The basic design used to develop a beam profile monitor based on a Faraday cup array (FCA), which has the advantages of high robustness, reliability, and long-term stability, along with the ability to measure the ion current over a wide dynamic range, was developed. The total system is divided into three parts: i.e., a faraday cup, measuring electronics, and a display program part. The FCA was considered to consist of a collimator, suppressor, insulator frame, and 64 (8 × 8 array) tiny Faraday cups (FC). An electronic circuit using a multiplexer was applied to effectively address many signal lines and the printed circuit board (PCB) was designed to be divided into three parts, i.e., an electrode PCB (ELEC PCB), capacitance PCB (CAP PCB), and control PCB (CON PCB).