Q-factor Of Resonator Research Articles

High-Q fano resonance metasurface sensor for refractive index and methane gas concentration measurement

High-quality-factor Fano resonances excited by metasurfaces have been playing an important role in the field of optical sensing. A high-performance sensor for refractive index and methane concentration measurement is designed and prepared in this paper. The symmetry of the structure is broken by altering the size of the rectangular holes in the tetramer, resulting fano resonance Q-factor of 34176 and modulation depth of 100%. The finite-difference time-domain (FDTD) method is used to simulate the structure. The results show that the refractive index and methane concentration sensitivity are 325 nm/RIU and −1.44 nm/%, respectively. The FOM can achieve 10156 RIU−1. Furthermore, experiments are carried out on the gas application of the structure and the sensitivity of methane concentration is −1.03 nm/%. Therefore, the proposed metasurface has more practical and feasible significance in background refractive index and gas environment monitoring.

Research on sensing characteristics of high Q-factor all-dielectric metasurfaces based on geometric breaking

The bound states in the continuum (BIC) are widely used in designing metamaterials with high quality factor (Q-factor) resonances due to their perfect localization in the continuous spectral range coexisting with expanding waves. In this study, a T-shaped nanohole all-dielectric metasurface structure is proposed based on the unique electromagnetic properties of all-dielectric metasurfaces, and the fundamental reason of its coupled state and the theoretical basis of BIC excitation are deeply investigated based on the theory of group theory, and the geometric symmetry is broken from multiple angles, and the coupling relationship between discrete eigenmodes and the external continuum is specifically analyzed during the change of symmetry, its spectral response and near-field distribution are numerically calculated. In addition, based on the modulation mechanism of the incident light polarization angle, the three-channel resonance tuning with two resonances of the same frequency and one of a different frequency is realized under the condition that the resonance position and the Q-factor are not affected. This study not only provides a theoretical basis for the excitation conditions and evolution regularity of symmetry-protected BIC, but also solves the problem in the traditional analysis of resonance phenomena without taking the high Q-factor and stability into account, which can provide new designing methods for optical metasurface devices with multi-channel resonance.

Sensing and frequency selecting with toroidal resonance in metasurface

A double M-shaped metasurface is proposed and produced to realize a high Q-factor resonance at 13 GHz. The numerical and experimental results show that the high Q excitation of the structure is caused by the strong toroidal dipole. The novel toroidal metasurface can be a refractive index sensor with a high sensitivity of 3.2 GHzRIU−1. In addition, the double layer metasurface can achieve frequency selection with a bandwidth of 0.27 GHz. The proposed metasurface further extends the application of toroidal dipole in the field of sensing, frequency selective surface and so on.

A mechanically coupled MEMS filter with high-Q width extensional mode resonators

This work presents a novel radio frequency (RF) narrowband Si micro-electro-mechanical systems (MEMS) filter based on capacitively transduced slotted width extensional mode (WEM) resonators. The flexibility of the plate leads to multiple modes near the target frequency. The high Q-factor resonators of around 100 000 enable narrow bandwidth filters with small size and simplified design. The 1-wavelength and 2-wavelength WEMs were first developed as a pair of coupled modes to form a passband. To reduce bandwidth, two plates are coupled with a λ-length coupling beam. The 79.69 MHz coupled plate filter (CPF) achieved a narrow bandwidth of 8.8 kHz, corresponding to a tiny 0.011%. The CPF exhibits an impressive 34.84 dB stopband rejection and 7.82 dB insertion loss with near-zero passband ripple. In summary, the RF MEMS filter presented in this work shows promising potential for application in RF transceiver front-ends.

