resistant hypertension in clinic and has achieved curative effect. But the temperature distribution in the artery walls and the blood flow have not been investigated. Finite element method (FEM) based on Comsol Multiphysics 4.3a software was used to simulate the temperature distribution in the renal artery. The results of renal artery temperature distribution as well as blood flow effect on the temperature field were obtained, which demonstrated that the blood velocity is very crucial in the temperature distribution of blood vessel near antenna. When the speed of blood is 0.4 m/s, the highest temperature rise of arterial wall near the antenna is 8.882°C (37°C to 45.882°C) and contralateral artery wall's highest temperature rise is about 5°C (37°C to 42°C). This temperature value can damage renal sympathetic nerves to cure the resistant hypertension. Due to the blood flow, the temperature field stretches to the direction of blood flow. The temperature rise of blood is only in a small range (37°C to 41°C) at both ends of the antenna. The simulation of RSD by the radiofrequency ablation can give doctors a better scheme to avoid the vascular injury in different blood flow rates and radiofrequency voltages.

Detection of 1,4-dioxane in water by membrane extraction-gas chromiatgraphy/differential mobility spectrometry

The method of detecting trace 1,4-dioxane in water using membrane extraction coupled with gas chromatography/differential mobility spectrometry (GC/DMS) was developed. The parameters including radio frequency voltage, sampling flow rate, permeation time and trapping time were optimized to 1000 V, 50 mL/min, 30 min and 150 s, respectively. The linear range for dioxane was obtained from 2.0 μg/L to 20.0 μg/L. The LOD was found to be 0. 67 μg/L. The specificity towards 1,4-dioxane in the presence of five chlorinated hydrocarbons was improved by using two-dimensional GC separation with optimized DMS compensation voltage. This method paves a way for developing field-deployable sensors for real-time monitoring contaminants in groundwater.

Numerical Modeling of an RF Argon–Silane Plasma with Dust Particle Nucleation and Growth

A one-dimensional numerical model and simulation results are presented for a capacitively-coupled radio frequency parallel-plate argon-silane dusty plasma. The model includes self-consistently coupled numerical modules, including a plasma fluid model, a sectional aerosol model, and a simple chemistry model to predict rates of particle nucle- ation and surface growth. Operating conditions considered include 13.56 MHz frequency, 100 mTorr pressure, a 4-cm electrode gap, gas flow through the top electrode with a 30:1 ratio of argon to silane, and applied radio frequency voltage amplitude of either 100 or 250 V. In the higher voltage case two lobes of relatively large particles are formed by ion drag, while fresh nucleation occurs in the void between these lobes. It is shown that the reason that fresh nucleation occurs in the void involves an interplay among several coupled phenomena, including nanoparticle transport, the plasma potential profile, and trapping of silicon hydride anions that drive nucleation in this system.

Characterization of low-pressure microwave and radio frequency discharges in oxygen applying optical emission spectroscopy and multipole resonance probe

Optical emission spectroscopy (OES) and multipole resonance probe (MRP) are adopted to characterize low-pressure microwave (MW) and radio frequency (RF) discharges in oxygen. In this context, both discharges are usually applied for the deposition of permeation barrier SiOx films on plastic foils or the inner surface of plastic bottles. For technological reasons the MW excitation is modulated and a continuous wave (cw) RF bias is used. The RF voltage produces a stationary low-density plasma, whereas the high-density MW discharge is pulsed. For the optimization of deposition process and the quality of the deposited barrier films, plasma conditions are characterized using OES and MRP. To simplify the comparison of applied diagnostics, both MW and RF discharges are studied separately in cw mode. The OES and MRP diagnostic methods complement each other and provide reliable information about electron density and electron temperature. In the MW case, electron density amounts to ne = (1.25 ± 0.26) × 1017 m−3, and kTe to 1.93 ± 0.20 eV, in the RF case ne = (6.8 ± 1.8)×1015 m−3 and kTe = 2.6 ± 0.35 eV. The corresponding gas temperatures are 760±40 K and 440±20 K.

7th International Symposium on Enabling Technologies for Life Sciences (ETP)

7^th International Symposium on Enabling Technologies for Life Sciences (ETP)

Surface discharge plasma actuator driven by a pulsed 13.56 MHz–5 kHz voltage waveform

The effect of incorporating pulses of radio-frequency (rf: 13.56 MHz) voltage into the driving waveform of a surface discharge plasma actuator is investigated. Rf voltage is applied to the actuator to increase the production of ions and thereby increase the thrust that is generated by the discharge. This waveform is coupled to the powered electrode in 5 µs pulses and combined with a relatively low-frequency (LF) 5 kHz sinusoid to form a pulsed 13.56 MHz–5 kHz (rf-LF) driving voltage. Measurements of the applied voltage, rf and LF currents, effective power, and velocity field of the surrounding air are undertaken at atmospheric pressure. The thrust that is generated using the rf-LF waveform is estimated from the velocity fields using a momentum balance and is found to increase for increasing rf voltage when the LF voltage remains constant. Maximum thrust is achieved when the rf pulses are positioned at the LF voltage minima and this suggests the importance of negative ions. The efficacy of rf-LF actuation is investigated by comparing the thrust that is generated per unit increase in peak voltage with that obtained using an LF-driven discharge.

Fabrication of Amorphous Silicon Carbide Films from Decomposition of Tetramethylsilane using ECR plasma of Ar

Mechanically-hard hydrogenated amorphous silicon carbide (a-SiCx:H) films were formed from the decomposition of Si(CH3)4 using the electron-cyclotron resonance plasma flow of Ar. An external radio-frequency (RF) voltage was applied to the substrate with the negative self-bias voltage (−VRF) of 0–100 V. Compositional analysis was made with a combination of Rutherford backscattering and elastic recoil detection analysis. The C/Si ratios of films were 2.2–2.7. Film hardness was measured with a nano-indentation testing equipment. Chemical bonding was analyzed using carbon-K near edge X-ray absorption fine structure (C-K NEXAFS) spectroscopy using an accelerator NewSUBARU. The peak-fitting analysis of the C-K NEXAFS spectra yielded the sp2/(sp2+sp3) ratios, being fully correlated with film hardness. With supported by the IR and Raman spectroscopic measurements, the change of the chemical structure induced by −VRF was discussed.