This work characterizes the metal nanoparticle fabrication process using in situ nanoparticle measurement to obtain the desired geometric sphericity of nanoparticles. Without process characterization and control, the sphericity of prepared TiO 2 nanoparticles varied widely by up to 10% or more of the particle diameter. Therefore, an in situ particle sampling method was employed to collect on-line prepared particles and the particle contours were obtained by FE-SEM. They were analyzed using an image processing approach that had been developed to quantify the sphericity of TiO 2 nanoparticles. Experimental results indicate that the discharge energy parameters, including the operating temperature, vacuum pressure, pulsed peak voltage, pulsed peak current, the pulse on-time and the pulse off-time influence the particles’ sphericity. The improved process parameters enhance the average sphericity of the prepared TiO 2 particles by up to 40%.
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