Gallium arsenide octave-bandwidth microwave voltage-controlled oscillator having discrete varicap

Modern reconfigurable communication systems demand microwave voltage-controlled oscillators (VCOs) possessing an octave-wide bandwidth. Many advanced applications require also a low phase noise and a low current consumption for such VCOs. To meet an octave-bandwidth specification in combination with a low phase noise and a low current consumption it is desirable to implement a microwave monolithic integrated circuit (MMIC) technology. In-house gallium arsenide (GaAs) MMIC technology is implemented to build VCOs in this work. At the same time, in order to achieve a high-Q wide frequency tuning range, we implemented also a discrete variable capacitance diode (varicap). The discrete varicap is stacked above MMIC oscillator chip. A vertical design structure of the discrete varicap guarantees a high overlap capacitance ratio (K>20) along with reduced affect of the parasitic reactance. A high overlap capacitance ratio is needed for an octave-wide frequency tuning, while reduced affect of the parasitic reactance increases Q-factor of the VCO resonator. Hence, a sequential integration of the discrete varicap over monolithic oscillator chip resolves referred tough challenges in the design of VCO. Integrated VCO is finally packaged as a surface-mount device (SMD). At that SMD ceramic package is sealed with the metal lid. The oscillator circuitry is based on the conventional negative resistance approach with a positive feedback realized by common-source capacitance. An active element of the oscillator is a pseudomorphic high electron-mobility transistor (pHEMT). The gate length of a transistor is 0.15 µm. The width of the gate varies from 240 µm to 360 µm depending on working frequencies of the VCO. The varicap is built on the GaAs epitaxial heterostructure having customized gradient doping profile with abrupt junction. Nonlinear behavioral model of the varicap is extracted from the diode measurements and is further used for VCO simulation. Two types of VCO have been designed, fabricated and tested. First (second) type of VCO provides a tuning range from 5 to 10 GHz (from 10 GHz to 20 GHz), respectively. The measurement results demonstrate an output power of 3.9 dBm; a current consumption of 30 mA at a supply voltage of 5 V; a phase noise of minus 90 dBc/Hz at 100 kHz offset (minus 85 dBc/Hz at 100 kHz offset) for the first (second) type of VCO, respectively.

Tuning dissipation dilution in 2D material resonators by MEMS-induced tension

Resonators based on two-dimensional (2D) materials have exceptional properties for application as nanomechanical sensors, which allows them to operate at high frequencies with high sensitivity. However, their performance as nanomechanical sensors is currently limited by their low quality (Q)-factor. Here, we make use of micro-electromechanical systems (MEMS) to apply pure in-plane mechanical strain, enhancing both their resonance frequency and Q-factor. In contrast to earlier work, the 2D material resonators are fabricated on the MEMS actuators without any wet processing steps using a dry-transfer method. A platinum clamp, which is deposited by electron beam-induced deposition, is shown to be effective in fixing the 2D membrane to the MEMS and preventing slippage. By in-plane straining the membranes in a purely mechanical fashion, we increase the tensile energy, thereby diluting dissipation. This way, we show how dissipation dilution can increase the Q-factor of 2D material resonators by 91%. The presented MEMS actuated dissipation dilution method does not only pave the way toward higher Q-factors in resonators based on 2D materials, but also provides a route toward studies of the intrinsic loss mechanisms of 2D materials in the monolayer limit.

Multi-mode coupling in a H-shaped metamaterial structure in terahertz frequency

Mode coupling can not only effectively control the frequency, amplitude and linewidth of the transmission spectrum, but also improve the Q-factor of the spectrum. Herein, we propose a H-shaped metamaterial, in which the dipole mode, LC mode and lattice mode can be excited selectively, and each mode frequency can be independently tuned by changing the polarization of incident THz wave as well as the lattice constant of the metamaterial structure, thus allowing greater degrees of freedom to customize the polarization components of different properties in the system. Under different polarization directions, the strong coupling between the lattice mode and the inductance-capacitance (LC) mode as well as the lattice mode and the dipole mode is realized, which makes the transmission resonance Q-factor of the hybrid state increase to 8 times that of the single resonance state, and the obvious anti-crossing phenomenon is observed. In addition, the LC mode and the dipole mode can be excited simultaneously, and the coupling between these two modes successfully excites a bound states in the continuum with an infinite Q-factor.

