Abstract
High-quality-factor Fano resonances excited by metasurfaces have been playing an important role in the field of optical sensing. A high-performance sensor for refractive index and methane concentration measurement is designed and prepared in this paper. The symmetry of the structure is broken by altering the size of the rectangular holes in the tetramer, resulting fano resonance Q-factor of 34176 and modulation depth of 100%. The finite-difference time-domain (FDTD) method is used to simulate the structure. The results show that the refractive index and methane concentration sensitivity are 325 nm/RIU and -1.44 nm/%, respectively. The FOM can achieve 10156 RIU−1. Furthermore, experiments are carried out on the gas application of the structure and the sensitivity of methane concentration is -1.03 nm/%. Therefore, the proposed metasurface has more practical and feasible significance in background refractive index and gas environment monitoring.
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