Chemical modification of argon plasma-pretreated poly(tetrafluoroethylene) (PTFE) film and Si(100) surfaces by UV-induced surface graft polymerization with glycidyl methacrylate (GMA) and glycidyl acrylate (GA), respectively, followed by epoxide-ring opening reaction with aniline (An), and finally oxidative graft polymerization with aniline had been carried out to render the PTFE and silicon surfaces electroactive. The composition and microstructure of the graft-polymerized PTFE and silicon surfaces were studied by X-ray photoelectron spectroscopy (XPS). The physicochemical characteristics of the polyaniline (PANI) chains grafted onto PTFE film and silicon surfaces were grossly similar to those of the PANI homopolymer. The surface resistance of the aniline graft-polymerized PTFE film and silicon substrate was reduced to between 10 4 Ω/□and 10 7 Ω/□.