Ultra-high Q-factor quasi-BIC BaTiO3 metasurface for electro-optic modulation

Metasurfaces play a crucial role in trapping electromagnetic waves with specific wavelengths, serving as a significant platform for enhancing light–matter interactions. In all kinds of dynamic modulation metasurfaces, electro-optic modulation metasurfaces have attracted much attention due to its advantages of fast, stable and high efficiency. In order to respond to the extremely weak refractive index change of the electro-optical effect of the materials, the metasurfaces are required to support optical signals with high Q values. The quasi-bound state in the continuum (Q-BIC) is often used to enhance the light-field modulation capability of metasurfaces and to improve the modulation sensitivity of electro-optic modulators due to its ability to generate high Q-factor resonances. However, the design of an electro-optic modulation metasurface that facilitates the application of voltage and achieves modulation efficiency of nearly 100% is still in urgent need of development. In this study, single-crystal BTO metasurfaces are modeled using finite-difference time-domain method, and the structural symmetry is broken to introduce a Q-BIC resonance to generate a high Q-factor optical signal of 2.45 × 104 for high-depth electro-optic modulation. By simulating an applied electric field of 143 V/mm on the metasurface, a slight refractive index change of BTO of 8 × 10−4 was produced, leading to an electro-optical intensity modulation depth of 100%. Furthermore, the nanostructure of the metasurface was carefully designed to facilitate nano-fabrication and voltage application, and it is ideal for the development of low-power, CMOS-compatible, and miniaturized electro-optic modulation devices. Although the results of this study are based on simulations, they provide a crucial theoretical basis and guidance for the realization of efficient and realistic design of dynamic metasurfaces.

Multiple toroidal dipole Fano resonances from quasi-bound states in the continuum in an all-dielectric metasurface

In this paper, a highly sensitive sensor consisting of a silicon nanorod and symmetric rings (SNSR) is presented. Theoretically, three Fano resonances with high Q-factors are excited in the near-infrared range by breaking the symmetry structure based on quasi-bound states in the continuum (Q-BICs). The electromagnetic near-field analysis confirms that the resonances are mainly controlled by toroidal dipole (TD) resonance. The structure is optimized by adjusting different geometrical parameters, and the maximum Q-factor of the Fano resonances can reach 7427. To evaluate the sensing performance of the structure, the sensitivity and the figure of merit (FOM) are calculated by adjusting the environmental refractive index: the maximum sensitivity of 474 nm/RIU and the maximum FOM of 3306 RIU-1. The SNSR can be fabricated by semiconductor-compatible processes, which is experimentally evaluated for changes in transmission spectra at different solution concentrations. The results show that the sensitivity and the Q-factor of the designed metasurface can reach 295 nm/RIU and 850, while the FOM can reach 235 RIU-1. Therefore, the metasurface of SNSR is characterized by high sensitivity and multi-wavelength sensing, which are current research hotspots in the field of optics and can be applied to biomedical sensing and multi-target detection.

From weak to strong coupling: quasi-BIC metasurfaces for mid-infrared light-matter interactions.

Thanks to their giant, yet tunable, Q-factor resonances, all-dielectric metasurfaces supporting the quasi-bound states in the continuum (q-BIC) resonances are well-suited to provide a promising platform for quantum-coherent light-matter interactions. Yet, the strong coupling regime, characterized by the hybrid light-matter states - polaritons, has not yet been fully explored in the mid-infrared regime. This paper investigates the parameter space of vibrational strong coupling (VSC) between material and metasurface cavities supporting q-BIC resonances in the mid-infrared spectral range. We outline the effects of transition dipole strength, damping rate, and the number of molecules coupled to a single cavity, as well as the cavity damping rates, to understand their respective impacts on VSC. By tuning the Q-factor of the metasurface and material parameters, a new transition light-matter coupling zone is introduced, bridging the gap between weak and strong coupling, where polaritons form but their linewidths prohibit their spectral identification. The study further identifies the effects of cavity linewidth on polariton peak separability in strongly coupled systems, highlighting that the cavities with smaller nonradiative losses and narrower linewidths facilitate better polariton separability. Moreover, we found that matching cavity and material loss, satisfying the critical strong coupling condition, enhances the coupling strength between cavity and material. Overall, these findings can guide the design of photonic cavities suited for VSC experiments, contributing to the burgeoning fields of polaritonic chemistry, light-mediated modulation of chemical reactivity, and highly sensitive molecular spectroscopy.

