Abstract The damage produced by pulsed electron beam irradiation of vanadium single crystals has been studied by the channeling technique and by thin film X-ray analysis. A surface disorder peak and a small dechanneling component was produced by applying electron energy densities below the melting threshold. The structure of the surface disorder was microcrystalline or amorphous and the dechanneling component could be described by small angle boundaries. After melting of the crystal surface to a depth of approximately 2 μm, epitaxial regrowth with a high defect density took place.
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