Novel electrochemical processes of Bi2Te3 nanocomposites been developed for micro thermoelectric power generators (micro TEG) with a high figure of merit (ZT) at room temperature. Nanoparticles or/and carbon nanomatrials are dispersed in an electrolyte for electrodeposition, and co-electrodeposition is performed to make a thin or thick film. The small grained nanocomposite film is formed by the inclusion of the nanoparticles or/and carbon nanomaterials. Reduction of thermoelectric properties can be observed because of the phonon scattering with the nanostructures. In addition, nanomaterials inclusion can change the carrier density of the composite films, thus, appropriate density of inclusion can improve the performances of the electrical conductance and Seebeck coefficient. Maximum ZT ~1 is obtained by optimization of the deposition condition, which is 6 times higher than that of reported pristine Bi2Te3 deposited by electrodeposition also higher value than that of bulk Bi2Te3 (0.7~0.8). Those results show that this deposition methods have a high potential ability to manufacture the micro TEG for energy harvesting devices. Figure 1