Multipolar Analysis in Symmetrical Meta-Atoms Sustaining Fano Resonances

We present an optical metasurface with symmetrical individual elements sustaining Fano resonances with high Q-factors. This study combines plane-wave illumination and modal analysis to investigate the resonant behavior that results in a suppression of the forward scattering, and we investigate the role of the lattice constant on the excited multipoles and on the spectral position and Q-factor of the Fano resonances, revealing the nonlocal nature of the resonances. The results show that the intrinsic losses play a crucial role in modulating the resonance amplitude in specific conditions and that the optical behavior of the device is extremely sensitive to the pitch of the metasurface. The findings highlight the importance of near-neighbor interactions to achieve high Q resonances and offer an important tool for the design of spectrally tunable metasurfaces using simple geometries.

Q-factor of plasmonic resonances and field enhancement in the vicinity of spherical metallic nanoparticles

Q-factor of plasmonic resonances and field enhancement in the vicinity of spherical metallic nanoparticles

Low-loss chalcogenide photonic devices with a secondary coating method.

In the traditional dry etching process for photonic device fabrication, the etching effect is influenced in many ways, usually resulting in relatively large sidewall roughness and high transmission loss. In this study, an effective method, namely the secondary coating method, is proposed to reduce the transmission loss of a Ge-Sb-Se chalcogenide waveguide and increase the quality factor (Q-factor) of a Ge-Sb-Se chalcogenide micro-ring resonator. The Ge-Sb-Se waveguide and micro-ring resonator are fabricated by ultraviolet exposure/electron beam lithography and inductively coupled plasma etching technology. Afterward, a 10 nm-thick Ge-Sb-Se thin film is deposited by thermal evaporation. The measurements show that after secondary coating, the sidewall roughness of the waveguide is reduced from 11.96 nm to 6.52 nm, with the transmission loss reduced from 2.63± 0.19 dB/cm to 1.86± 0.11 dB/cm at 1.55 µm wavelength. Keeping an equal coupling condition with equal radius and coupling distance, the Q-factor of the micro-ring resonator is improved by 47.5% after secondary coating. All results indicate that the secondary coating method is a feasible way to generate low-loss and high Q-factor integrated chalcogenide photonic devices.

Coupling-Based Multiple Bound States in the Continuum and Grating-Assisted Permittivity Retrieval in the Terahertz Metasurface.

The terahertz (THz) metasurfaces that support bound states in the continuum (BICs) provide a promising platform for various applications due to their high Q-factor resonance. In this study, we experimentally demonstrate multiple BICs with different resonance symmetries in the THz metasurface based on mode coupling. The proposed metasurface is composed of 2 × 2 split ring resonators (SRRs) metamolecules. The SRRs of two different gap angles in the metamolecule lattice provide intrinsic resonance with different frequencies, and the coupling between them exhibits high transmission quasi-BIC resonance, which can be tuned by varying the gap angle. The arrangement of SRRs in the 2 × 2 metamolecule lattice determines the types of coupling that govern the resonance symmetry of quasi-BIC. More interestingly, the multiple quasi-BICs enabled by different couplings can be simultaneously achieved in a metasurface. Apart from tuning the gap angles, the permittivity in the vicinity of SRRs also changes the resonance frequency. Consequently, quasi-BIC can be artificially formed by deliberately constructing the permittivity difference of the dielectric environment on the SRRs. In view of this, we introduce the scheme of permittivity retrieval for the dispersive analyte, assisted by the fixed-permittivity gratings. In addition, we experimentally demonstrate the metasurface in combination with the microfluidic chip for the sensing of the glucose solution concentration. Our findings offer a possible strategy for the existing manufactured metasurface to achieve quasi-BIC resonance and provide a promising candidate for approaching the spectral analysis of the biochemical.

Modal Phase-Matched Bound States in the Continuum for Enhancing Third Harmonic Generation of Deep Ultraviolet Emission.

Coherent deep ultraviolet (DUV) light sources are crucial for various applications such as nanolithography, biomedical imaging, and spectroscopy. DUV light sources can be generated by using conventional nonlinear optical crystals (NLOs). However, NLOs are limited by their bulky size, inadequate transparency at the DUV regime, and stringent phase-matching requirements for harmonic generation. Recently, dielectric metasurfaces support high Q-factor resonances and offer a promising approach for efficient harmonic generation at short wavelengths. In this study, we demonstrated a crystalline silicon (c-Si) metasurface simultaneously exciting modal phase-matched bound states in the continuum (BIC) resonance at the fundamental wavelength of 840 nm with a higher degree of freedom for precise control of the BIC resonance and a plasmonic resonance at the wavelength of 280 nm in the DUV to enhance third harmonic generation (THG). We experimentally achieved a Q-factor of ∼180 owing to the relatively large refractive index of the c-Si and the geometric symmetry breaking of the structure. We realized THG at a wavelength of 280 nm with a power of 14.5 nW by using a peak power density of 15 GW/cm2 excitation. The measured THG power is 14 times higher than the state-of-the-art THG dielectric metasurfaces using the same peak power density in the DUV regime, and the maximum obtained THG power enhancement factor is up to 48. This approach relies on the significant third-order nonlinear susceptibility of c-Si, the interband plasmonic nature of the c-Si in the DUV, and the strong field confinement of BIC resonance to boost overall nonlinear conversion efficiency to 5.2 × 10-6% in the DUV regime. Our work shows the potential of c-Si BIC metasurfaces for developing efficient and ultracompact DUV light sources using high-efficacy nonlinear optical devices.

Large-area polycrystalline α-MoO3 thin films for IR photonics

In recent years, the excitation of surface phonon polaritons (SPhPs) in van der Waals materials received wide attention from the nanophotonics community. Alpha-phase Molybdenum trioxide (α-MoO3), a naturally occurring biaxial hyperbolic crystal, emerged as a promising polaritonic material due to its ability to support SPhPs for three orthogonal directions at different wavelength bands (range 10–20 μm). Here, we report on the fabrication, structural, morphological, and optical IR characterization of large-area (over 1 cm2 size) α-MoO3 polycrystalline film deposited on fused silica substrates by pulsed laser deposition. Due to the random grain distribution, the thin film does not display any optical anisotropy at normal incidence. However, the proposed fabrication method allows us to achieve a single α-phase, preserving the typical strong dispersion related to the phononic response of α-MoO3 flakes. Remarkable spectral properties of interest for IR photonics applications are reported. For instance, a polarization-tunable reflection peak at 1006 cm−1 with a dynamic range of ΔR = 0.3 and a resonance Q-factor as high as 53 is observed at 45° angle of incidence. Additionally, we report the fulfillment of an impedance matching condition with the SiO2 substrate leading to a polarization-independent almost perfect absorption condition (R < 0.01) at 972 cm−1 which is maintained for a broad angle of incidence. In this framework our findings appear extremely promising for the further development of mid-IR lithography-free, scalable films, for efficient and large-scale sensors, filters, thermal emitters, and label-free biochemical sensing devices operating in the free space, using far-field detection setups.

Nanocavity tuning and formation controlled by the phase change of sub-micron-square GST patterns on Si photonic crystals.

It has been well established that photonic crystal nanocavities with wavelength sized mode volume enable various integrable photonic devices with extremely small consumption energy and small footprint. In this study, we explore the possibility of non-volatile functionalities employing photonic crystal nanocavities and phase change material, Ge2Sb2Te5 (GST). Recently, non-volatile photonic devices based on GST have attracted significant interest and are expected to enable energy-efficient photonic processing, especially for optical computing. However, the device size and the area of GST in previous studies have been rather large. Here, we propose and fabricate Si photonic crystal nanocavities on which submicron-square GST patterns are selectively loaded. Because of the strong light confinement, extremely small area of GST is sufficient to manipulate the cavity mode. We have succeeded to fabricate 30-nm-thick and several-100nm-square GST blocks patterned at the center of photonic crystal cavity with a high alignment accuracy. We confirmed that the resonant wavelength and Q-factor of cavity modes are controlled by the phase change of GST. Moreover, cavity formation controlled by submicron-sized GST is also demonstrated by GST-loaded photonic-crystal line-defect waveguides. Our approach in which we place sub-micron-sized GST inside a photonic crystal nanocavity is promising for realizing extremely energy-efficient non-volatile integrable photonic devices, such as switches, modulators, memories, and reconfigurable novel devices.

ВЛАСНІ КОЛИВАННЯ В ПЛАНАРНО-КІРАЛЬНИХ ДВОШАРОВИХ ОБ’ЄКТАХ ПОРОДЖУЮТЬ ШТУЧНУ ОПТИЧНУ АКТИВНІСТЬ

Subject and Purpose. The research focuses on how the resonance frequencies, the Q-factor of resonances, and the polarization plane rotation ability are influenced by the topology of individual components of a planar-chiral double-layer object consisting of a pair of con- jugated irises having rectangular slots and accommodated in a circular waveguide. Methods and Methodology. All the numerical results are obtained by the mode-matching technique (MMT) and the transverse reso- nance method on the basis of our own proprietary MWD-03 software package. Results. By the waveguide example, it has been shown that the internal structure of individual components and dihedral symmetry of the conjugated bilayer allow all the conclusions of the spectral theory (theory of eigen-oscillations) to be carried over to all the objects of the type. On the other hand, these objects behave as symmetric two-port waveguide components with conventionally "symmetric" and "antisymmetric" eigen-oscillations. The mutual coupling of these eigen-oscillations depends on the bilayer parameters. Where the frequen- cies of these eigen-oscillations are close enough, the polarization plane rotation and the transmission bandwidth reach their highest. It has been demonstrated that as a slot number increases, the resonance frequency decreases. The theoretical results have been confirmed by the measurements at the X range of frequencies for pairs of conjugated irises with various numbers of rectangular slots. Conclusions. A pair of conjugated chiral irises can rotate the polarization plane. The iris topology, iris spacing, and the mutual ro- tation angle alter resonance frequencies. The resonance frequencies can be reduced by increasing the rectangular slot length and/or slot number. Even though they have not longitudinal symmetry, such objects have properties of two-port waveguide components. In particular, the phase shift of their reflection and transmission coefficients is modulo 90. Besides, a possibility exists to divide eigen-oscillations into conventionally "symmetric" and "antisymmetric" based on the proximity of their fields to those whose type of symmetry is known before- hand. This makes it possible to approximate the reflection and transmission coefficients through corresponding eigenfrequencies.

Ultra-high Q-factor and amplitude-tunable Fano resonance in vanadium dioxide-silicon hybrid metamaterials.

As the resonance response in magnetic systems usually occurs at low frequencies, previously known as terahertz high Q-factor resonances, are mainly excited by electrical resonances. In this paper, we present a metamaterial based on vanadium dioxide-silicon arrays capable of achieving a Q-factor of up to 165 198; the ultra-high Q-factor Fano resonance excited by the proposed metamaterial is mainly affected by strong magnetic resonance. The analysis of diffractive coupling theory, electric field, magnetic field and current distribution shows that strong magnetic resonance is mainly realized by coupling localized plasmon resonance with the lattice resonance. Due to the conductivity-tunable nature of vanadium dioxide, the proposed metamaterial features an amplitude tunable function with a modulation depth of 98.8%. The spectral response of the analyte demonstrates the capability of the proposed metamaterial for application as a sensor with a maximum sensitivity of 69.52 GHz per RIU and a figure of merit of 15 456. The ultra-high Q-factor performance and amplitude tunability of the proposed structure can be applied to terahertz devices, such as ultrasensitive sensors, filters and optical switches.

Self-similar ring element array develop for Fano response as mid-infrared: Liver cancer study

the mid-infrared metasurfaces play an important in optical applications including sensing and having Fano response is a benefit in this field for many goals including biosensing. So, these points are considered in this study and self-similar Plasmonic metasurface is suggested for sensing application. The suggested structure has a symmetrical formation but non-similar elements are considered to raise the Fano response. The structure contains five rings while the central one has a larger dimension than the four elements surrounding the central ring as an array of rings. The interaction of bright modes for both elements of the central ring and the array elements makes the Fano response at 1850 and 1910 nm while the single central ring has resonance at 1910 nm and the array rings have resonance at 1850 nm. The interaction of the element enhances the Q-factor of both resonances. The Full-wave method finite integrated technique (FIT) is used for modeling as a time domain method and the couple mother theory (CMT) is used for the analytical model. This metasurface is implemented as a sensor for detecting material under test and the sensitivity of the sensor is obtained 282 nm/RIU (Refractive Index Unit). Finally, the tissue of the liver as healthy and cancer cells are considered for examining the quality of the sensor.